For other sources of Information on MEMS, please see MEMS at trimmer.net (TM)
Please add a link or bookmark to http://www.trimmer.net Other links will change.
This web site was started in 1997. Since then, many other web sites have developed excellent lists of links. Several of these other sites are listed below.
http://www.people.cornell.edu/pages/akt1/superlink.html , http://www.people.cornell.edu/pages/akt1/memsmain.html ,
http://www.biomems.uc.edu/links/ , http://engineering.dartmouth.edu/~microeng/links1.html ,
http://www.engin.umich.edu/dept/che/research/burns/Web%20Page/research_links.html , http://www-mtl.mit.edu/semisubway.html ,
http://www.memsnet.org/ , http://www.ece.umn.edu/groups/mems/links.html , http://www2.mae.cuhk.edu.hk/~aml/link.html ,
All Sites Listed by Domain Name (ie net trimmer)
The text and reference of these MEMS sites comes from a wide range
of sources.
We do not vouch for their accuracy or appropriateness.
at ac tuwien
http://www.tuwien.ac.at/histu/lehr/358019.html
Intro to MEMS
at ac uni-linz mechatronik
http://www.mechatronik.uni-linz.ac.at/
84. Mechatronics & MEMS, Linz Home Page, Johannes Kepler University
of Linz, Austria
be ac kuleuven mech
http://www.mech.kuleuven.ac.be/~psheeren/mTech.htm
The Catholic University of Louvain, Belgium
Information about microsystem technology & MEMS work in general,
and micro Electro
Discharge Machining in particular.
ca ab amc 30. Alberta Microelectronics Centre
The Alberta Microelectronic Centre (AMC) is an Alberta technology corporation,
with a mission to develop the best commercially relevant MEMS & microelectronic
technologies for its customers' products and services. -- now
called Micralyne Inc. www.micralyne.com
,
http://www.amc.ab.ca/
ca ab amc The Materials and Devices Laboratory of
AMC develops and manufactures miniaturized devices using semi-conductor
fabrication techniques, often referred to as micromachining technologies
or MEMS. AMC fabricates a range of products that are used in the telecommunications
and biotechnology sectors, and is known as one of North America's foremost
micromachining companies.
http://www.amc.ab.ca/mad/labhtml.htm
ca cmc
http://www.cmc.ca/Fabrication/Micromachining/micromachhp.html
In 1994 CMC awarded several contracts to experienced Canadian researchers
to enable them to investigate and document the use of Mitel's 1.5-micron
CMOS technology for micromachining & MEMS. Those documents have been
integrated to form "An Introduction to Micromachining: Results of Projects
Using Mitel's 1.5-micron CMOS Technology to
Develop a Canadian MEMS Process"
ca cmc keeper
http://keeper.cmc.ca/Fabrication/Micromachining/ic9508_summ.html
An Introduction to Micromachining: Results of Projects Using Mitel's
1.5-micron CMOS Technology to Develop a Canadian MEMS Process
ca polymtl lisa
http://lisa.polymtl.ca/
Information on the Laboratory for the Integration of MEMS Sensors and
Actuators Department of Engineering Physics at Ecole Polytechnique de Montreal
conducted by Professor John F CURRIE.
Link sites http://lisa.polymtl.ca/LISA_bookmarks.html
ca tuns me micron
http://micron.me.tuns.ca/
MEMS Laboratory at DalTech
Etch Simulator http://mira.me.tuns.ca/segs/Welcome.html
ca ualberta amc
Alberta Microelectronic Centre
http://www.amc.ualberta.ca/
The Alberta Microelectronic Centre (AMC) is an Alberta technology corporation,
with a mission to apply commercially relevant new MEMS and microelectronic
technologies to our customers' needs. Our success is measured by the amount
of new business developed by our customers. ï AMC Overview ï Design Engineering
Services ï Microfabrication Services ï SIMBAD (Thin Film Process Simulator)
ï Newsletter ï Project Highlights
ca cms 22. Micromachining, CMC and Can-MEMS
Canadian Microelectronics Corporation (CMC)
http://www.cmc.ca/Fabrication/Micromachining/micromachhp.html
Index of /Fabrication/Micromachining/ MEMS
http://www.cmc.ca/Fabrication/Micromachining/
ca sfu fas
Simon Fraser University: Institute of Micromachining and Microfabrication
Research
http://fas.sfu.ca/css/immr/
Established in 1993 to enhance micromachining research anddevelopment
and to encourage the application of research results in thedesign and fabrication
of miniature sensors and actuators. This page ispresenting products of
the institute. 1.Sub-Nanogram Mass Measurement in Liquid 2.Pressure Time
Recorder 3.Thermal Peristaltic Pump 4.DNA Amplification Chamber 5.Micromachined
DNA Purification Units 6.Tactile Sensor For Endoscopic Surgery 7.Applied
Pressure Sensor for Clinical Use 8.Prostate Cancer Detector 9.CMOS Micromachined
Flow Sensor 10.Dynamic Thermal Scene Simulator 11.Incandescent Pixel 12.Multiproject
Wafer
ca tuns me micron
http://micron.me.tuns.ca/
Welcome to the MEMS Laboratory at DalTech, On Line Etch Silmulator
ch csem
CSEM Centre Suisse d'Electronique et de Microtechnique SA
http://www.csem.ch/
CSEM's mission is to generate new high-tech business, based on leading-edge
know-how and expertise in MEMS, microelectronics, microtechnologies, related
systems and materials. As an interface between both in-house and
external research and the industrial world, CSEM contributes to the realization
of novel products. Relying on its own enabling technologies, CSEM will
undertake the development of custom MEMS products right through to the
manufacturing phase, as well as the procurement of special products in
industrial quantities. CSEM is a private company of public utility, the
shares in which are held by leading Swiss enterprises. Advanced research
programs and capital equipment are partly supported by the Swiss federal
government. Beside Switzerland, CSEM is internationally active in a dozen
European countries, as well as overseas.
ch epfl dmtwww
Swiss Federal Institute of Technology
http://dmtwww.epfl.ch/ims
http://dmtwww.epfl.ch/imt/micsys/
The Institute of Microsystems of the Swiss Federal Institute of Technology
(IMS-EPFL) is a multi-disciplinary research institute activity in the areas
of Microsystem design, integration and fabrication technology. Current
research of interests are: magnetic sensors, Non-Si and 3-D microfabrication
methods, microfluidic modeling and devices and bio-medical applications
of microfabrication technology. The majority of this research is
undertaken in close cooperation with various industrial partners.
Current facilities will be expanded in early 1999 to include a 10,000 sq.
ft fully-equipped clean-room.
ch fsrm
Swiss Foundation for Research in Microtechnology (FSRM)
http://www.fsrm.ch/
The Swiss Foundation for Research in Microtechnology (FSRM) is an independent
non-profit organization in the field of microtechnology amd MEMS. It fosters
the research in the field of microtechnology and MEMS and promotes
the transfer of R&D outputs in industry. It offers short courses for
industry, support for establishing partnership, euro-information, all microtechnology
and MEMS related information. It operates in Switzerland and Europe.
http://www.fsrm.ch/microsystems/index.html
Many training courses in MEMS and microsystems technology, please contact
Annette Locher locher@fsrm.ch
ca tuns me micron
http://micron.me.tuns.ca
MEMS Lab at DalTech, On line etch simulator,
ch unine www_imt_dr
Institute of Microtechnology, University of Neuchâtel, Switzerland
http://www-imt-dr.unine.ch
The Sensors, Actuators and Microsystems Laboratory (SAMLAB) of the
Institute of Microtechnology of the University of Neuchâtel has over
ten years experience in the area of MEMS, microsensors, microactuators
and microsystems. Current research areas include discrete microsensors,
micromechanical devices, microfabricated tools for nanoscience and nanotechnology,
miniaturized chemical analysis systems, micro-instrumentation for space
research, biosensors and bioelectronics, MEMS, etc. The microfabrication
and nanofabrication research facility (MNRF) operated by SAMLAB of the
Institute of Microtechnology of the University of Neuchâtel (IMT
UNI-NE) comprises a very complete clean room including double side mask
aligners, wet etching, dry etching, diffusion and oxidation equipment,
etc. The existing facility is used for prototype fabrication of microsensors
and microactuators and MEMS. Over the years, the MNRF has also been used
to execute training courses in technology with mainly industrial participants
such as the "Hands on MEMS" course, which is part of a COMETT program "MEMS"
and the FSRM course "Introduction to microfabrication technology".
com advancedmicrosensors
http://www.advancedmicrosensors.com/home/default.asp
MEMS, MOEMS and thin film device design, development, proto and volume
manufacturing company.
com analog
http://www.analog.com/
http://www.analog.com/publications/press/products/newfab_021496.html
Analog Devices, Inc. is a leading semiconductor company that develops,
manufactures and markets high-performance analog, digital, MEMS, and mixed-signal
integrated circuits (ICs) used in signal-processing applications.
com atomasoft
Atomasoft is a company devoted to simulation in the field of
Nanotechnology and Science.
www.atomasoft.com
com argonide
http://www.argonide.com/
Your Direct Source for Metastable Nano Metal Powders.
com berkeleymicro
http://berkeleymicro.com/
Berkeley MicroInstruments designs, manufactures, and markets electronic
instruments that incorporate sensors based on its patented Flexural-Plate-Wave
(FPW) technology. We recently introduced two new products, the Microviscometer
BMV105 and Chemical Vapor Sensor BMC200
com brewerscience
www.brewerscience.com/sm
The Optical Materials Division is expanding our product line to include
MEMS. The MEMS Unit mission is to provide specialty or niche materials
that make commercialization of MEMS products possible.
com capovani
www.capovani.com
Our company, Capovani Brothers Inc., is a dealer in refurbished semiconductor
manufacturing equipment. We deal in a wide variety of equipment and have
a multitude of items in inventory that can be used by the MEMS community.
We deal with a variety of customers ranging from small start-up companies
and national laboratories to universities and large corporations.
Our web-site is updated daily and represents our current inventory.
Included are many photos and detailed specifications with an easy-to-use
search feature, that also allows the customer to inquire, comment and even
provide counter-offers on the equipment. Your web-site is a valuable resource
for the MEMS industry and we feel the addition of our web-site would be
an asset as well.
com colibrys
www.colibrys.com
Colibrys offers medium-volume (100 k / annum) production of custom
and standard components to diverse high value-added custom market applications
including: Navigation and Guidance Telecommunications
Life Sciences Industrial Applications Foundry Services
com designw
Design Workshop Technologies,
Design Workshop Technologies creates high-quality computer aided design
software for the microelectronics and photonics industries and for other
microfabrication applications.
http://www.designw.com .
com egginc 32. EG&G IC Sensors
Based in Milpitas, California, EG&G uses state-of-the-art silicon
micromachining technology to manufacture components for physical measurement
and control. EG&G IC Sensorsí MEMS product line includes pressure sensors,
accelerometers, valves, and custom silicon microstructures. The firmís
major MEMS markets are industrial, automotive, and medical applications,
along with consumer electronics and aerospace.
http://www.egginc.com/bin/mirror/webmate/egg/page/egg/view_division/Divisions/Opto|112
com elvisions
http://www.EVGroup.com
EV Group provides leading-edge manufacturing solutions to the semiconductor,
MEMS, and micromachining market segments. Electronic Visions provides R&D
and automated high-volume solutions that include wafer bonding, lithography,
wafer coating/spin coaters, developing and wafer cleaning systems used
in MEMS applications.
com europractice
www.europractice.com
MST resources in Europe
com honeywell htc
http://www.htc.honeywell.com/projects/mems/
Honeywell, Development of LIGA-based tunable IR filters that
can be coupled with microstructured uncooled IR sensor imaging technology
to demonstrate multispectral imaging.
com intellis
IntelliSense Homepage
http://www.intellis.com/
IntelliSense Corporation is the world leader in developing CAD tools
for Microsystems applications, providing prototyping, and consulting services
to develop MicroElectroMechanical Syetems (MEMS).
com intersci
http://www.intersci.com/p3design.htm
InterScience, Inc. SBIR for Air Force & Army-TRP, MEMS devices
com issys mems
http://www.mems-issys.com/
http://www.mems-issys.com/sites.htm
Links to web sites
ISSYS Inc. specializes in silicon micromachinig technologies and its
applications to the manufacturing of high performance, low cost microsensors,
MEMS, and intelligent microsystems.
com ivamnrw
http://www.ivamnrw.com
com ivamnrw
Mikrostruktur-Initiative NRW
http://www.ivamnrw.com
Mikrostruktur-Initiative NRW, c/o IVAM NRW e.V., is an international,
industrial community of interest. Our members are companies (25) and research
organisations (15) working in the field of MEMS and microstructure technologies.
All major fields of MEMS and microtechnologies are covered and products
based on MEMS and microtechnologies being offered. Mikrostruktur-Initiative
NRW c/o IVAM NRW e.V. Emil-Figge-Str. 76 D - 44 227 Dortmund Tel.: +49
231 / 9742 - 168 Fax: +49 231 / 9742 - 150
com kerdry
http://www.kerdry.com/
Kerdry is a french major company in thin films technologies and optical
components coatings
com lucifer
http://www.lucifer.com/~sean/n-lists.html
Nanotechnology Mailing Lists -- Table of Contents
com mems 11. MEMStek Products LLC
MEMS and Micromachining Links. Lists several sites of interest.
http://www.mems.com/Tall_mems.htm
World's smallest micro-miniature MEMS gear pump
http://www.mems.com/
com memsoptical
http://www.memsoptical.com/
MEMS Optical Inc, is to provide the high volume manufacturing market
with high performance optics and opto-electronics at a low cost.
Refractive micro lense array
com memsolptical
http://www.memsoptical.com/
MEMS Optical Inc. The objective is to provide the high volume
manufacturing market with high performance MEMS optics and opto-electronics
at a low cost.
com memx
http://www.memx.com/
MEMX is a broad-based MEMS company pursuing a variety of high value
commercial and government products. Our business focuses on design,
fabrication, packaging, test and qualification of MEMS-based devices, and
we partner with others to integrate the chips into high value systems
and products.
com micralyne
Micralyne is an Alberta technology corporation, with a mission to develop
the best commercially relevant MEMS & microelectronic technologies
for its customers' products and services.
www.micralyne.com
com microopticalcorp
http://www.microopticalcorp.com/mems.htm
The MicroOptical Corporation is presently engaged in contracts with
the Department of Defense for the development of optical micro-electromechanical
systems (MEMS).
com microtec-d
www.microtec-d.com
Production, development and consulting
com mwrn
http://www.mwrn.com/
An Annotated Guide to On-line Resources for Microscopists and Microanalysts
com nexus-emsto
European MST Online (EMSTO)
http://www.nexus-emsto.com/
European Information Clearinghouse on Microsystem Technology and MEMS
provided by NEXUS.
MEMS Links http://www.nexus-emsto.com/links.html
com nanothinc
Nanotechnology
http://www.nanothinc.com/
The latest news about nanotechnology. NanoNews is a weekly news service
providing top stories, features and announcements of general interest.
com nanothinc
Survey of MEMS and Micro-Actuator Technologies for Future Spacecraft
Missions
http://nanothinc.com/nanosci/microtech/mems/ten-actuators/gilbertson.html
The development of spacecraft technology has historically resulted
in an abundance of commercial spin-offs. Ironically, future spacecraft
may rely on many technologies now under development for commercial markets.
The medical, automotive, robotics, and instrumentation markets have stimulated
great advances in the field of micro-electro-mechanical systems (MEMS).
Commercial MEMS products today include chemical sensors, acceleration and
pressure transducers, and micro valves. In fact, many of these MEMS devices
are so small that they are best observed with the aid of a microscope.
The presentation covers recent MEMS micro-actuator developments, their
method of operation, design limitations, comparative performance, and their
potential spacecraft applications.
com orchidbio
http://www.orchidbio.com
Orchid Biocomputer, 201 Washington Road, Princeton NJ 08543-2197, USA,
"The Leader in Microfluidic Array Technology"
com okotech
http://www.okotech.com/index.html
93. OKO Technologies is a manufacturer of precision MEMS multichannel
micromachined adaptive mirrors, which provide a unique possibility of fast
wavefront control in modern optical systems. The company also produces
and sells software for optical design, diffraction analysis and hologram
synthesis.
com opticalinc
http://www.opticalinc.com/
Microscopes & optics , http://www.opticalinc.com/relatedlinks.htm
optical links .
com plasma-apsi
http://www.plasma-apsi.com/
The "Fourth State of Matter", Plasma, has been successfully controlled
to form new materials and modify surfaces for the manufacturing of new
MEMS products.
com redwoodmicro
Redwood MicroSystems
http://www.redwoodmicro.com/
Redwood MicroSystems is the world leader in MEMS Silicon Microvalves
and microvalve-based Pressure Regulators and Mass Flow Controllers. These
MEMS valves are based on patented thermo-pneumatic Operating Principles
which provide a tremendous amount of actuation force from an incredibly
small silicon chip. Redwood's MEMS products offer benefits in size cost
and performance versus pressure and flow regulators using conventional
solenoid valves. To Contact Redwood, call our customer service hotline
at 1-800-888-8283 or contact one of our 20 Sales Representatives, U.S.
distributors, or International Distributors.
com rgraceassoc
http://www.rgraceassoc.com/
Marketing Counsel and Analyst Specializing in the MEMS, Sensors and
Semiconductor Industries
com sma_mems
http://www.sma-mems.com/
TiNi Alloy Company Home Page. We are developing the technology of heat
actuated shape-memory alloy (SMA) thin film microdevices. Micro
valves available for purchase. Useful info on Shape Memory Alloy.
mailto:tini1@holonet.net
com smptech
http://www.smptech.com/serv01.htm
SMP Technology's engineering specializes in the methodology of product
development. It is recognized that few products justify long, expensive
programs of investigation. Most product-related problems which manufacturers
face have been encountered at another time and place, in another industry.
MEMS related
com siliconlight
http://www.siliconlight.com/
77. Silicon Light Machines (formerly Eschelle, Inc.)
Silicon Light Machines' unique Grating Light Valve technology represents
a MEMS approach to manufacturing high-resolution, high-contrast, and bright
displays. The GLV technology is based on simple physical principles, and
can be manufactured using conventional MEMS silicon-based manufacturing
technologies. The GLV MEMS technology was originally developed and patented
by Professor David Bloom and his students at Stanford University. To create
a GLV device, Micro-Electromechanical (MEMS) techniques are used to form
pixels on the surface of a silicon chip.
com silexmicrosystems
http://www.silexmicrosystems.com
Offers design, development and volume manufacturing of MEMS components
primarily for customers in the telecommunication and life science markets.
Specialties include bulk micromachining with etching, V-groove and DRIE,
anodic, fusion, adhesive and solder bonding, surface micromachining with
multilayer polysilicon, polyimide/BCB dielectrics for RF applications,
and electroplating and electroless bumping of gold, nickel and solder
tin. Components are developed and fabricated in state-of-the-art
class 10-10000 cleanrooms using 4", 6" and 8" diameter wafers.
com sysplan
http://esc.sysplan.com/esc/index.html
Electronic Subcommittee (ESC) NAVIGATOR
The Electronics Subcommittee, established by the Civilian Industrial
Technology Committee under the President's National Science and Technology
Council, has developed the ESC NAVIGATOR, a tool to inventory and search
federally-funded research and development programs in electronics.
com stsystems
Surface Technology Systems Ltd
http://www.stsystems.com
Surface Technology Systems Limited are suppliers etch and deposition
equipment to MEMS R&D and specialist production facilities. The STS
Advanced Silicon Etch (ASE) process is the market leader for anisotropic
etching of silicon for MicroElectroMechanical Systems (MEMS). The ASE process
is run on the Multiplex ICP system an inductively coupled plasma system
suitable for a wide range of high density, low pressure plasma MEMS processing
applications including deep anisotropic etching of silicon. STS has recently
celebrated the manufacture of its 100th ICP system, 50 of which were configured
for ASE applications. This gives STS an installed base of more than 10
times its nearest competitor.
com tanner
http://www.tanner.com/
We offer design tools, design services, technical expertise,
and research experience in the areas of ICs (integrated circuits),
ASICs (Application Specific ICs), and MEMS (Micro Electro Mechanical Systems).
We invite you to explore our web site to learn more about us and our software
products and services.
com vaisala
Vaisala
http://www.vaisala.com
Vaisala, manufacturer of instruments for MEMS, meteorology and environmental
monitoring. Micromechanical and MEMS products include capacitive pressure
sensors and micromachined interferometer.
com verysmalltech
http://www.verysmalltech.com/
Very Small Technologies, Inc. is a MEMS and nano-technology fabrication
company. VST is built upon a vision of rapid and flexible product development
and high volume manufacturing.
com xerox parc
http://www.parc.xerox.com/spl/projects/smart-matter/default.html
Xerox - PARC's research programs in MEMS
http://www.parc.xerox.com/hogg
Tad Hogg - distributed control of smart matter, the relation between
physics and computation, including
http://www.parc.xerox.com/spl/projects/smart-matter/
Smart matter
cz cvut feld micro
Microsystems Group Department of Microelectronics CTU in Prague
http://www_micro.feld.cvut.cz/pages/system.htm
MEMS Research Activities (Projects): Semiconductor Microsystem Structures
Sensor Signals Processing Sensor Signals Wireless Transmission Sensor Control
Systems Biomedical Sensors Flowmeters Temperature Sensors Pressure Sensors
de bartels-mikrotechnik
http://www.bartels-mikrotechnik.de/index.htm
Bartels Mikrotechnik GmbH
Bartels is a supplier of MEMS microproducts such as microgrippers.
de fhg isit
Fraunhofer Institute for Silicon Technology (ISiT)
http://www.isit.fhg.de/
The Fraunhofer-Institut für Siliziumtechnologie (ISiT) in Itzehoe
is operating the most advanced silicon processing line of the Fraunhofer-Gesellschaft,
the biggest non-profit organisation in Germany for applied R&D. This
line is the basis for development and manufacturing of silicon based devices
for microelectronics, MEMS, and microsystems applications. One important
asset of the ISiT concept is the possibility to manufacture prototypes
as well as low volume series of these types of systems. Microsystem and
MEMS technology is one key working area of ISiT. Therefore all relevant
MEMS and MST technologies from bulk to surface micromachining, electroplating,
bonding techniques, mounting and packaging, hybrid and monolithic integration
of devices, IC and system design and device characterisation is available
at ISiT. ISiT has over 15 years experience in MEMs and MST sensors and
actuators development and works together with major companies as well as
innovative SME's from different market areas. ISiT is also the co-ordinator
of NEXUS, the European Network of Excellence in Microsystem Technology.
de fh-heilbronn
http://www.fh-heilbronn.de/MFT/fach/wehl/welcome.html
Fachhochschule Heilbronn Fachbereich Elektronik und
Mechatronik Studiengang Mikro- und
Feinwerktechnik
Tutorial http://www.fh-heilbronn.de/MFT/fach/wehl/mst/mik-tech.htm#IO
MEMS related.
de fzi
FZI MRT Project ELISA
http://www.fzi.de/divisions/mrt/projects/elisa.html
Development Tools for Sensors and Actuators in the Area of Microsystem
Technology and MEMS.
de fzk bksun17
Forschungszentrum Karlsruhe
http://hbksun17.fzk.de:8080/PMT/pmte.html
One of the main activities in MEMS / MST / LIGA in Germany is held
by PMT (Projekt Mikrosystemtechnik) at the Forschungszentrum Karlsruhe
(FZK, former KfK). At the moment, PMT-coworkers are turning out the first
*industrial* LIGA products!
de fzk pmtsun3 16. Micro Systems at the Forschungszentrum
Karlsruhe
The Karlsruhe Research Center (formerly Karlsruhe Nuclear Research
Center, KfK) is one of the largest non-commercial science and engineering
research institutions in Germany. It works on research and development
problems of public interest, exclusively for peaceful purposes, in the
fields of technology and the environment. Its "Research for Environmentally
Sustainable High Technologies" program is concentrated on these four main
areas: environment, energy, microsystems engineering & MEMS, and fundamental
research.
http://pmtsun3.fzk.de/English/home_e.htmlhttp://www-pmt.fzk.de
de imm-mainz
http://www.imm-mainz.de/microsync/
103. Institute of Microtechnology, Mainz
IMM is a non-profit research and development institute, founded and
owned by the state of Rhineland-Palatinate, a federal state of Germany.
It is located in Mainz, which is the capital of Rhineland-Palatinate and
one of the political, cultural and economic centers of the highly developed
Rhine-Main area. The ultimate goal of IMM is to transfer innovative ideas
quickly and efficiently into marketable products, helping its partners
from industry to achieve commercial success. MEMS
de micromotive-mikrotechnik
www.micromotive-mikrotechnik.de
We provide microtechnology as a service for other companies. We develope
and fabricate customer components in small as well as large volume. Our
technology are thin and thickfilm processes, silicon bulk micromachining
and microassambly. We focus on sensors and actuators, and microfluidics.
de temic
The Temic Homepage
http://www.temic.de:80/
TEMIC (Daimler Benz) is one of the main players in the fields of MST
and MEMS in Germany. TEMIC is producing RF components, Electronic control
units, Communication & Industry, MCM modules, Optoelectronic modules,
Power hybrids, Intelligent Sensors, Smart Membranes and Military Electronics
based on microsystem technologies and MEMS.
de TU-Berlin ee mat
Microsensor & Actuator Technology Berlin
http://www-mat.ee.TU-Berlin.DE/
The MEMS Microsensor & Actuator Technology Berlin (MAT) is part
of the research unit "Microperipheric Technologies" of the Technical University
of Berlin and was founded in 1987. Prof. Dr.-Ing. E. Obermeier is the head
of the MAT. Today more than 30 research scientists are working on the field
of MST and MEMS sensor and actuator development. Main topics are the development
and realization of sensors for measurement of pressure, force, acceleration,
temperature, humidity, gas flow and gas concentration. Modern computer
aided design methods (like FEA) are used to optimize the sensor characteristic.
The cleanroom facilities include standard CMOS processes and numerous special
processes, e.g. anisotropic etching, electrochemical etching and anodic
bonding. Computer controlled test systems are used to characterize the
devices.
de tu-chemnitz infotech
http://www.infotech.tu-chemnitz.de/~albrecht/mst-sites.html
Jorg Albrecht's list of MST / MEMS Sites
http://www.infotech.tu-chemnitz.de/~zfm/sfb379/
Collaborative Research Center at Chemnitz where micromechanical sensor
and actuator arrays are dealt with (in German).
http://www.tu-chemnitz.de/~ntn/yellow.html
Large list of web sites and jobs
de tu-dresden
Technical University Dresden Institute for Semiconductor Technology
and Microsystem Technology
http://www.tu-dresden.de/etihm/homeihm.htm
Research Profile Das Forschungsprofil ist durch Beiträge zu Schichttechnologien
in derHalbleitertechnik, zur Aufbau- und Verbindungstechnik der Elektronikund
der Mikrosystemtechnik gekennzeichnet. MEMS related
de tu-harburg
TU-HH Department of Semiconductor Technology
http://www.tu-harburg.de/ht/english/index.html
MST and MEMS topics in Research & Development Integrated optical
resonators Integrated optical coupling structures Integrated optical amplifier
Laser-fiber-coupling by means of a silkicon micro-optical bench Thin film
gasselective membranes Irondisilicide thin films for optoelectronic applications
Polycrystalline Silicon Thin Film Solar Cells on Graphite Substrates Magnetometer
prepared from the High-Temperature Superconductor YBa2Cu3O7 Optical Microspectrometer
with Integrated White Light Emitter A Microsystem Mass Spectrometer A Micro
Gaschromatograph Micromechanic Pumps 3D Si Structures via Etching and Moulding
Techniques Plasmadeposition from siliconorganic substances Metallization
of non-planar substrates at low temperatures
de tu-muenchen
http://www.fgb.mw.tu-muenchen.de/mikrosys/mikrosys.htm
Willkommen beim Bereich Mikrosystemtechnik, Welcome to the microsystems
department, Technical Univ of Muenchen
de uni-bremen imsas
http://www.imsas.uni-bremen.de/index.html
82. Institute for MST & MEMS Microsensors, -actuators and -systems
(IMSAS), University of Bremen
de uni-dortmund e-technik mst
http://www-mst.e-technik.uni-dortmund.de/forschung/forsch.html
http://www-mst.e-technik.uni-dortmund.de/forschung/ukforsch.html
Die aktuellen Forschungsarbeiten liegen auf dem Gebiet integriert-optischer
Schaltungen für die optische
Nachrichtentechnik und Sensorik mit dem Schwerpunkt auf kostengünstigen
Herstellungsverfahren nach
dem Prinzip der Mikroabformtechnik in Kunststoffen. MEMS Related
de uni-erlangen e-technik
http://www.e-technik.uni-erlangen.de/~kk/formikrosys.html
83. Forschungsverbund Mikrosystemtechnik, Erlangen-München-Passsau,
MEMS
de uni-erlangen ltc1
Microreaction technology - References
http://www.ltc1.uni-erlangen.de/marcel/micro/microref.htm
Miniaturization of chemical reactors and entire plants is a promising
new concept in chemical engineering. Enhanced heat transfer, intrinsic
safety due to small volumes in the production of hazardous material, point-of-use
manufacture of chemicals - these are some of the possible benefits of applying
miniaturization techniques in this area. Check out this compilation of
ever increasing literature, on and off the Web. MEMS related See also:
http://www.dechema.de/englisch/fue/microrea/pages/f_micror.htm
de uni-mainz
LIGA news
http://www.uni-mainz.de/IMM/Inh.htm
Online version of a newsletter of the International LIGA Community
provided by the Institute of Microtechnology (IMM), Mainz. MEMS and LIGA
de vdivde-it
8. MST International - Micro System Technology
http://www.vdivde-it.de/it/imsto/mst01.html
MST News letter http://www.vdivde-it.de/IT/IMSTO/mstnews.html
MST and MEMS Links and resources http://www.vdivde-it.de/it/mst/
de vdivde-it
7. European Microsystems Technology On-line
EUROPRACTICE is an EC initiative which aims to stimulate the wider
exploitation of state-of-the-art microelectronics technologies by European
industry. The ultimate goal of EUROPRACTICE is to enhance European industrial
competitiveness in the global market-place.
http://www.vdivde-it.de/it/imsto/europractice/
http://www.vdivde-it.de/it/imsto/
MST and MEMS web Link search http://www.vdivde-it.de/it/imsto/sites/W3MST.qry
dk dtu
Mikroelektronik Centret
http://www.dtu.dk/mic/ or
http://www.mic.dtu.dk/mic
, Email
mic@mic.dtu.dk , MIC is a research
center affiliated to the Technical University of Denmark (DTU). It has
its own management and a board of directors consisting of five representatives
from Danish industry, two from DTU and two staff members. MEMs related
edu berkeley eecs bsac
31. Berkeley Sensors and Actuators Center
Berkeley Sensor & Actuator Center (BSAC) is a NSF/Industry/University
MEMS cooperative research center funded by the National Science Foundation
and a consortium of corporations and government agencies. Since its foundation
in 1986, BSAC has been devoted to research on sensors and miniature
moving mechanical elements or MEMS (MicroElectro Mechanical Systems) that
take advantage of the remarkable progress made in integrated-circuit technology.
BSAC researchers fabricate most of their MEMS devices in the UC Berkeley
Microfabrication Laboratory. The laboratory is located on the 4th floor
of Cory Hall which is home to the Electrical Engineering department of
the University of California at Berkeley.
http://bsac.eecs.berkeley.edu/
edu berkeley eecs www-bsac
Microsystem Technology Yellow Pages http://www-bsac.eecs.berkeley.edu/~ntn/yellow.html#jobs
edu berkeley eecs nitride
Analog Devices i MEMS Project
http://nitride.eecs.berkeley.edu:8001/
Information about the Analog Devices Inc and UC Berkeley investigation
on the Integrated Micro Electro Mechanical Systems (iMEMS) project. Also
presented is information about the MEMS surface micromachining capabilities
at ADI.
edu berkeley eecs www-bsac
http://www-bsac.eecs.berkeley.edu/~ptjones/database.html
A collection of references of papers written since 1980 which report
the mechanical properties of polycrystalline silicon is now available on
the The Berkeley Sensor and Acuator
Center web site. There is also a collection of papers that report devices
made by surface micromachined polycrystalline silicon.
edu berkeley me mems
http://mems.me.berkeley.edu/
Etcheverry MEMS LAB home page, University of California at Berkeley,
USA
edu berkeley eecs www-bsac
http://www-bsac.eecs.berkeley.edu/~ntn
Home page of Dr. Nam-Trung Nguyen, Yellow Page of MST, Publications,
Microfluidics, Vietnam
http://www-bsac.eecs.berkeley.edu/~ntn
/yellow.html http://www-bsac.eecs.berkeley.edu/~ntn/microfluidics.html
Email: ntn@bsac.eecs.berkeley.edu
edu bu eng
http://eng.bu.edu/~tgb/
92. Boston University's Precision Engineering Research Laboratory
(BU-PERL), under the direction of Dr. Thomas G. Bifano, is dedicated to
MEMS research on fabrication, control, and measurement at nanometer scales
of precision. A core project, supported by DARPA (MEMS), involves building
silicon-based deformable mirror systems for pattern recognition and adaptive
optics. Another core project, supported by NSF, DOE, and private industry,
involves a new process for manufacturing compact disc stampers. A third
core project, supported by grants from DARPA, ARO, and industry, involves
developing MEMS devices for microfluidic control.
edu bu engc
MEMS Deformable Mirror Research at Boston University
http://engc.bu.edu/~tgb/mems.html
Objective:
Implement coordinated MEMS microelectromechanical surface normal actuator
arrays for development of an exciting new class of silicon-based devices;
deformable membrane mirrors.
edu byu ee
http://www.ee.byu.edu/ee/iml/research/mems/research-description.html
http://www.ee.byu.edu/ee/iml/research/mems/mems-example.html
Current research at BYU focuses on the development of characteristic
models that describe standard MEMS devices. Once a number of models MEMS
are characterized, these can be used as standard cells in a MEMS heirarchal
design, much like current IC design techniques.
edu colorado
Massively Actuated and Sensed Structures
http://caswww.colorado.edu/~rgmenon/project.html
Recent advances in mini- and micro-sensor/actuator MEMS devices have
opened the doors to innovative structural applications in all areas of
engineering. It is important to harness these MEMS advances to make the
concept of Adaptive Wing Structures a practical reality. Devices distributed
throughout a wing structure, for example, may be used to control shape,
vibrations, stresses or energy absorption in response to sensor stimuli.
edu colorado
http://me-www.colorado.edu/centers/yclee-group/MEMS/index.html
Professor Y. C. Lee's Research Group, MEMS, soldering, flip chip,
modeling
edu colorado
www.colorado.edu/engineering/MEMS
Microelectromechanical Systems (MEMS) at University of Colorado, Boulder,
CO, NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical
and Digital Electronics
edu cornell cnf
http://www.cnf.cornell.edu/
Nanofabrication Facility (NNF), has served the US research community
for more than 15 years by providing nanofabrication services to over 600
research projects on the beautiful Cornell University campus. Subjects
for research are as diverse as Astronomy and Plant Pathology, and projects
delve into the emerging fields of Integrated Optics and Microelectromechanical
Structures (MEMS) as well as the more conventional Microelectronics, Physics
and Materials Research.
edu cornell mae maemac
http://maemac.mae.cornell.edu/REALIZATION/mems-module/
MicroElectroMechanical Systems (MEMS) Module, N.C. MacDonald
edu cwru mems 24. Case Western Reserve University
MEMS Resource home page
The Microelectromechanical Systems (MEMS) Resource at Case Western
Reserve University (CWRU) provides an interdisciplinary environment for
graduate education through state-of-the-art research in MEMS, micromachining,
microsensors, microactuators, and microsystems.
http://mems.cwru.edu/index.html
edu cmu ece 29. Carnegie Mellon Microelectromechanical
Systems Laboratory
The Microelectromechanical Systems (MEMS) Laboratory is associated
jointly with the Department of Electrical and Computer Engineering and
the Robotics Institute (part of the School of Computer Science) at Carnegie
Mellon University. In the MEMS Lab, we are developing miniature sensor
and actuator systems made using batch-fabrication processes, especially
integrated-circuit fabrication processes. MEMS Research in this area is
motivated by the potential to produce high performance, low-cost, miniature
sensors and actuators. Smart MEMS sensors are made by combining microstructures
and circuits on a single silicon chip. Specific research areas of interest
include nanometer-scale data storage, microsensors and microactuators,
MEMS design tools, micromechanical component modeling, embedded microinstruments,
and microrobotics.
http://www.ece.cmu.edu/afs/ece/usr/mems/www/mems-home.html
http://www.ece.cmu.edu/afs/ece.cmu.edu/usr/fedder/
http://www.ece.cmu.edu/afs/ece/usr/mems/
edu cwru mems6
MEMS Research at Case Western Reserve University
http://mems6.cwru.edu/WWW/cwru.html
Microelectromechanical Systems (MEMS) research at Case Western Reserve
University is an interdisciplinary effort comprising faculty, staff, visiting
scholars, and students from four academic departments. Our group brings
together experts in all facets of MEMS - design, modeling, fabrication,
materials, devices (sensors, actuators, and electronics), and applications
- to address the critical scientific and technological issues for advancing
MEMS.
edu cwru eeap mems
http://mems.eeap.cwru.edu/memsnet/
25. Ohio MEMSNet
A consortium of Ohio universities and the Cleveland Clinic Foundation,
in conjunction with the CAMP, the Edision BioTechnology Center, Ohio's
two major Federal laboratories, and a number of Ohio industries, have established
the Ohio MEMSNet, a state-wide fabrication, design, and testing infrastructure
capability for the emerging field of microelectromechanical systems (MEMS).
edu duke egr mems
http://mems.egr.duke.edu/labs.html
The following are links to information about the various laboratories
and research groups in operation within the
Mechanical Engineering department or in conjunction with other departments.
edu gatech ece
http://www.ece.gatech.edu/research/labs/msmsma/GTMEMS.html
http://www.ece.gatech.edu/research/labs/msmsma/
Micromachining Research at Beorgia Institute of Technology, USA, Shows
MEMS research projects
edu hawaii eng
http://spectra.eng.hawaii.edu/mems/
http://www.eng.hawaii.edu/~vrp/
University of Hawaii, Dr Eun Sok Kim, Dr Mehrdad Nejhad, Dr Junku Yuh,
Dr Stephan Itoga, MEMS researrch
edu isi
http://mems.isi.edu/
Welcome to the MEMS Clearinghouse, links, archives, yellow pages, MEMS
Technologies, Calendar of Events, News and MEMS Discussions
Other related MEMS sites http://mems.isi.edu/archives/otherWWWsites.html
MEMS Yellow Pages http://mems.isi.edu/mems/yp/
MEMS Calendar http://mems.isi.edu/mems/calendar/
edu isi broker
http://broker.isi.edu/
The Micro Mechanical Processing Center of USC/Information Sciences
Institute
It is a prototyping service for standard cell and full-custom
VLSI circuit development. MOSIS is in the process of expanding their service
to include MEMS devices.
edu isi k2
http://k2.isi.edu/archives/mems_associations/LA-SMAWG/
18. Sensors, Microstructures, and Actuators Working Group (SMAWG)
SMAWG is an independent MEMS professional organization welcoming participants
from academia, industry, and government. Our objective is to create a forum
for discussion of MEMS and related technology, and to benefit from the
MEMS collaborations which will inevitably result. The SMAWG format is loosely
modeled on the successful Bay Area MEMS Journal Club in Northern California.
The motivation behind that format is to foster interactive MEMS discussion
sessions rather than a formal seminar series.
edu isi k2
http://k2.isi.edu/archives/mems_associations/Bay-Area/
19. Bay Area MEMS Journal Club
The Bay Area MEMS Journal Club is an informal forum for professionals
with an interest in the MEMS field. Meetings are held in the evening on
the first Wednesday of each month and typically follow an open-discussion
format in which group participation is encouraged. Topics span from fabrication
technologies to applications of MEMS.
edu isi mems
http://mems.isi.edu/
17. MEMS Clearinghouse, University of Southern California, Information
Sciences Institute
The MEMS Clearinghouse was established to be a repository of information
about MicroElectroMechanical Systems (MEMS) and to foster communication
and the sharing of data within the MEMS community.
edu LaTech
http://www.LaTech.edu/tech/engr/ifm/
23. Louisiana Tech University, Institute for Micromachining
A MEMS resource for the development of microfabrication and microassembly
processes for industrial, medical and consumer products.
edu louisville spd pyramid
http://pyramid.spd.louisville.edu/~microfab/mems_links.html
http://mitghmr.spd.louisville.edu/mems_links.html
Lists other MEMS sites of interest
http://mitghmr.spd.louisville.edu/course/article_comments.html
Comments on Writing an Article
http://mitghmr.spd.louisville.edu/course/
University of Louisville Microfabrication Course (EE500)
edu loyola itri
http://itri.loyola.edu/
JTEC/WTEC Program on MEMS at Loyola College
The Japanese Technology Evaluation Center (JTEC) and its companion
World Technology Evaluation Center (WTEC) at Loyola College provide assessments
of foreign research and development in selected technologies under a cooperative
agreement with the National Science Foundation (NSF). A study of MEMS in
Japan is available.
edu loyola itri
http://www.itri.loyola.edu/nanobase/
his site is designed to present up-to-date sources of information on
nanotechnology in the following areas: major research centers,
funding agencies, major reports and books.
edu mit ai swissnet
http://swissnet.ai.mit.edu/~switz/arpa-info/memsisat/sld001.htm
The purpose of this study is to examine the long-term benefits of using
distributed MEMS technology to couple computation to the physical world,
and to recommend MEMS research in information technology required to
achieve
these benefits.
edu mit cafe
http://cafe.mit.edu/semisubway.html
Links to other MEMS places
edu mit mtl
http://www-mtl.mit.edu/
26. MIT Microsystems Technology Laboratories
The MIT Microsystems Technology Laboratories (MTL) is a collection
of people and facilities bound together by a shared mission emphasizing
education, research, and service in microsystems and MEMS technology.
edu mit arsenio
http://arsenio.mit.edu//MEMS_Interchange.html
The MEMS Interchange on the Semiconductor Subway is a page collecting
sources of MEMS fabrication and modelling information and other MEMS
pages of interest to the MEMS community.
edu mit arsenio
http://arsenio.mit.edu/MEMSatMIT.html
The Microsystems Technology Laboratories (MTL) at MIT
This page centralizes MEMS information about the FAB's and research
going on at the MTL at MIT, including research on MEMS at MIT and MEMS
elsewhere . There is also a page announcing the next Boston Area MEMS seminar
(BAMS).
edu mit goesser
http://goesser.mit.edu/MTL/bulletin/v6n2/BAMS.html
Boston Area MEMS Seminar Enters its Second Year The Boston Area MEMS
Seminar ("BAMS") was started in September 1993 by Professors, Stephen D.
Senturia and Martin A. Schmidt to promote information exchange within the
Boston area on
Micro-electromechanical Systems (MEMS). The seminar series is held
monthly at MIT, co-sponsored by MIT and Analog Devices. A typical program
consists of one or two speakers followed by a discussion on a MEMS topic
of interest.
edu mit www_mtl
http://www-mtl.mit.edu:80/MTL/Report94/MEMS/MEMS.html
MTL Research in Microelectromechanical Devices, MEMS
edu mit www_mtl
http://www-mtl.mit.edu/BAMS/seminar.html
Boston Area MEMS Seminar (BAMS) Series / The Boston Area MEMS Journal
Club
edu ncsu ww2 erl_html
http://www2.ncsu.edu/eos/project/erl_html/erl_home.html
Welcome to the ECE Electronics Research Laboratory at North Carolina State
University., interconnects, multichip module, MEMS interconnect, Retinal
Prosthesis Project , Tutorials, html guide, david_winick@ncsu.edu
edu neu ece
Microfabrication
and MEMS Laboratory at Northeastern University A well equiped laboratory
working in MEMS
edu njit
http://www.njit.edu/MRC/
The Microelectronics Research Center (MRC) at New Jersey Institute of Technology
(NJIT) is an R & D unit for the design, manufacturing, packaging, and
test of integrated MEMS and CMOS devices.
Directions to NJIT http://www.njit.edu/University/Directions.html
-
edu ohio-state eng er6
http://www.er6.eng.ohio-state.edu/~madou/mems/ch1.htm
Marc Madou, book, links, etc
edu princeton
http://www.princeton.edu/~wsnt/bmr.html
14. Belle Mead Research
Home page of Belle Mead Research Consulting Company which specializes
in providing cost effective solutions to companies in micromechanics and
MEMS.
http://www.princeton.edu/~wsnt/bmr.html
edu princeton
Journal of Microelectromechanical Systems
http://www.princeton.edu/~wsnt
The site covers MEMS and Micromechanics.
Included in the site are:
edu rochester ceas
http://www.ee.rochester.edu/~jones/memssite
The purpose of this web page is to offer easy access to some of the
excellent web sites devoted to MEMS and MEMS-related material. The intention
is to provide a comprehensive overview of general MEMS and micromechanical
design and fabrication.
edu smu seas
http://www.seas.smu.edu/~zcb/
Zeynep Celik-Butler developing graduate level MEMS course
edu stanford cdr
http://transducers.stanford.edu/stl.html
transducer lab
http://cdr.stanford.edu/
The Stanford CDR maintains information on a wide variety of research
projects that include collaborative design, national studies on engineering
education, and computational agent infrastructures for distributed collaborative
engineering. There is also a DesignNet directory of design research services.
MEMS related
http://transducers.stanford.edu/stl/Projects/AlumMEMS.html
Aluminum MEMS structures
edu stanford snf
NanoNet, National Nanofabrication User Network
http://www.nnun.org/
new link
http://snf.stanford.edu/NNUN/
old
The NanoNet provides an electronic means for the Nanofabrication community
to share information about the network of nanofabrication facilties. MEMs
related
edu ucla janet
http://www.janet.ucla.edu/
27. Distributed Microsystems Research Group
UCLA Electrical Engineering Department
The Distributed Microsystems Research (DMSR) Group is comprised of
several ARPA-funded programs, which together are involved in research and
development of the design tools, algorithms, architectures, and CMOS integration
techniques needed to enable next-generation systems for distributed communications,
networking, monitoring, and high-speed signal processing. MEMs related
edu ucla janet
http://www.janet.ucla.edu/lpe.lwim/
Low Power Wireless Integrated Microsensors
The UCLA Electrical Engineering Department's Website for Low Power
Wireless Integrated Microsensors - A DARPA Research and Development Program
MEMs related
edu ucla icsl synergy
Nanofabrication Research Facility, UCLA Los Angeles
http://synergy.icsl.ucla.edu/index.html
Synergy at UCLA contains Micro Electro Mechanical Systems related information,
incl. UCLA MEMS major field announcements, some electron microscope pictures
(by Prof. Pister and his students) as well as a description of the UCLA
Nanofabrication Research Facility.
http://synergy.icsl.ucla.edu/htdocs/sc_outline.html
Tutorial and intorductory material
edu ucdavis ece
http://www.ece.ucdavis.edu/~olav/ece289j.html
Course
http://www.ece.ucdavis.edu/~olav/
Prof
http://www.ece.ucdavis.edu/
Dept
University of California at Davis course in MEMS
edu uc ece
http://www.ece.uc.edu/~rpanth/cmsm.html
Welcome to the Center for Microelectronic Sensors and MEMS . The center
is part of the Micro-Electro-Mechanical Systems (MEMS) group of the Applied
Systems Research Program of the Department of Electrical and Computer Engineering
and Computer Science of the University of Cincinnati.
edu uc eng dolphin
http://dolphin.eng.uc.edu/
The Center for Microelectronic Sensors and MEMS (CMSM) at the University
of Cincinnati is fully equipped with facilities to research he design,
fabrication, and characterization of Micro-Electro- Mechanical Systems
(MEMS) structures and devices on chips with integrated circuits. Three
core faculty members (and several inter departmental associates) are closely
working together on MEMS research, including 25 graduate students plus
another 10 students in affiliated departments and colleges. Recently, the
CMSM has been awarded a DARPA project of $2.6 M for the development of
MEMS-based microfluidic systems and remote sensors.
MEMS Links http://dolphin.eng.uc.edu/link.html
edu uic mal
http://www.mal.eecs.uic.edu/
The Microfabrication Applications Laboratory (MAL) at the University
of Illinois at Chicago is a research and development laboratory dedicated
to the application of integrated circuit and fiber optic technology to
improve manufacturing methods for microfluidic, electromechanical, mechanical,
chemical, optical and multi-functional devices, some of which have previously
been built by more traditional techniques. MEMS related
edu umass ecs
http://www.ecs.umass.edu/mie/labs/emsl/
86. Electromechanical, Systems Laboratory, Department of Mechanical
and Industrial Engineering ,
University of Massachusetts Amherst
Research activities at the Electromechanical Systems Lab are
focused on the design, analysis, and
implementation of "smart" MEMS and electromechanical components, structures,
and systems for enhanced condition
monitoring and intelligent manufacturing. The MEMS development is centered
around a mechatronics approach,
striving for a synergistic integration of mechanical engineering, electronics,
controls, and computer
engineering.
MEMS Links http://www.ecs.umass.edu/mie/labs/emsl/related.html
edu umich eecs pangaea
CAEMEMS Software WWW site from the University of Michigan
http://pangaea.eecs.umich.edu/caemems/
CAEMEMS is a MEMS software framework for the design of sensor and actuator
CAE systems. In its present form, CAEMEMS consists of the CAEMEMS D-Module
and an array of supporting software for the generation, execution, and
plotting of finite-element analyses (FEA) of diaphragm pressure sensors.
Use is made of the ANSYS commercial FEA system.
edu umich engin linlabdell1
http://linlabdell1.engin.umich.edu/
Professor Lin does MEMS (Micro-Electro-Mechanical Systems) related
research, here at the University of Michigan at Ann
Arbor in the Mechanical Engineering and Applied Mechanics (MEAM) Department.
If you are interested in helping create a
MEMS division in the American Society of Mechanical Engineers (ASME),
please follow these links (print them out and
mail to the address included): mailto:lingroup@linlabdell1.engin.umich.edu
edu umn ece
http://www.ece.umn.edu/groups/mems/
The University of Minnesota Center for Micro Electro Mechanical Systems
(MEMS), the Microechnology Laboratory, MTL) supports the integration of
piezoelectric thin films, micromechanical structures, and MOS integrated
circuits. mailto:robbins@ee.umn.edu
edu umr
University of Missouri-Rolla
http://www.umr.edu/~piezo/
Interesting Web-Site on Piezoelectric Motor Research MEMS related
edu unl wwitch
http://wwitch.unl.edu/zeng/solid.html
This research is a University-Industry cooperative investigation. The
aim is to control static friction (stiction) in microelectronic micro-machined
systems (MEMS).
edu utexas mer weewave
http://weewave.mer.utexas.edu/
http://weewave.mer.utexas.edu/MED_files/MED_research/mems_sum.html
Micromachined Sensors & Actuators
MicroElectromagnectics Device Group at the University of Texas
Information on research conducted at The University of Texas at Austin
by Dr. Dean P. Neikirk into optical pressure sensors, magnetic proximity
sensors, and the use of MEMS technology for "smart" mechanical bearings
can be found here.
edu washington me luttice
http://lettuce.me.washington.edu/
http://lettuce.me.washington.edu/~micropump/
University of Washington Micro-Pump Research Group Web Server
edu wisc engr mems
http://mems.engr.wisc.edu/
15. University of Wisconsin MEMS
Describes MEMS research, products and partners. MEMS courses
available.
http://bob.ece.wisc.edu/
es csic labsen
http://www.labsen.csic.es/sens.htm
Links to web pages, Servidores Web en los que se pueden encontrar informaciones
sobre las disponibilidades tecnológicas en el área de Microsistemas.
http://www.labsen.csic.es/home.htm
Home page
MEMS Webs Servidores Web en los que se pueden encontrar informaciones
sobre las disponibilidades tecnológicas en el área de Mi.
fr cea www-dta
Laboratory of Electronics, Technology and Instrumentation (LETI)
http://www-dta.cea.fr/WWWCEA/leti/uk/leti.htm
http://www-dta.cea.fr/WWWCEA/leti/uk/microtec.htm
Microtechnology
LETI, laboratory of the CEA's Direction of Advanced Technologies, is
one of the most important european applied research laboratory in electronics.
Its main mission : to help companies to improve their competitiveness,
thanks to technological innovation. About 85 % of its activity is dedicated
to researches, finalized with partners outside CEA. MEMs related
fr dolphin
http://www.dolphin.fr/Accueil.html
Dolphin Integration, CAD, SMASH, EDA, GDS@
fr image tima-cmp
TIMA-CMP
http://tima-cmp.imag.fr
TIMA (Technics of Informatics and Microelectronics for computer Architecture)
is the research part of the laboratory, and CMP (Multi-Project Circuits)
is its service activity part. CMP is introducing Micro Electro Mechanical
Systems (MEMS) fabrication based on CMOS 1.0 micron DLM/SLP front side
bulk micromachined by EDP at ESIEE. MEMS like cantilevers, membranes, microbridges,
etc... may be processed together with the electronics. MEMS design rules
have been defined, available to designers upon signature of a Confidentiality
and Licence Agreement (CLA). A CADENCE OPUS design kit is available to
allow the generation of the layout including electronic and non-electronic
parts. The kit includes an extended DRC and an extended parameter extractor
(from layout to netlist) distinguishing electronic and non-electronic parts.
A netlist is generated allowing an electrical simulation where MEMS bridges,
cantilevers and membranes are considered as a resistance, and a behavioural
simulation where these structures are represented by a model in the language
HDLA/ELDO from ANACAD. Other CMOS processes, surface micromachining, GaAs
processes, LIGA, Quartz micromachining will be introduced gradually.
fr laas emsto
http://emsto.laas.fr/WhosWhoHomePage.html
Links to MEMS web sites
MEMS Yello Pages, Searches
gov llnl
http://cmpm-www.mst.lanl.gov/
http://www.llnl.gov/eng/MMED/materials/mems.shtml
http://www.llnl.gov/eng/MMED/materials/cm.shtml
Material Evaluation Section, interesting but not MEMS & Micro System
Technology
gov nasa arc s2K
http://s2k.arc.nasa.gov/mems/home.html
Welcome to Dr.Marc Madou's Web Site
gov nasa jpl mishkin
http://mishkin.jpl.nasa.gov/CSMT_PAGE
33. Jet Propulsion Laboratory, California Institute of
Technology
Center for Space Microelectronics Technology and Robotics and Mars
Exploration Technology home page
gov nasa jpl mishkin
http://mishkin.jpl.nasa.gov/MDL.html
34. The JPL Microdevices Laboratory (MDL)
MDL at NASA's Jet Propulsion Laboratory (JPL) is a facility dedicated
to create, develop, integrate and deliver critical microdevice technologies
and products enabling NASA and DoD space missions and enhancing U.S. competitiveness
worldwide. MDL is a primary research and technology development facility
in the Center for Space Microelectronics Technology (CSMT) at JPL and is
operated by the Microdevice Section (346). MDL provides end-to-end device
development capabilities and a staff with expertise in technologies over
a wide variety of fields. Devices based on silicon, III-V compound semiconductors,
and superconductors can be fabricated with nanometer-size features and
fully. MDL enables the development of a multitude of MEMS and microdevices
such as infrared detectors, millimeter and submillimeter wave sensors,
UV and x-ray CCDs, photonic devices, micromagnetic devices, accelerometers,
seismometers, meteorological sensors. chemical sensors, gyroscopes and
electronic neural networks. Prototyping of devices from concept to prototype
in less than 2 years has been demonstrated.
gov nasa larc mstb
http://mstb.larc.nasa.gov/tech/MEMS.html
Langley has only recently began to explore the MEMS arena. Our primary
emphasis is to bring MEMS technology to the Langley
Wind Tunnels.
gov nsf
http://www.nsf.gov/home/eng/start.htm
NSF Directorate of Engineering page
Gives information on grants, current funded research, programs, deadlines,
and contains ann online search engine of NSF documents.
gov sandia mdl 1
http://www.mdl.sandia.gov/micromachine/
http://www.mdl.sandia.gov/Micromachine/index.html
3. Sandia National Laboratories, Intelligent Micromachine Initiative
Sandia National Laboratories is a recognized leader in this emerging
field of MEMS. Sandia has developed unique technologies which enable the
realization of complex MEMS mechanical systems on a chip, and the integration
of these MEMS systems with on-chip control and communication electronics.
Course available.
The manufacturing processes which have been developed as part of the
explosive progress in the microelectronics industry are now being applied
to the fabrication of miniature mechanical devices, including sensors (such
as accelerometers and pressure sensors) and actuators (such as tiny motors
and tweezers). Because the mechanical devices are manufactured on a silicon
chip, they can be integrated directly with silicon control electronics.
Researchers at Sandia's Microelectronics Development Laboratory (MDL) are
at the forefront of this exciting field.
gov uspto
http://www.uspto.gov/
US Patent and Trademark Office
ie ucg finite
http://finite.ucg.ie/
National University of Ireland, Galway, Micromechanics Research
Group
In Micromechanics, materials are represented at the microscale by mathematical
models which explicitly
incorporate features of the materials microstructure such as second
phase or reinforcing particles, voids,
defects, microcracks, grain boundaries and crystal structure.
il org mems
http://www.mems.org.il/
the Israeli MEMS Site, email orenm@techunix.technion.ac.il
.
jp ac shizuoka eng sys
http://www.sys.eng.shizuoka.ac.jp/j-kondoh/Micropump.html
Micropump based on SAW streaming
jp ac u-tokyo fujita3.iis
http://www.fujita3.iis.u-tokyo.ac.jp/index-j.html
Fujita Laboratory, MEMS, Micro Machines, MST, Research, Development
Japan
jp ac u-tokyo race
RACE, The University of Tokyo
http://www.race.u-tokyo.ac.jp
Research into Artifacts, Center for Engineering (RACE) at the University
of Tokyo studies design of artifacts for their higher alliance with the
human society and environment. The page Hyper Process Knowledge Base describes
one of their projects on manufacturing knowledge sharing, with visual demonstrations
of MEMS fabrication processes (quicktime movies included).
jp ac u-tokyo leopard
http://www.leopard.t.u-tokyo.ac.jp/
102. Miura-Shimoyama Laboratory, Department of Mechano-Informatics
at University of Tokyo. MEMS programs
jp ac u-tokyo t leopard
Microflight
http://www.leopard.t.u-tokyo.ac.jp/yayoi/MF.html
The recent work of Yayoi Fujisawa, Miura-Shimoyama Laboratory, Department
of Mechano-Informatics at University of Tokyo is the 4-winged flapping
micromechanism. The size of the four wings is 0.84 mm x 0.42 mm. These
are made of the single Nickel layer, magnetized, and actuated in the alternating
electromagnetic field. MEMS related
jp go mel
http://www.mel.go.jp/enghome.html
78. Mechanical Engineering Laboratory of MITI
Research at MEL is carried out on the following seven main areas
1.Materials Science and Technology 2.Bioengineering
3.Information and Systems Science 4.Advanced Machine Technology
5.Energy Technology 6.Manufacturing Technology
7.Robotics MEMS related
jp ntt cae hqs info
http://www.info.hqs.cae.ntt.jp/RD/ACT/RD_act_3/micromachine.html
Micromachine Technology . Because mechanical relays provide superior
performance compared to solid-state switches in on/off resistance, signal
bandwidth, and in other ways, many mechanical relays can be found in telecommunications
equipment. Reducing the size of relays is critical, but the limits of conventional
down-scaling techniques have now been reached and a breakthrough technology
is needed to make additional progress. This led NTT Laboratory researchers
to develop a prototype electromagnetic micro actuator based on a thin-film
head fabrication technology using photolithography. MEMS devices
jp or atip
http://www.atip.or.jp
The Asian Technology Information Program (ATIP) is a non-profit organization
dedicated to providing objective and high-quality
information about technology developments in Asia. Email mailto:www-admin@atip.org
, If access is too slow, please try http://www.atip.org/
, our United States site
jp or iijnet
http://www.iijnet.or.jp/MMC/no.21/mm21.htm
The quarterly magazine "MICROMACHINE" is now distributed through this
internet page.
http://www.iijnet.or.jp/MMC/
This is the main page for the Micromachine Center
jp or iinet
MICROMACHINE CENTER
http://www.iijnet.or.jp/MMC/
http://www.iijnet.or.jp/MMC/no.7/MMTech1.html
Through the support of the Ministry of International Trade and Industry
(MITI), the Micromachine Center was established to conduct research and
development into micromachines, to collect and provide information, and
to foster exchange and cooperation with organizations in Japan and abroad.
In this way, the Micromachine Center is to play a central role in promoting
the establishment of basic micromachine technologies and also the dissemination
and utilization of micromachines and, in so doing, contribute to the development
of domestic industry and international society. MEMS
jp or atip
http://www.atip.or.jp
The Asian Technology Information Program (ATIP) is a non-profit organization
dedicated to providing objective and high-quality nformation about
technology developments in Asia. MEMS information
kr ac kaist sorak
http://sorak.kaist.ac.kr/~yhcho/
73. KAIST
Micromachines and Microsystems Laboratory of the Department of Mechanical
Engineering of the Korea Advanced Institute of Science and Technology .
A MEMS site
kr ac snu chips
http://chips.snu.ac.kr/~mtec/
MicroSystechnology Center, News, MicroTec Center Overview MEMS
kr ac snu plaza
http://plaza.snu.ac.kr/~micro/
Seoul National University College of Engineering School of
Electrical Engineering, Micro gyro, micro mirrors, cell manipulation,
process technology
lt ktu microsys
http://www.microsys.ktu.lt/PROJECTS/projects.htm
RC "Vibrotechnika" was founded in 1970 as a center for basic and applied
research of Precision Engineering funded mainly by SU Space and Military
agencies. Soon, it became a main center in the former Soviet Union in the
fields of Precision and Ultraprecision Engineering based on the smart materials
like piezoelectrics, magnetostrictives, etc. MEMS related
lu cordis
http://www.cordis.lu/esprit/home.html
EC Funding for MST
Esprit, the European Union's information technologies RTD programme,
MEMS related
mil darpa web-ext2
http://web-ext2.darpa.mil/ETO/
1. DARPA ETO
DARPA Electronics Technology Office home page that contains information
on the vision, priorities and R&D thrusts supported by ETO. It also
describes the organization components and personnel, and ETO solicitations.
MEMS programs
mil darpa web-ext2
http://web-ext2.darpa.mil/ETO/MEMS/index.html
2. DARPA MEMS
Summaries of all DARPA MEMS projects, information on the MEMS Principal
Investigator meetings, a 1997 MEMS market survey, and an MEMS overview
presentation.
mil navy nrl mstd
http://mstd.nrl.navy.mil/6330/6336/moems.html
Integrated Micromachines provides state of the art MEMS foundry services
as well as a full MEMS design and analysis team. We can deliver turnkey
MEMS solutions with DRIE, RIE, wet etch, sputtering, plating, dicing, and
packaging services.
net att home lisa ramos
http://home.att.net/~lisa.ramos/ieee/
IEEE Princeton/Central New Jersey Section, MEMS related activities
Events & Calender, newsletter, IEEE PCNJ Committee Members, links
net earthlink home mccorquodale
http://home.earthlink.net/~mccorquodale/forum/mems.html
The links here will provide an introduction to the process of designing
and manufacturing MEMS
net piezosolutions
www.piezosolutions.net
Piezo Solutions supplies piezoelectric ceramic, piezo actuator, pzt
material, ultrasonic, acoustic and ultrasound products and engineering
services. John Hudak, President
net trimmer
http://www.trimmer.net
Home page for this list of web sites. You are already here.
The site covers MEMS and Micromechanics and mst and nano.
Included in the site are:
nl tudelf et guernsey 12. Silicon Microoptics
in Delft
Delft University of Technology
http://guernsey.et.tudelft.nl/
Optics, MEMS and related links provided by the Delft University of
Technology
http://guernsey.et.tudelft.nl/farlinks.html
http://wwwetis.et.tudelft.nl/
94. Electronic Instrumentation Laboratory
nl tudelf et muresh
DIMES Delft University, Delft, The Netherlands
http://muresh.et.tudelft.nl/dimes/index.html
Dimes is the Dutch national center for research and education on silicon-based
micro-electronics and MEMS
nl utwente el 3. MESA Research Institute, the
Netherlands
MESA is a university of Twente research institute for MST and MEMS
micro electronics, materials- and molecular engineering, and sensors and
actuators.
http://www.el.utwente.nl/mesa/
Two MESA sites of particular interest to MEMS researchers are:
Micro Mechanical Devices Group at http://www.el.utwente.nl/tdm/mmd/index.html
Biosensors and Electrochemical Sensors at http://www-bio.el.utwente.nl/research/sensors.htm
nl utwente el tdml16
MicroMechanics group Twente (MicMec)
http://tdm116.el.utwente.nl/tdm/mmd/mmdhome.htm
The MEMS micromechanical transducers group conducts research on device
physics, system, device simulation and fabrication technology of miniature
mechnical devices. These are made by MEMS micromachining: photolithography
(wet and dry), isotropic and anisotropic etching, wafer bonding and thin
film deposition. Silicon and thin-film materials form the basic materials
used. The MEMS devices are used as mechanical sensors which measure force,
pressure, impact and fluid flow and in actuators and passive structures.
org ec research www-uk
http://www-uk.research.ec.org/esp-syn/text/8003.html
Keywords VLSI manufacturing, wafer fabrication, process integration,
clean room technology,
masks, 0.5 micron CMOS, packaging, automation. Not Micro System
Technology and MEMS, but related.
org eda
http://www.eda.org/ The
one stop Electronic Design Automation (EDA) Standards resource on the World
Wide Web
http://www.eda.org/bamjc/
Bay Area MEMS Journal Club
org electrochem
Electrochemical Society, Sensor Division
http://www.electrochem.org/divisions/sensor.html
Sensor science and technology are growing rapidly in response to an
ever-increasing demand for faster, cheaper, smaller, and more sensitive
means to monitor the chemical, biological, and physical world around us.
The focus of the Sensor Division is chemical sensors, with secondary emphasis
on biosensors, physical sensors, and the processing technology of microelectromechanical
systems (MEMS). MEMS sensors can have a global impact in many areas: environmental
cleanup, industrial process control, emissions monitoring, aeronautical
and space systems, planetary exploration, nonproliferation of weapons,
screening for explosives and contraband, home and workplace safety, and
medical diagnosis and care. The sensor provides some of the functionality
of analytical instrumentation, but with vastly reduced cost, size, and
power consumption, and an ability for real-time, in situ measurement.
org asme
http://www.asme.org
American Society of Mechanical Engineers
MEMS related activities, sponsor MEMS conferences, ASMENET
org ieee
IEEE Micromechanical Systems link
http://www.ieee.org/micromechanical/micromechanical.html
Here is the link to the IEEE Organization's MEMS Page. The Journal
of Microelectromechanical Systems (JMEMS) publishes information on MEMS
including fabrication techniques, microphenomena, materials, microsystems,
and applications of devices ranging from microns to millimeters. Please
click on JMEMS for information on published articles, abstracts, paper
submissions, subscriptions, and topics of interest. The Journal is sponsored
by the IEEE and the ASME.
org ieee
http://www.ieee.org/
MEMS related activities, sponsor MEMS conferences
org mcnc mems 20. MEMS Technology Applications
Center, MCNC
MCNC offers development, prototyping, and manufacturing of MEMS devices
and systems based on surface, bulk, and/or LIGA micromachining. The Multi-User
MEMS Processes, or MUMPs, is a DARPA-supported program that provides the
domestic industrial, academic, and government communities with cost effective
surface micromachining processing for prototyping and proof-of-concept
fabrication. MUMPs is designed to be flexible, easy to use, and most importantly,
cost effective. Course available.
http://mems.mcnc.org/
21. HI-MEMS Alliance, MEMS Technology Applications Center
The HI-MEMS Alliance, led by MCNC, is a partnership among commercial
manufacturers, universities, two federal laboratories, and a non-profit
high-technology center established to provide customers with access to
LIGA for the fabrication of precision micro-components.
http://mems.mcnc.org/HIclick.html
org mcnc mems
http://mems.mcnc.org/technet/substrates.html
MEMS Technet - Stock starting substrates are available in a number
of different film stacks for surface, bulk, and LIGA processes. Order only
the quantities you need online!
org memsalliance
http://www.memsalliance.org
An alliance of companies, universities, and government laboratories
in the Washington DC metropolitan area. Our mission is to create a group
that networks expertise, capabilities, and research to facilitate the development
of new applications and commercialization of miniaturization technologies.
org memsindustrygroup
www.memsindustrygroup.org
METRIC, traditionally the annual meeting for members of the MEMS Industry
Group, is now open to the MEMS Industry as a whole. Platform includes working
groups to address issues of reliability, and afternoon panels of MEMS Users
to discuss why they use MEMS, and how they were convinced to do so. Topics
also to include international perspectives on MEMS, MEMS federal and local
funding issues, and much more. METRIC is the only international conference
devoted solely to MEMS and is the only event that caters to both the MEMS
business person as well as the engineering and manufacturing behind the
MEMS business. Info available soon at www.memsindustrygroup.org/metric2003.
Questions please contact the MEMS Industry Group at (412) 390 1644 or info@memsindustrygroup.org.
Email: emcdevitt@memsindustrygroup.org
org mosis
http://www.mosis.org/mems.html
Links to MOSIS and MEMS infrastructure sites
org nnun
http://www.nnun.org/
The National Science Foundation has established the National Nanofabrication
Users Network
(NNUN) as an integrated partnership of user facilities with the
objective of providing opportunities
for researchers to turn new ideas in nanoscale science and technology
into experimental reality.
The network is committed to education, training and technical
outreach.
org semi
SEMI
http://www.semi.org/
Semiconductor Equipment and Materials International (SEMI) is an international
trade association that represents semiconductor and flat panel display
equipment and materials suppliers. Founded in 1970 in the United States,
SEMI has evolved into an international organization committed to free trade
and open markets. SEMI's primary goal is to help its members expand their
global marketing opportunities and improve access to their customers and
industry, government and civil leaders. SEMI has more than 1,600 member
companies located in North America, Asia and Europe. Their products and
services contribute more than $42 billion to the world economy. Success
in the semiconductor industry typically requires an international effort.
SEMI members that market products and serve customers world-wide often
rely on the local expertise of SEMI employees at these offices. MEMS meetings
pl lodz p dmcs
http://www.dmcs.p.lodz.pl/VHDL/vhdl-ams.html
Silicon MicroPump - in the frame of ESPRIT BARMINT project
If You want us to develop a model, mail us (e-mail: napier@dmcs.p.lodz.pl)!
ro pub imt 9. Institute of Microtechnology,
Bucharest, Romania
National Institute of Research-Development for Microtechnology
Objectives: multidisciplinary research in microsystems, technological
development (microtechnologies), industrial services in microelectronics
http://www.imt.pub.ro/
ro pub imt 10. Romanian Microsystems Technology
On-line
The Romanian Information Clearinghouse on Microsystem Technology provided
by Institute of Microtechnology (Bucharest, Romania) on behalf of NEXUSPAN
(PAN-EUROPEAN Network in Multifunctional Microsystems). ROMSTO is an extension
of EMSTO (European Microsystem Technology On-line) MEMS related
http://www.imt.pub.ro/IMT/ROMSTO/
se kth imc
MEMS Group Homepage
http://www.imc.kth.se/mems/
Microelectromechanical Systems (MEMS) combine traditional integrated
circuits fabrication technology with new, very fast growing branch - micromechanics,
which exploits the excellent mechanical properties of silicon.
se kth imc
http://www.imc.kth.se/mems/Welcome.html
Microsystems Technology (MST) and MicroElectromechanical Systems (MEMS)
combine traditional integrated circuits fabrication methods with micromechanics,
which exploits the excellent mechanical properties of silicon. Fields
of expertise: Microsensors and microfluid systems for biotechnical
applications Fiber optical precision interconnect
techniques Polymeric microstructures and replication
techniques
MEMS Links http://www.imc.kth.se/mems/docs/links.htm
se physto sysf
The FERMI Microsystem
http://www.sysf.physto.se/fermi/fermi_microsystem.html
The FERMI module is implemented as a silicon-on-silicon multichip microsystem.
The microsystem, realised as a large silicon multi-layer substrate with
four metal layers, supports ASICs, components, interconnections and transmission
lines. MEMS
se uu teknikum mises
Micro Structure Bulletin
http://mises.teknikum.uu.se/microstruct/home.html
Newsletter for Nordic Micro Structure Technology.
Editor: Prof. Jan Söderkvist, Colibri Pro Development AB MEMS
related
sg edu ntu
http://www.ntu.edu.sg/home/mgkjurgen/index.html
The Center of MEMS in NTU (Nanyang Technological University, Singapore)
aims to be a Center of expertise in Asia and to support MEMS-Technology
in Singapore. mailto:mgkjurgen@ntu.edu.sg
tr edu metu ee
http://www.eee.metu.edu.tr/~akar/
TUBITAK-BILTEN RESEARCHER
Integrated Microsensors and Sensor Systems for Industrial Applications
(TU-MICROSYSTEMS) NATO Science for Stability Programme
MEMS related
uk ac cf
4. ECAD Laboratory for Applied Microsystems, Cardiff University
of Wales
The Laboratory for Applied Microsystems and MEMS, ECAD, is an interdisciplinary
research activity on fundamental and applied aspects of microengineering
and microsystem technology with a strong bioscience orientation (BioMEMS).
Other research themes are orientated towards biomedical and space
applications.
http://www.cf.ac.uk/ecad/
uk ac cf
5. MSTNET: Electronic mailer for European MEMS Microengineering
and Microsystems Technology
MSTNET is a global electronic mailer for the industrial and academic
community involved in Microsystems Technology. This is provided by the
Laboratory for Applied Microsystems at the University of Cardiff, UK.
http://www.cf.ac.uk/ecad/mstnet.html
uk ac lancs comp
http://www.comp.lancs.ac.uk/engineering/research/microelectronics/
Lancaster University Microelectronics & Microsystems group, Analogue
& Mixed Signal and Integrated Microsystems
uk ac shef
University of Sheffield, UK, MEMS Unit Homepage
http://www.shef.ac.uk/uni/projects/mesu/
http://www.shef.ac.uk/~mesu/
This link contains extensive information on current MEMS research at
the University of Sheffield, UK. Example projects are a novel ROTATING
microgyroscope under patent application, micro-speaker for hearing aids,
and micro-electric generator for implanted microsystems. Links to other
MEMS Sites.
Links to MEMS web sites http://www.shef.ac.uk/~mesu/links.html
un ac soton ecs mems
http://www.mems.ecs.soton.ac.uk/title.htm
Welcome to the Microelectromechanical Group in the Department of Electronics
and Computer Science at the University of Southampton
http://www.mems.ecs.soton.ac.uk/publish.htm
publications
uk ac surrey ee
http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html
This document contains some useful introductory links for MEMS, microengineering
and microelectromechanical systems
(MEMS). Most of the documents linked deal primarily with micromachining;
ie, the fabrication of three dimensional
structures with dimensions of the order of microns
uk ac surrey ee
http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html
89. Microengineering and MEMS. Danny Bank's web site.
This document contains some useful introductory & tutorial
links for microengineering and microelectromechanical systems (MEMS). Most
of the documents linked deal primarily with micromachining and MEMS.
uk co aml
Applied Microengineering Ltd
http://www2.aml.co.uk/aml/
AML is an Independent, Industrial Commercial organisation, dedicated
to Microengineering. Microengineering, sometimes referred to as Micromachining,
Microsystems (MST), MicroElectroMechanical Systems (MEMS) is defined by
AML as a technology using Silicon wafers, as the unit of production and
base material, processed by a variety of microelectronic (and other) wafer,
batch, techniques to produce identical millimetre sized devices with micron
sized features, accurately and at low cost. AML's mission is to help Industry
exploit Microengineering. This is achieved via the design, development,
productionisation and manufacture of microengineered products (currently
mainly sensors) on behalf of Industry. Microengineering enables the realisation
of mechanical and electrical devices with smaller size, higher performance
& lower unit costs.
uk co smithsys
6. Europractice Basic Services
EUROPRACTICE is an EC initiative which aims to stimulate the wider
exploitation of state-of-the-art microelectronics technologies by European
industry. The ultimate goal of EUROPRACTICE is to enhance European industrial
competitiveness in the global market-place. MEMs related
http://www.smithsys.co.uk/europractice/
202.232.157.4
http://202.232.157.4/MMC/no.14/act/26/hitach.htm
Hitachi has developed a high-power micropump and an electrostatically
driven microvalve.
For other sources of Information on MEMS, Journals, Help, and Consulting please see MEMS at trimmer.net (TM).
Please add a link or bookmark to http://www.trimmer.net Other links may change.