Counter Started 7/9/98:
http://home.earthlink.net/~trimmerw/mems/Stroud_Dbase.html
The following list of web sites was extracted from the Stroud Reference Database. It is being developed as an aid for MEMS researchers, students and other interested parties. New sites will be added as they are located. Suggested additions are welcomed and can be submitted to mailto:robertstroud@earthlink.net (no attachments, please). While a reasonable effort is made to keep this site list current, some of the addresses my change without the author's knowledge. If you are aware of any changes or outdated addresses, please send a message with the correction to the above e-mail address. Thank you to all who have so far sent in suggestions and corrections. Please also read the disclaimer and copyright at the bottom of this page.
This list is divided into 5 sections. These are
MEMS reference sources
MEMS and related sites
Home Pages of Individuals
This consists of sites belonging to individuals in the MEMS field.
Space and Spacecraft Related Sites
One of my particular application areas of interest.
Other Sites of Interest
Sites of general interest to the MEMS community but not necessarily MEMS specific.
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MEMS reference sources
There are several MEMS reference sources available that I recommend, particularly for students new to the technology. These include;
1. "Micromechanics and MEMS; Classic and Seminal Papers to 1990" by William Trimmer, IEEE Order Number PC4390, ISBN 0-7803-1085-3, 1997. Dr. Trimmer's book is a wealth of articles from the early days of MEMS, many of which are difficult to find elsewhere. I highly recommend it for any serious students and professionals in the field. For the student it provides insights into the original research and development. The first, and perhaps most significant article that I recommend for people new to the field is "Microrobots and Micromechanical Systems" by W. Trimmer. It is on page 96 of this text and is an excellent introduction to scaling laws. An understanding of these is fundamental to an understanding of MEMS devices and their value. The body of the article can also be found at
http://home.earthlink.net/~trimmerw/mems/Scale.html
However, this does not include the appendices, which give excellent examples of the scaling laws for different phenomena.
2. A short tutorial on micromachining as well as some interesting articles, Belle Mead Research
http://home.earthlink.net/~trimmerw/mems/tutorials.html
3. Analog Devices iMEMS Technology. A brief tutorial on surface micromachining.
http://www-mtl.mit.edu:8001/htdocs/tutorial.html
4. "SmartMUMPs Design Handbook including MUMPs Introduction and Design Rules (rev. 4)" by David A. Koester, Ramaswamy Mahadevan, Alex Shishkoff and Karen W. Markus, MEMS Technology Applications Center, MCNC.
http://mems.mcnc.org/smumps/SMTOC.html
5. "Introduction to Microengineering" by Danny Bank
http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html
6. "A Quick Tutorial, Surface Micromachining"
http://www-mtl.mit.edu:8001/htdocs/tutorial.html
7. University of Wisconsin short course on MEMS
http://mems.engr.wisc.edu/what/
8. Case Western Reserve University course covering
Part I - MEMS Overview
Part II - Surface Micromachining Technology
Part III - The MUMPS Process and Design
http://mems.eeap.cwru.edu/shortcourse/
9. MicroElectroMechanical Systems (MEMS) Module by N.C. MacDonald, Cornell University
http://maemac.mae.cornell.edu/REALIZATION/mems-module/
10. Precision Micromanufacturing Processes Applied to Miniaturization Technology
It is extensive tutorials on micromechanical machining such as micromilling, drilling, diamond machining, laser, etc. by Dr. Craig Friedrich, Mechanical Engineering Department, Michigan Technological University.
http://www.me.mtu.edu/~microweb/
11. MEMS Clearinghouse
Tutorial Information about MEMS
http://mems.isi.edu/archives/otherWWWsites_tutorial.html
12. An Introduction to MEMS, by Elliot Hui
http://www-bsac.eecs.berkeley.edu/~elliot/mems.html
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MEMS and Related Sites
1. DARPA ETO
DARPA Electronics Technology Office home page that contains information on the vision, priorities and R&D thrusts supported by ETO. It also describes the organization components and personnel, and ETO solicitations.
http://web-ext2.darpa.mil/ETO/
2. DARPA Microelectromechanical Systems (MEMS)
Summaries of all DARPA MEMS projects, information on the MEMS Principal Investigator meetings, a 1997 market survey, and an overview presentation.
http://web-ext2.darpa.mil/ETO/MEMS/
Related DARPA sites:
MicroFluidic Molecular Systems (MicroFlumes) http://web-ext2.darpa.mil/ETO/mFlumes/index.html
MicroOptoElectroMechanical Systems (MOEMS) http://web-ext2.darpa.mil/ETO/MOEMS/index.html
IDA MEMS transition program http://www.ida.org/MEMS/
MEMS Project Summaries http://web-ext2.darpa.mil/ETO/MEMS/Projects/index.html#current
Optical Micro-NETworks http://www.darpa.mil/ETO/OMNET/index.html
3. MESA Research Institute, the Netherlands
MESA is a university of Twente research institute for micro electronics, materials and molecular engineering, and sensors and actuators. MESA stands for Micro Electronics, Materials- and Molecular Engineering, and Sensors and Actuators.
new: http://home.earthlink.net/~trimmerw/mems/Stroud_Dbase.html
http://www.el.utwente.nl/mesa/
Two MESA sites of particular interest to MEMS researchers are:
Micro Mechanical Devices Group at http://www.el.utwente.nl/tdm/mmd/index.html
Biosensors and Electrochemical Sensors at http://www-bio.el.utwente.nl/research/sensors.htm
Micromechanical Devices Mesa Institute Twente University
The Micro Mechanical Devices group (better known as: "MicMec"), conducted by Prof. M. Elwenspoek, is part of the MESA Research Institute at the University of Twente, The Netherlands. It is one of the leading groups in the world in the field of Micro System Technology (MST) in general and MicroElectroMechanical Systems (MEMS) in particular.
http://www.el.utwente.nl/tdm/mmd/mmdhome.htm
4. ECAD Laboratory for Applied Microsystems, Cardiff University of Wales
The Laboratory for Applied Microsystems, ECAD, is an interdisciplinary research activity on fundamental and applied aspects of microengineering and microsystem technology with a strong bioscience orientation (BioMEMS). Other research themes are orientated towards biomedical and space applications.
5. MSTNET: Electronic mailer for European Microengineering and Microsystems Technology
MSTNET is a global electronic mailer for the industrial and academic community involved in Microsystems Technology. This is provided by the Laboratory for Applied Microsystems at the University of Cardiff, UK. MSTNET is an electronic-mailing distribution list covering the area of Microsystems Technology. It acts as a self-contributing bulletin board for the exchange of information, e.g. available technologies, expertise, processing opportunities, collaboration requirements, employment vacancies, as well as a route for the rapid acquisition of technical help on problems and the procurement of materials/equipment etc.
http://www.cf.ac.uk/ecad/mstnet.html
6. Europractice Basic Services
EUROPRACTICE is an EC initiative which aims to stimulate the wider exploitation of state-of-the-art microelectronics technologies by European industry. The ultimate goal of EUROPRACTICE is to enhance European industrial competitiveness in the global market-place.
http://www.smithsys.co.uk/europractice/
7. European Microsystems Technology On-line
EUROPRACTICE is an EC initiative which aims to stimulate the wider exploitation of state-of-the-art microelectronics technologies by European industry. The ultimate goal of EUROPRACTICE is to enhance European industrial competitiveness in the global market-place. There are several sites for Europractice.
http://www.europractice.com/about.html
The Competence Centres (CCs) provide application support and design skills organised around products and applications knowledge rather than specific technologies. Each Centre is a fabless design house, choosing the most appropriate technologies for their tasks. They have design skills in the relevant technologies or make use of other design capabilities.
Manufacturing Clusters (MCs) are set up to provide access to microsystems technologies for prototyping and small volume production in a cheap and flexible manner. The varied facilities, skills and technologies available among the members of a Cluster will be offered in a combined manner to present customers with a global solution to their problem.
http://www.europractice.com/MST-MCcontacts.html
http://www.vdivde-it.de/imsto/europractice/default.html
MST/MEMS related web sites on the MST homepage
This site also includes mstonline which is an information service for the MST community. It provides regularly up to date information on technology, applications, markets, news and events with specific emphasis on Germany but covers all MST related regions worldwide.
EMSTO, the European information clearinghouse on microsystems technology.
MST-EVENTS
A chronological list of conferences, workshops, courses, etc. of MST events world wide.
http://www.vdivde-it.de/mst/IMSTO/mst-events/events.qry
8. MST International
This site contains links to the following:
News and Announcements, News for the Community, MST Newsletter and Events
MST Country Reports / European Initiatives , Information on MST/MEMS in various countries
MST NET, Electronic Mailer for Microengineering & Microsystems Technology
MST Yellow Pages / NEXUS Members, directory of products, services, organizations and personnel
MST related Web-Sites, Worldwide WWW servers related to MST/MEMS
MST Projects Area (ESPRIT, BRITE-EURAM, EUREKA, ...)
http://www.vdivde-it.de/mst/internat.html
MST related Web-Sites
Search their worldwide WWW servers related to MST/MEMS
http://www.vdivde-it.de/IMSTO/sites/W3MST.qry
9. Institute of Microtechnology, Bucharest, Romania
National Institute of Research-Development for Microtechnology
Objectives: multidisciplinary research in microsystems, technological development (microtechnologies), industrial services in microelectronics
10. Romanian Microsystems Technology On-line
The Romanian Information Clearinghouse on Microsystem Technology provided by Institute of Microtechnology (Bucharest, Romania) on behalf of NEXUSPAN (PAN-EUROPEAN Network in Multifunctional Microsystems). ROMSTO is an extension of EMSTO (European Microsystem Technology On-line)
http://www.imt.pub.ro/IMT/ROMSTO/
11. MEMStek Products LLC
This company is now out of business.
http://www.mems.com/Tall_mems.htm
12. Silicon Microoptics in Delft
Delft University of Technology
http://guernsey.et.tudelft.nl/
Optics, MEMS and related links provided by the Delft University of Technology
http://guernsey.et.tudelft.nl/farlinks.html
13. Sandia National Laboratories, Intelligent Micromachine Initiative
Sandia National Laboratories is a recognized leader in this emerging field. Sandia has developed unique technologies which enable the realization of complex mechanical systems on a chip, and the integration of these mechanical systems with on-chip control and communication electronics. Tutorial available.
http://www.mdl.sandia.gov/Micromachine/
Sandia National Laboratories Intelligent Micro Machine Initiative
http://www.mdl.sandia.gov/Micromachine/index.html
SAMPLES (Sandia Agile MEMS Prototyping, Layout Tools, Education, and Services) Program
Sandia's fabrication technologies available to everyone.
http://www.mdl.sandia.gov/scripts/sample.asp
14. Belle Mead Research
Home page of Belle Mead Research which is a company that specializes in providing cost effective solutions to companies in micromechanics. There is a short tutorial on micromachining as well as some interesting articles.
http://home.earthlink.net/~trimmerw/mems/index.html
The Belle Mead site also has pointers to the home pages of several patent offices and Intellectual Property Organizations can be found at
http://home.earthlink.net/~wilsonla/PatentsInternational.html
Links on this page include;
USA patent office - English ; http://www.uspto.gov/
Complete Search of US patents at IBM; http://patent.womplex.ibm.com/
Australian patent office - English ; http://www.aipo.gov.au/
Austrian patent office -German ; error
Brazilian patent office - Portuguese; error
Canadian patent office - English / French; error
Finish patent office - English / Finish / Swedish; http://www.prh.fi/engl.html
European patent office - English; http://www.european-patent-office.org/index.htm
Hong Kong patent office - Chinese / English; http://www.houston.com.hk:80/hkgipd/
Japanese patent office - English / Japanese; error
New Zealand patent office - English; http://203.97.170.9/ipo/
Spanish patent office - Spanish ; file not found
Swedish patent office - English / Swedish; http://www.prv.se/prveng/front.htm
United Kingdom patent office - English; not found
World Intellectual Property Organization - English; not found
Other Intellectual Property Offices
http://www.princeton.edu/~wsnt/PatentsInternational.html
Australia http://www.aipo.gov.au/
Austria (German) http://www.ping.at/patent/index.htm
Belgium http://www.european-patent-office.org/patlib/country/belgium/
Brazil http://www.bdt.org.br/bdt/inpi/english
Canada http://xinfo.ic.gc.ca/CIPO/
China, People's Republic of http://www.cpo.cn.net/english.htm
Croatia http://www.cpo.cn.net/english.htm
Denmark http://www.dkpto.dk/index1e.htm
European Patent Office http://www.european-patent-office.org/
Trilateral Offices' (EPO, JPO, USPTO) Trilateral Statistics Report, 1995 Edition, (2Jan97)
Finland http://www.prh.fi/engl.html
France (French) http://www.evariste.anvar.fr/inpi/
Germany (German) http://www.deutsches-Patentamt.de/
Greece error
Hong Kong http://www.houston.com.hk:80/hkgipd/
Hungary http://www.hpo.hu/
Note: The Hungarian site wants to set a lot of cookies
Italy http://www.european-patent-office.org/it/homepage/homepage.htm
Japan http://www.jpo-miti.go.jp/
Comparative Study of Examination Practices by the Trilateral Offices in the Field of Biotechnology (13Nov97) http://www.jpo-miti.go.jp/siryoe/contents.htm
Korea not found
Lithuania http://vytautas.is.lt/vpb/engl/
Luxembourg error
Malaysia http://kpdnhq.gov.my/ip/
Monaco (French?) http://www.european-patent-office.org/patlib/country/monaco/
New Zealand http://203.97.170.9/ipo/
Peru (Spanish) http://www.indecopi.gob.pe/
Poland http://www.ibspan.waw.pl/
Portugal (Portuguese) http://www.inpi.pt/
Romania http://www.osim.ro/eng/welcome.htm
Slovenia not found
Spain
Sweden http://www.prv.se/prveng/front.htm
Switzerland
United Kingdom http://www.patent.gov.uk/
United States Patent Office http://www.uspto.gov/
Office of Technology Licensing, U.C. Berkeley http://socrates.berkeley.edu/~otl/
World Intellectual Property Organization (WIPO) http://www.wipo.org/
WIPO Arbitration Center http://www.wipo.org/eng/general/arbit.htm
WIPO Diplomatic Conference on Certain Copyright and Neighboring Rights Questions
http://www.uspto.gov/web/offices/dcom/olia/diplconf/
Transcript - 11/12/96 Briefing and Request for Comments on the Chairman's Texts of Three Agreements for the Diplomatic Conference http://www.uspto.gov/web/offices/dcom/olia/diplconf/briefing.pdf
in Adobe PDF Format
http://www.uspto.gov/web/menu/viewers.html
WIPO Documents Available from PTO http://www.uspto.gov/web/offices/pac/dapps/pct/
15. University of Wisconsin MEMS
Describes research, products and partners. Course available. Information about pressure sensors, gears, resonant transducers, deep X-ray lithography and precision engineering.
Search all UW-MEMS pages
http://mems.engr.wisc.edu/search.html
Other MEMS links
http://mems.engr.wisc.edu/moreinfo.html
UW-MEMS
http://mems.engr.wisc.edu/master.html
Other MEMS links
http://mems.engr.wisc.edu/moreinfo.html
Photograph Archive
http://mems.engr.wisc.edu/images/
Short course on MEMS
http://mems.engr.wisc.edu/what/
16. Micro Systems at the Forschungszentrum Karlsruhe
The Karlsruhe Research Center (formerly Karlsruhe Nuclear Research Center, KfK) is one of the largest non-commercial science and engineering research institutions in Germany. It works on research and development problems of public interest, exclusively for peaceful purposes, in the fields of technology and the environment. Its "Research for Environmentally Sustainable High Technologies" program is concentrated on these four main areas: environment, energy, microsystems engineering, and fundamental research.
http://pmtsun3.fzk.de/English/home_e.html
Microsystems Technology Program (PMT)
http://pmtsun3.fzk.de/Frames/frhome_e.html
17. MEMS Clearinghouse, University of Southern California, Information Sciences Institute
The MEMS Clearinghouse was established to be a repository of information about MicroElectroMechanical Systems (MEMS) and to foster communication and the sharing of data within the MEMS community.
Links to other MEMS web sites
http://mems.isi.edu/links.html
MEMS Fabrication Center Information Template
Applied Microengineering Ltd (AML)
The information in this section was obtained as a response to a questionnaire on the MEMS Discussion group. It provides a compendium of micro-mechanical processing capabilities across various organizations. Its purpose to provide a starting point for places to look for more information by people interested in the area. Inclusion in this compendium should not be construed as a commitment on the part of any organization or institution to provide processing or other services.
http://mems.isi.edu/archives/mems_centers/
The Micro Mechanical Processing Center of USC/Information Sciences Institute
Is a prototyping service for standard cell and full-custom VLSI circuit development. MOS Implementation Service (MOSIS) is in the process of expanding their service to include MEMS devices.
MEMS Search
http://mems.isi.edu/opt-search.html
MEMS discussion group
http://mems.isi.edu/archives/Discussion_Group/post.html
MEMS Newsletter
http://mems.isi.edu/archives/Discussion_Group/1994/27.html
MEMS Clearinghouse Yellow Pages Organizations
This section contains links to all organizations in the Yellow Pages of the MEMS Clearinghouse. It includes links to our Yellow Page when it exists, and otherwise links directly to the organization's Web page. Organizations listed include MEMS-related companies, universities, research centers, etc.
http://mems.isi.edu/mems/yp/list-all-company.html#s
18. Sensors, Microstructures, and Actuators Working Group (SMAWG)
SMAWG is an independent professional organization welcoming participants from academia, industry, and government. Our objective is to create a forum for discussion of MEMS and related technology, and to benefit from the collaborations which will inevitably result. The SMAWG format is loosely modeled on the successful Bay Area MEMS Journal Club in Northern California. The motivation behind that format is to foster interactive discussion sessions rather than a formal seminar series.
http://k2.isi.edu/archives/mems_associations/LA-SMAWG/
19. Bay Area MEMS Journal Club
The San Francisco Bay Area MEMS Journal Club is an informal forum for professionals with an interest in the MEMS field. Meetings are held in the evening on the first Wednesday of each month and typically follow an open-discussion format in which group participation is encouraged. Topics span from fabrication technologies to applications of MEMS.
http://k2.isi.edu/archives/mems_associations/Bay-Area/
20. MEMS Technology Applications Center, MCNC
MCNC offers development, prototyping, and manufacturing of MEMS devices and systems based on surface, bulk, and/or LIGA micromachining. The Multi-User MEMS Processes, or MUMPs, is a DARPA-supported program that provides the domestic industrial, academic, and government communities with cost effective surface micromachining processing for prototyping and proof-of-concept fabrication. MUMPs is designed to be flexible, easy to use, and most importantly, cost effective. Course available.
MCNC also provides information on many MEMS organizations in their TechNet section at
http://mems.mcnc.org/technet/cfd.html
The Consolidated Micromechanical Element Library, CaMEL. consists of two independent parts; the nonparameterized cell database and the parameterized microelectromechanical element library, PME. The aim is to provide MEMS cell libraries that are not only useful for novice MEMS designers, but to experienced ones as well. Both libraries are intended to assist the user in the design and layout of MEMS devices by providing an initial layout for components of a MEMS system. It is assumed that the user will modify these elements and customize them as desired and assemble designs using a suitable mask layout editor (the layout editor must support non-rectangular geometries).
http://mems.mcnc.org/camel.html
21. HI-MEMS Alliance, MEMS Technology Applications Center
The HI-MEMS Alliance, led by MCNC, is a partnership among commercial manufacturers, universities, two federal laboratories, and a non-profit high-technology center established to provide customers with access to LIGA for the fabrication of precision micro-components.
http://mems.mcnc.org/HIclick.html
22. Micromachining, CMC and Can-MEMS
Canadian Microelectronics Corporation (CMC) is a not-for-profit organization established in 1984 to provide industrial microelectronic technologies to Canadian universities, both to facilitate world-class research and to ensure a strong source of well-trained graduates. CMC is supported by contributions of technology, services and cash from industry and by matching funding from the federal Natural Sciences and Engineering Research Council. CMC's membership now includes 35 universities and 20 industrial organizations, each selecting a member representative who acts as the main liaison with CMC.
http://www.cmc.ca/Fabrication/Micromachining/micromachhp.html
Index of /Fabrication/Micromachining/
http://www.cmc.ca/Fabrication/Micromachining/
23. Louisiana Tech University, Institute for Micromachining
A resource for the development of microfabrication and microassembly processes for industrial, medical and consumer products.
http://www.LaTech.edu/tech/engr/ifm/
24. Case Western Reserve University MEMS Resource home page
The Microelectromechanical Systems (MEMS) Resource at Case Western Reserve University (CWRU) provides an interdisciplinary environment for graduate education through state-of-the-art research in micromachining, microsensors, microactuators, and microsystems.
There is also a short course covering
Part I - MEMS Overview
Part II - Surface Micromachining Technology
Part III - The MUMPS Process and Design
http://mems.eeap.cwru.edu/shortcourse/
25. Ohio MEMSNet
A consortium of Ohio universities and the Cleveland Clinic Foundation, in conjunction with the CAMP, the Edision BioTechnology Center, Ohio's two major Federal laboratories, and a number of Ohio industries, have established the Ohio MEMSNet, a state-wide fabrication, design, and testing infrastructure capability for the emerging field of microelectromechanical systems (MEMS).
http://mems.eeap.cwru.edu/memsnet/
26. MIT Microsystems Technology Laboratories
The MIT Microsystems Technology Laboratories (MTL) is a collection of people and facilities bound together by a shared mission emphasizing education, research, and service in microsystems technology.
MIT Microsystems Technology Laboratories, MEMS Program
http://www-mtl.mit.edu/home.html
MEMS at MIT
There are several groups at MIT working on MEMS devices, modeling, and applications.
http://arsenio.mit.edu/MEMSatMIT.html
The Semiconductor Subway
The Semiconductor Subway provides links to all manner of semiconductor and microsystems related information, including fabrication facilities, research activities, standards work, etc. It has a clickable map to connect to other sources of information
http://www-mtl.mit.edu/semisubway.html
MIT Center of Excellence in Microsystem Technologies
The goal of this SRC Center of Excellence (COE) is to develop key technologies for the fabrication of VLSI circuits and VLSI-compatible monolithic microsystems. The areas of research in this COE were chosen with the Semiconductor Research Corporation (SRC) 2001 goals in mind. These areas address a large volume of markets such as personal communication and computing, and automotive electronics. You can browse the four research areas listed below to find out about the related projects.
1.Microelectromechanical Technology
2.Low Power RF Communication Technology
3.Silicon Microphotonics Technology
4.Digital Circuit Technology.
http://www-mtl.mit.edu/SRC/SRC.html
Distributed Information Systems for MEMS, ISAT Study, 1995, Final Report
http://www-swiss.ai.mit.edu/~switz/arpa-info/memsisat/index.htm
27. Distributed Microsystems Research Group
UCLA Electrical Engineering Department
The Distributed Microsystems Research (DMSR) Group is comprised of several ARPA-funded programs, which together are involved in research and development of the design tools, algorithms, architectures, and CMOS integration techniques needed to enable next-generation systems for distributed communications, networking, monitoring, and high-speed signal processing.
Micro-Manufacturing Laboratory!
The WWW Home Page for Professor C.J. Kim's Micro-Manufacturing Laboratory at UCLA
28. Selected MEMS-related Web Sites for EE 234/434
The purpose of this web page is to offer easy access to some of the excellent web sites devoted to MEMS and MEMS-related
material. The intention is to provide a comprehensive overview of general micromechanical design and fabrication. There are links to:
a) Fabrication: Various universities and companies involved with the fabrication of MEMS devices.
b) Research/Development/Education. These sites cover the continuously expanding realm of MEMS. They reveal some cutting edge R & D, and also include links to sites with an educational purpose.
c) Poly-Silicon mechanical properties, a bibliography of papers covering measurements of important mechanical properties of poly-Silicon.
http://www.ceas.rochester.edu:8080/ee/users/elstat/MEMSmain.html
29. Carnegie Mellon Microelectromechanical Systems Laboratory
The Microelectromechanical Systems (MEMS) Laboratory is associated jointly with the Department of Electrical and Computer Engineering and the Robotics Institute (part of the School of Computer Science) at Carnegie Mellon University. In the MEMS Lab, we are developing miniature sensor and actuator systems made using batch-fabrication processes, especially integrated-circuit fabrication processes. Research in this area is motivated by the potential to produce high performance, low-cost, miniature sensors and actuators. Smart sensors are made by combining microstructures and circuits on a single silicon chip. Specific research areas of interest include nanometer-scale data storage, microsensors and microactuators, MEMS design tools, micromechanical component modeling, embedded microinstruments, and microrobotics.
http://www.ece.cmu.edu/afs/ece/usr/mems/www/mems-home.html
The Microelectromechanical Systems (MEMS) Laboratory is associated jointly with the Department of Electrical and Computer Engineering (ECE), the Robotics Institute (part of the School of Computer Science), and the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University.
30. Alberta Microelectronics Centre
The Alberta Microelectronic Centre (AMC) is an Alberta technology corporation, with a mission to develop the best commercially relevant microelectronic technologies for its customers' products and services.
The Materials and Devices Laboratory of AMC develops and manufactures miniaturized devices using semi-conductor fabrication techniques, often referred to as micromachining technologies. AMC fabricates a range of products that are used in the telecommunications and biotechnology sectors, and is known as one of North America's foremost micromachining companies.
http://www.amc.ab.ca/mad/labhtml.htm
31. Berkeley Sensors and Actuators Center
Berkeley Sensor & Actuator Center (BSAC) is a NSF/Industry/University cooperative research center funded by the National Science Foundation and a consortium of corporations and government agencies. Since its foundation in 1986, BSAC has been devoted to research on sensors and miniature moving mechanical elements or MEMS (MicroElectro Mechanical Systems) that take advantage of the remarkable progress made in integrated-circuit technology. BSAC researchers fabricate most of their devices in the UC Berkeley Microfabrication Laboratory. The laboratory is located on the 4th floor of Cory Hall which is home to the Electrical Engineering department of the University of California at Berkeley.
http://bsac.eecs.berkeley.edu/
Microphotonics Group
Microphotonic systems using silicon surface micromachining
http://www-bsac.eecs.berkeley.edu/bsac/research/microphotonics/
Mechanical Properties of Polycrystalline Silicon Bibliography
This is a collection of text files listing papers which report mechanical properties of polycrystalline silicon.
http://www-bsac.eecs.berkeley.edu/~ptjones/database.html
32. EG&G IC Sensors
Based in Milpitas, California, EG&G uses state-of-the-art silicon micromachining technology to manufacture components for physical measurement and control. EG&G IC Sensors' product line includes pressure sensors, accelerometers, valves, and custom silicon microstructures. The firm's major markets are industrial, automotive, and medical applications, along with consumer electronics and aerospace.
http://www.egginc.com/bin/mirror/webmate/egg/page/egg/view_division/Divisions/Opto|112
EG&G Optoelectronics Group
EG&G Optoelectronics business segment consists of eight autonomous divisions including: EG&G Amorphous Silicon, EG&G Canada Ltd., EG&G Electro-Optics, EG&G Heimann Optoelectronics, EG&G IC Sensors, EG&G Judson, EG&G Reticon and EG&G Vactec.
http://www.egginc.com/bin/mirror/webmate/egg/page/egg/group_view/Group/OptoElect
33. Jet Propulsion Laboratory, California Institute of Technology
Center for Space Microelectronics Technology and Robotics and Mars Exploration Technology home page
http://mishkin.jpl.nasa.gov/CSMT_PAGE
or
or
http://csmt.jpl.nasa.gov/newcsmt.html
The JPL Microdevices Laboratory (MDL)
MDL at NASA's Jet Propulsion Laboratory (JPL) is a facility dedicated to create, develop, integrate and deliver critical microdevice technologies and products enabling NASA and DoD space missions and enhancing U.S. competitiveness worldwide. MDL is a primary research and technology development facility in the Center for Space Microelectronics Technology (CSMT) at JPL and is operated by the Microdevice Section (346). MDL provides end-to-end device development capabilities and a staff with expertise in technologies over a wide variety of fields. Devices based on silicon, III-V compound semiconductors, and superconductors can be fabricated with nanometer-size features and fully. MDL enables the development of a multitude of microdevices such as infrared detectors, millimeter and submillimeter wave sensors, UV and x-ray CCDs, photonic devices, micromagnetic devices, accelerometers, seismometers, meteorological sensors. chemical sensors, gyroscopes and electronic neural networks. Prototyping of devices from concept to prototype in less than 2 years has been demonstrated.
http://mishkin.jpl.nasa.gov/MDL.html
34. Applied Microengineering Ltd. Home Page
AML is an Independent, Industrial Commercial organization, dedicated to Microengineering. Microengineering, sometimes referred to as Micromachining, Microsystems (MST), MicroElectroMechanical Systems (MEMS) is defined by AML as a technology using Silicon wafers, as the unit of production and base material, processed by a variety of microelectronic (and other) wafer, batch, techniques to produce identical millimeter sized devices with micron sized features, accurately and at low cost. AML's mission is to help Industry exploit Microengineering. This is achieved via the design, development, productionisation and manufacture of microengineered products (currently mainly sensors) on behalf of industry.
Applied Microengineering Ltd. News Letter
http://www.aml.co.uk/news.html
35. Professor Y. C. Lee's Research Group
Electronic Packaging Research at the University of Colorado, Boulder
Includes research in MEMS, microelectronics, optoelectronics, millimeter waves.
http://me-www.colorado.edu/centers/yclee-group/memsov.htm
Microelectromechanical Systems, University of Colorado, Boulder, CO
http://patch.Colorado.EDU/engineering/MEMS/
36. Fujita Laboratory
Institute of Industrial Science, The University of Tokyo,
http://www.fujita3.iis.u-tokyo.ac.jp/index.html
E. H. Yang's Home Page
Contains descriptions of his work in MEMS as well as links to other Fujita and university MEMS pages. It also contains e-mail addresses and links to members of the Fujita research team.
http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html
37. Advanced Technology Program at NIST
The ATP's mission is to stimulate U.S. economic growth by developing high risk and enabling technologies through industry-driven cost-shared partnerships. ATP is currently organizing a focused program on MEMS that could be funded on the order of $130M over 4 years.
The MicroElectroMechanical Systems (MEMS) Project is within the IC Technology Group of The
Semiconductor Electronics Division at The National Institute of Standards and Technology (NIST). We
focus on integrated MEMS that are compatible with commercial CMOS technology.
MicroElectroMechanical Systems (MEMS) IC Technology Group at NIST
http://www.eeel.nist.gov/812/44.html
The MicroElectroMechanical Systems (MEMS) Project is within the IC Technology Group of The Semiconductor Electronics Division at The National Institute of Standards and Technology (NIST). They focus on integrated MEMS that are compatible with commercial CMOS technology.
Research Opportunities at NIST
http://www.eeel.nist.gov/812/opportun.html
Materials Science at NIST
http://nvl.nist.gov/pub/guides/matls.htm
IC Technology Group
The IC Technology Group conducts a broad range of both experimental and theoretical research related to test-structure-based measurement methods for evaluating processing tool performance, improving device reliability, and characterizing and controlling manufacturing processes needed by the semiconductor industry. The MEMS work objectives are to provide domestic industry with MEMS-based test structures and standardized test methods for characterizing the thermo-electro-mechanical properties of thin films used in MEMS and IC technologies and work with IC foundries to develop infrastructure for improved accessibility of MEMS manufacturing. Research and develop novel metrology applications of MEMS technology.
http://www.eeel.nist.gov/semiconductor/ictg.html
38. Institut für Mikro- und Informationstechnik home page (In German and English)
This institute is part of the University of Stuttgart and consists of 4 departments. These are micromachining, sensors, microfluidics, and information technology.
http://www.imit.uni-stuttgart.de/start_e.htm
39. EMSTO, the European Information Clearinghouse on Microsystem Technology provided by VDI/VDE IT (Teltow, D) together with LAAS-CNRS (Toulouse, F) and ECAD (Cardiff, UK) and MSTB (Swansea, UK) on behalf of NEXUS (Network of Excellence in Multifunctional Microsystems). NEXUS is a network of excellence funded by the European Commission to promote research, development, production and application of microsystems throughout Europe, thus preparing European industries for the world market in this strategic field. This objective is pursued both by providing strategic orientation to the European microsystems community and by stimulating the exchange of information within that community. Presently, Nexus comprises 203 organization in 17 West European countries, both in industries and R&D. In addition, the supplementary networks NEXUSEAST and NEXUSPAN include 50 organizations from 14 Central/East European countries. In the following you will find a description of the structure of NEXUS, and an overview of the specific activities of the network. In particular, opportunities for organizations in Eastern Europe to participate in and to contribute to the activities of NEXUS are discussed.
40. Microengineering Common Interest Group (MCIG).
The MCIG encourages the development and use of microengineering technology and techniques across the widest possible spectrum of UK applications. The specific objective of the Group is to provide a forum for the dissemination of information about, and the discussion of, all aspects of microengineering. This forum includes end users, manufacturers, researchers and providers of prototype facilities. The MCIG aims to co-operate with other appropriate groups and organizations that have the potential to have an impact on the development of microengineering in the UK.
http://www.iee.org.uk/CIGS/MCIG/
Institution of Electrical Engineers
IEE Professional Group S11: Microengineering
41. The Micromachine Center's home page, Tokyo, Japan
Includes an online quarterly magazine and pages on;
Establishment and Dissemination of Micromachine Technology
Investigation and Research
Collecting and Providing Information
Exchange and Cooperation in Japan and Abroad
Standardization
Promotional Activities
42. Microfabrication and MEMS Laboratory at Northeastern University
The Microfabrication Laboratory (MFL) was officially established in November of 1995. The laboratory conducts research in two primary areas; MicroElectroMechanical Systems (MEMS) and Transferred Film Technology (TFT). In MEMS, the laboratory's areas of expertise include bulk micromachining, with an emphasis on anisotropic etching and alloy bonding, and nickel plated surface micromachining. In TFT, the laboratory is investigating three dimensional circuits including a CMOS image array and a 64 bit RISC microprocessor.
http://www.ece.neu.edu/edsnu/zavracky/mfl/mfl.html
43. DIMES, the Delft Institute of MicroElectronics and Submicron Technology, the Netherlands
Home page of the Delft Institute of MicroElectronics and Submicron Technology. DIMES is the Dutch national center for research and education on silicon-based micro-electronics. DIMES is related to the faculties of Information Technology and Systems and Applied Sciences at Delft University of Technology, The Netherlands. Currently it has a staff of over 280 people.
http://muresh.et.tudelft.nl/dimes/index.html
See also
44. Boston Area MEMS Seminar (BAMS) Series
The Boston Area MEMS Seminar (BAMS) is held approximately monthly, usually at MIT, to promote MEMS information exchange within the Boston Area. BAMS is co-sponsored by MIT, Analog Devices, and The Foxboro Company
http://www-mtl.mit.edu/BAMS/seminar.html
and
http://goesser.mit.edu/MTL/bulletin/v6n2/BAMS.html
Shear Stress Sensors/Imagers
http://touch.caltech.edu/home/research/shear/shear.html
Caltech Engineering Design Research Laboratory , Structured Design Methods for MEMS
In the past, the design of Micro-Electrical-Mechanical-Systems has been almost entirely trial and error, although MEMS structures have been fabricated for many years. Because of the complex relationship between mask shape and processed MEMS shape, several design and fabrication iterations are often required to refine a preliminary mask-layout. Designers with extensive MEMS fabrication experience can reduce the number of mask design iterations because they possess a detailed intuitive model of the etching process. However, a major goal of this work is to develop automated tools which can both reduce the number of iterations that are necessary for experienced designers, and allow designers who are not specialists in the art of MEMS fabrication to develop reasonably sophisticated designs with a small number of iterations. Furthermore, such automated tools will ultimately result in designs that are more robust with respect to process variations, and are thus most suited to large scale and low cost manufacturing.
http://design.caltech.edu/Research/MEMS/uMachine.html
Pinelab at Caltech
Researchers are interested in learning, memory, and synaptic plasticity in living neural systems, either in dissociated cell cultures, organotypic cultures (e.g., hippocampal slices), or living animals. Professor Pine and his collaborators have developed a number of new technologies for studying neural systems. Examples include an x-ray microscope for living cells, multi-electrode cell culture chambers, fiber-optic photodiode arrays and high-speed CCD cameras for imaging of neural activity, and silicon probes for long-term interfacing of neural tissue with external electronics.
http://www.caltech.edu/~pinelab/Pinelab.html
Roukes Group at Caltech
Explorations with Three-Dimensional Nanostructures in Physics, Engineering and Biology
http://cmp.caltech.edu/~roukes
46. Analog Devices iMEMS Technology
ADI has been a pioneer in integrated surface micromachining along with the University of California, Berkeley. IMEMS is the brainchild of Dr. Richie Payne at ADI and Professor Roger T. Howe, co-director of the Berkeley Sensor & Actuator Center. This site describes surface micromachining technology and how iMEMS is a natural evolution from it
http://www-mtl.mit.edu:8001/htdocs/tech.html
Brief tutorial on surface micromachining.
http://www-mtl.mit.edu:8001/htdocs/tutorial.html
47. Simon Fraser University
The Institute for Micromachine and Microfabrication Research (IMMR) at Simon Fraser University was established in 1993 to enhance micromachining research and development and to encourage the application of research results in the design and fabrication of miniature sensors and actuators
http://fas.sfu.ca/ensc/research/groups/micromachining//immr.html
48. CSEM's mission is to generate new high-tech business, based on leading-edge know-how and expertise in microelectronics, microtechnologies, related systems and materials. As an interface between both in-house and external research and the industrial world, CSEM contributes to the realization of novel products. Relying on its own enabling technologies, CSEM will undertake the development of custom products right through to the manufacturing phase, as well as the procurement of special products in industrial quantities. CSEM is a private company of public utility, the shares in which are held by leading Swiss enterprises. Advanced research programs and capital equipment are partly supported by the Swiss federal government. Beside Switzerland, CSEM is internationally active in a dozen European countries, as well as overseas. Particular CSEM pages including microsystems, sensors and actuators can be accessed at the site given.
http://www.csem.ch/competen.html
49. The Microsystems Institute
The Institute of Microsystems is a multidisciplinary research institute working in the fields of design, simulation, fabrication, integration and application of very small dimension technical systems. Principle fields of research at the institute include:
New effects and concepts for sensor / actuator devices and interface electronics
Conceptual design of the corresponding systems
Simulation of devices and complete systems
Integration technologies
Basic development of new microsystem products
Evaluation phases of development cycles
Other dmtwww pages of interest are:
MEMS WWW sites, http://dmtwww.epfl.ch/ims/www.html
Microsystems Integration Group, http://dmtwww.epfl.ch/ims/micsys/index.html
Microsystems Design Group, http://dmtwww.epfl.ch/ims/sysmic/
DMT Microtechnique http://dmtwww.epfl.ch/index.eng.html
Microsystems Integration Group http://dmtwww.epfl.ch/imt/micsys/
50. Fraunhofer-Institut für Siliziumtechnologie (ISIT)
ISIT works on design, development and production of microelectronic components as well as on microsensors, microactuators and other parts for microsystems technology. All components of this kind can be delivered either being prototypes or customer specific series. With its service offers ISIT as a contract research institute applies to technology-oriented enterprises.
51. Standard Microsystems Corporation's (SMSC)
Specialty Semiconductor Foundry
Standard Microsystems Corporation (SMSC) has been producing semiconductor products since it was founded in 1971. Since then SMSC has created many of the processes used throughout the semiconductor industry. These P-well and N-well processes have been used over the years to produce millions of LSI (large scale integration) products. The 2 and 3 micron fab has produced devices such as floppy disk controllers, CRT controllers, and communication products.
52. TIMA-CMP Laboratory
The TIMA-CMP Laboratory, located in Grenoble, France, conducts research in microelectronics (TIMA) and provides a multi-project wafer production service (CMP). MEMS devices can be fabricated through CMOS-compatible front-side bulk micromachining based on AMS. Optical Elements (DOE) from CSEM are available too. In 1998 CMP introduced the multi-user MEMS Process from MCNC MEMS Technology Applications Center. Engineering kits for MEMS designs have been developed for CADENCE and MENTOR GRAPHICS.
http://tima-cmp.imag.fr/labo-e.html
or
http://mems.isi.edu/archives/industrypages/tima-cmp.html
53. Xerox Palo Alto Research Center
MEMS / Smart Matter Research at PARC
PARC's research strategy is to move MEMS beyond its micro-scale origins (where MEMS means micro-Electro-Mechanical-Systems), to create a new field that we call Systemic MEMS, which includes uEMS (micro-scale), mEMS (meso-scale), and MEMS (Macro-scale).
http://www.parc.xerox.com/spl/projects/MEMS/#overview
54. Fraunhofer-Institute for Solid State Technology
The Fraunhofer Institute for Solid State Technology IFT is divided into three scientific sections:
The Technology for Microelectronic Systems section addresses issues relating to technologically oriented research and development for integrated circuits on silicon basis. An essential feature is the introduction of a 1,0 µm CMOS process sequence providing local small and medium-sized companies with application-specific small batches. Further activities are in research fields such as single process development, multilayer metallization systems, mask fabrication and equipment evaluation. The second section, Microsystem Technology, pursues objectives in the development of sensor and actuator elements as discrete elements or in combination with further devices to form systems. A broad basis of know-how is available for development in cooperation with industry in microtechnologies, packaging and assembly techniques, thin and thick film technology, microsensors and actuators, microoptics, integrated microanalysis systems (IMAS) signal processing using neuronal networks, and application specific integrated systems (ASIS). The Institute section, System Technology / Telecommunications,
http://www.ift.fhg.de/english.htm
55. Institute of Mechanics, ETH Zürich
WWW server of the Institute of Mechanics. The German name is Institut für Mechanik (IfM). This page deals with micro- and nanomechanics.
http://www.ifm.mavt.ethz.ch/research/nano-0.html
56. NASA Space
Instrument and Sensing Technology
Micro-Instrument Technology
On this page:
Micro-Instrument Program Goals and Objectives
Micro-Instrument Technology Program Activity Descriptions
Additional Information
http://ranier.oact.hq.nasa.gov/Sensors_page/MicroInst/MicroInstOV.html
57. Sensorless Manipulation With Micro Actuator Arrays at Cornell University
They investigate manipulation tasks with arrays of microelectromechanical structures (MEMS). They have developed a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe efficient algorithms for their evaluation. Joint work with Bruce Donald, Robert Mihailovich, and Noel MacDonald. They investigate manipulation tasks with arrays of microelectromechanical structures (MEMS). They have developed a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and described efficient algorithms for their evaluation.
http://simon.cs.cornell.edu/Info/People/karl/MicroManipulation/
Cornell Nanofabrication Facility (CNF)
Formerly the National Nanofabrication Facility (NNF), CNF has served the US research community for more than 15 years by providing nanofabrication services to over 600 research projects on the Cornell University campus. Subjects for research are as diverse as Astronomy and Plant Pathology, and projects delve into the emerging fields of Integrated Optics and Microelectromechanical Structures (MEMS) as well as the more conventional Microelectronics, Physics and Materials Research. The CNF is also one of five members of the National Nanofabrication Users Network.
Recently, graduate student Jim Jennings, research associate Daniela Rus, graduate student Russell Brown, Professor Bruce Donald, and lab alumnus Jonathan Rees (now at MIT), developed a team of autonomous mobile robots that can perform sophisticated distributed manipulation tasks (such as moving furniture). The robots run robust SPMD protocols that are completely asynchronous and require no communication. Grad student Karl B?hringer, Professor Bruce Donald, and EE Professor Noel MacDonald, are building a massively parallel array of microactuators in the Cornell National Nanofabrication Laboratory. The array is a SCREAM chip containing over 11,000 actuators in 1 square centemeter, and can orient small parts without sensory feedback. Our microfabricated actuator arrays could be used to construct programmable parts-feeders (at any scale), or to build self-propelled IC's (walking VLSI chips.)
http://cs.cornell.edu/Info/Projects/csrvl/mems.html
MicroElectroMechanical Systems (MEMS) Module
http://maemac.mae.cornell.edu/REALIZATION/mems-module/
58. Tanner EDA
Tanner Research, Inc. develops and markets electronic design automation (EDA) software to meet the complex design needs of integrated circuits (ICs), multi-chip modules (MCMs) and microelectromechanical systems (MEMS). Founded in 1988, Tanner Research is a privately held corporation located in Pasadena, California. For fabrication requirements, Tanner Tools provide standard formatted GDSII and CIF file outputs. For prototype design and low cost, low volume production requirements, the tools directly support wafer sharing services provided by MOSIS and Orbit Semiconductor for IC fabrication, MIDAS for MCM fabrication, and the MCNC MUMPS MCNC MUMPS service for MEMS fabrication. The software is available for PC, Macintosh and UNIX platforms.
59. Electronic Visions Co.
Electronic Visions was the first company to offer equipment that could fulfill the production requirements for the microelectromechanical systems (MEMS) and micromachining industry. The technique of process separation, designed by Electronic Visions, provides an efficient and low ownership cost production system for the MEMS market. This technique has been established as the industry standard. In 1994 Electronic Visions installed the very first Silicon on Insulator (SOI) high-volume production bonder.
http://www.elvisions.com/whatmems.html
60. MicroSensors, Inc.
MicroSensors, Inc. is focused on designing, developing and producing micromachined sensors and sensor readout circuits for MEMS applications. Founded in 1997 as a wholly-owned subsidiary of Irvine Sensors Corporation, MicroSensors, Inc. is responsible for the Silicon MicroRing GyroTM for motion sensing and inertial navigation and the Universal Capacitive ReadoutTM ASIC for interfacing and controlling a variety of MEMS devices. The company also provides design services for MEMS devices, mixed-signal and analog circuits, precision readout interfaces, and low power, low noise, and neural integrated circuits.
61. Surface Technology Systems
Surface Technology Systems (STS) is a manufacturer of plasma systems for thin film processing in both R&D and production environments. STS offers a wide product range covering ICP, ECR, RIE, Plasma CVD and sputtering technologies. STS's Advanced Silicon etch (ASEª) for the fabrication of Micro-Electro-Mechanical Systems (MEMS) provides the significant improvements in etch anisotropy long awaited by the MEMS community. Using this technique, it is finally possible to achieve the profiles required to fabricate micromachine devices such as pressure sensors, accelerometers, ink-jet printer heads, precision spectro-photometer slits and micromotor components.
http://www.stsystems.com/mems.html#mems
62. UCLA MEMS site
This site contains, among other things, an album of some interesting SEM photographs and pictures of 3-D microstructures, a list of MEMS publications by people at UCLA (abstracts and request form), the preliminary UCLA MEMS major field announcement, a description of the UCLA Nanofabrication Research Facility (UCLA NRF), a model of silicon crystal, FAQ on XeF2 as silicon etchant.
http://synergy.icsl.ucla.edu/index.html
This site also contains a tutorial short course on MEMS at
http://synergy.icsl.ucla.edu/htdocs/sc_outline.html
Others can be found at
http://simony.seas.ucla.edu/~jsimon/MEMS.html
63. The Electrochemical Society, Sensor Division
The focus of the Sensor Division is chemical sensors, with secondary emphasis on biosensors, physical sensors, and the processing technology of microelectromechanical systems (MEMS).
http://www.electrochem.org/divisions/sensor.html
64. Journal of Micromechanics and Microengineering
This journal is available from the Institute of Physics Publishing. It covers microelectronics and vacuum microelectronics, this journal focuses on fundamental work at the structural, devices and systems levels, including new developments in practical applications.
http://www.iop.org/Journals/jm
65. CSEM Centre Suisse d'Electronique et de Microtechnique SA
CSEM's mission is to generate new high-tech business, based on leading-edge know-how and expertise in microelectronics, microtechnologies, related systems and materials.
66. National Nanofabrication Users Network
The National Science Foundation has established the National Nanofabrication Users Network (NNUN) as an integrated partnership of user facilities with the objective of providing opportunities for researchers to turn new ideas in nanoscale science and technology into experimental reality.
67. LIGA News
LIGA newsletter of the International LIGA Community at Institute of Microtechnology (IMM) Mainz
LIGA news is a newsletter devoted to a microfabrication process technology. It's purpose is not to make a new scientific journal, but above all to exchange information and experience on what is going on worldwide in LIGA, on work in progress, on new patents or patent applications, on new LIGA microstructure products, on new materials, equipment, labs and facilities.
http://www.uni-mainz.de/IMM/LNews/LIGA_home.html
Also
http://www.imm-mainz.de/content.html
68. The Micromechanical Transducers Group (MicMec) of the University of Twente
The Micro Mechanical Devices group (better known as: "MicMec"), conducted by Prof. M. Elwenspoek, is part of the MESA Research Institute at the University of Twente, The Netherlands. It is one of the leading groups in the world in the field of Micro System Technology (MST) in general and MicroElectroMechanical Systems (MEMS) in particular.
http://www.el.utwente.nl/tdm/mmd/mmdhome.htm
69. University of Sheffield, UK, MEMS Unit Homepage
Extensive information about current MEMS research including rotating microgyroscope, micro-speaker for hearing aids and micro-electric generator for implantable microsystems.
http://www.shef.ac.uk/uni/projects/mesu/
http://www.shef.ac.uk/~eee/mems/index.html
70. Institut für Feinwerktechnik, Dresden
Present teaching and research activities deal with the development, design and manufacturing of automated precision devices for use in production and manufacturing. Especially their mechanical, optical, electrical, electronic, microtechnological and computer and control components are in the focus of our activities.
http://eietu2.et.tu-dresden.de/ifwt/ifwt.html
Technische Universit?t Dresden Institut für Halbleiter- und Mikrosystemtechnik.
http://www.tu-dresden.de/etihm/homeihm.htm
71. Redwood Microsystems
Redwood MicroSystems is a world leader in silicon microvalves and microvalve-based pressure regulators and mass flow controllers. These valves are based on patented thermo-pneumatic Operating Principles which provide a tremendous amount of actuation force from an incredibly small silicon chip. Redwood's products offer benefits in size, cost and performance versus pressure and flow regulators using conventional solenoid valves.
72. The Asian Technology Information Program (ATIP)
Non-profit organization dedicated to providing objective and high-quality information about technology developments in Asia. It contains many interesting MEMS references that can be found by searching their public reports using MEMS as the key word.
Search their public reports.
http://www.atip.or.jp/search-pub.html
73. KAIST
Micromachines and Microsystems Laboratory of the Department of Mechanical Engineering of the Korea Advanced Institute of Science and Technology .
http://sorak.kaist.ac.kr/~yhcho/
74. Institute of Microtechnology, University of Neuchâtel
The IMT focuses its educational and research activities on the following fields:
Microelectronics, sensors and actuators (Prof. Dr. Nico de Rooij),
Applied optics (Prof. Dr. RenŽ D?ndliker)
Physical electronics (Prof. Dr. Arvind Shah)
Electronics and signal processing (Prof. Dr. Fausto Pellandini)
Pattern recognition (Prof. Dr. Heinz Hügli)
SAMLAB
The Sensors, Actuators and Microsystems Laboratory (SAMLAB) of the Institute of Microtechnology of the University of Neuchâtel
http://www-imt-dr.unine.ch/Welcome.html
75. Georgia Institute of Technology
This site contains links to all of Georgia Tech's research labs. There are many having to do with electro-optics as well as the GA Tech MEMS Home Page.
http://www.ece.gatech.edu/research/labs/
MEMS home page
http://www.ece.gatech.edu/research/labs/msmsma/
Solar cell array for MEMS power supply
A miniaturized high voltage solar cell array as an electrostatic MEMS power supply .
http://www.ee.gatech.edu/research/labs/msmsma/MEMSpower/cellarray.html
76. LETI Laboratory of Electronics, Technology and Instrumentation
LETI, laboratory of the CEA's Direction of Advanced Technologies, is a European applied research laboratory in electronics. Its main mission is to help companies to improve their competitiveness, through technological innovation. About 85 % of its activity is dedicated to researches, finalized with partners outside CEA.
http://www-dta.cea.fr/wwwcea/leti/uk/leti.htm
77. Silicon Light Machines (formerly Eschelle, Inc.)
Silicon Light Machines' unique Grating Light Valve technology represents an approach to manufacturing high-resolution, high-contrast, and bright displays. The GLV technology is based on simple physical principles, and can be manufactured using conventional silicon-based manufacturing technologies. The GLV technology was originally developed and patented by Professor David Bloom and his students at Stanford University. To create a GLV device, Micro-Electromechanical (MEMS) techniques are used to form pixels on the surface of a silicon chip.
78. Mechanical Engineering Laboratory of MITI
Research at MEL is carried out on the following seven main areas
1.Materials Science and Technology
2.Bioengineering
3.Information and Systems Science
4.Advanced Machine Technology
5.Energy Technology
6.Manufacturing Technology
7.Robotics
http://www.mel.go.jp/enghome.html
79. Bartels Mikrotechnik GmbH
Bartels is a supplier of microproducts such as microgrippers.
http://www.bartels-mikrotechnik.de/index.htm
80. SPIE, the International Society of Optical Engineering
81. Interessengemeinschaft zur Verbreitung von Anwendungen der Mikrostrukturtechniken NRW e.V. (IVAM NRW e.V.)
This page provides information about companies and research organizations working in the field of microtechnology. All organization listed are members of IVAM NRW e.V. Detailed information about addresses, products, services and more is provided. A search engine can be used to find the desired information.
82. Institute for Microsensors, -actuators and -systems (IMSAS), University of Bremen
IMSAS founded in 1992, has its focus in Research and Development on miniaturized multifunctional systems and system-related components, such as sensors and actuators. Cleanrooms are available for silicon-processing, including bulk- and surface-micromachining and processing of non-silicon materials, such as ceramics on glass. IMSAS works in close cooperation with institutes at the university engaged in circuit design, power electronics, HF-techniques, and materials science
http://www.imsas.uni-bremen.de/
83. Forschungsverbund Mikrosystemtechnik, Erlangen-München-Passsau
http://www.iis.fhg.de/propro/formikrosys/index.html
84. Mechatronics Linz Home Page, Johannes Kepler University of Linz, Austria
http://www.mechatronik.uni-linz.ac.at/
85. Mechatronics around the World
List of mechatronics related sites
http://www.ecs.umass.edu/mie/labs/emsl/related.html
86. Electromechanical, Systems Laboratory, Department of Mechanical and Industrial Engineering , University of Massachusetts Amherst
Research activities at the Electromechanical Systems Lab are focused on the design, analysis, and implementation of "smart" electromechanical components, structures, and systems for enhanced condition monitoring and intelligent manufacturing. The development is centered around a mechatronics approach, striving for a synergistic integration of mechanical engineering, electronics, controls, and computer engineering.
http://www.ecs.umass.edu/mie/labs/emsl/
87. The Stanford Transducers Laboratory
This laboratory operates under Professor Greg Kovacs of the Electrical Engineering Department. The interdisciplinary group is dedicated to the development and application of micromachined sensors and actuators.
http://transducers.stanford.edu/
The Miller Group at Stanford University has many different areas of active research. Current activities include
Wavelength-sensitive photodetectors
GaAs optical receiver arrays
Optically controlled optical gates
GaAs optical modulator arrays
Wavelength division multiplexing of femtosecond pulses
Optical fiber data transmission
Volume Holographic Data Storage
http://www-miller.stanford.edu/projects.html
The Center for Design Research (CDR) is dedicated to facilitating individual creativity, understanding the team design process, and developing advanced tools and methods that promote superior design and manufacturing of products.
http://cdr.stanford.edu/CDR/cdr.html
Stanford Nanofabrication Facility, SNF
The National Science Foundation (NSF) has created a network of universities referred to as the National Nanofabrication Users Network (NNUN). Stanford University is in partnership with four other universities (Cornell, Howard, Penn State, and UCSB) to create this network that provides researchers opportunities to turn new ideas for the fabrication of nanoscale structures into experimental reality.
88.University of Michigan Center for Neural Communication Technology
The University of Michigan Center for Neural Communication Technology, directed by Professor David J. Anderson, began in May 1994 with funds from the NIH National Center for Research Resources . The Center was initiated to obtain resources necessary to meet the increasing demands for multichannel silicon substrate microprobes fabricated at the University of Michigan Center for Integrated Sensors and Circuits. These probes are being developed for acute and chronic recording and/or stimulation of the central nervous system.
http://www.engin.umich.edu/facility/cnct/index.html
89. Microengineering and MEMS. Danny Bank's web site. This document contains some useful introductory links for microengineering
and microelectromechanical systems (MEMS). Most of the documents linked
deal primarily with micromachining.
http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html
90. MicroElectromagnetics Device Group
This is the WWW home page describing on-going research performed under
the supervision of Dr. Dean P. Neikirk at The University of Texas at Austin
http://weewave.mer.utexas.edu/MEDHome.html
91. UCLA
Index of labs/laser/research
http://www.ee.ucla.edu/labs/laser/research/
Boston University's Precision Engineering Research Laboratory (BU-PERL),
under the direction of Dr. Thomas G. Bifano, is dedicated to research on
fabrication, control, and measurement at nanometer scales of precision.
A core project, supported by DARPA (MEMS), involves building silicon-based
deformable mirror systems for pattern recognition and adaptive optics.
Another core project, supported by NSF, DOE, and private industry, involves
a new process for manufacturing compact disc stampers. A third core project,
supported by grants from DARPA, ARO, and industry, involves developing
MEMS devices for microfluidic control.
93. OKO Technologies in the Netherlands is a manufacturer of precision
multichannel micromachined adaptive mirrors, which provide a unique possibility
of fast wave front control in modern optical systems. The company also
produces and sells software for optical design, diffraction analysis and
hologram synthesis.
http://www.okotech.com/index.html
94. Electronic Instrumentation Laboratory
95. What is Adaptive Optics?
N. Hubin and L. Noethe
ESO - European Southern Observatory
Karl-Scwarzschild Stra§e 2 D-85748 Garching b. München
Published on Science, Vol. 262, 1345-
http://www.eso.org/aot/introduction.html
96. Keck Adaptive Optics, Links to Other AO Pages
http://www2.keck.hawaii.edu:3636/realpublic/ao/links.html
97. The International Society for Optical Engineering
98. OSA Optics Net
Optics and Photonics Research, Applications, and Industry News
99. European Optical Society
The European Optical Society (EOS) serves as the joint forum for all
individuals, companies, organisations, educational institutions, and learned
and professional societies, who recognise the opportunity and challenge
that a common European base provides for the development of optics in its
broadest sense. Contains links to other sites of interest.
100. All-Optical Networking Consortium Homepage
The All Optical Networking Consortium was formed by AT&T Bell Laboratories,
Digital Equipment Corporation, and the Massachusetts Institute of Technology
to investigate architectures for, and build prototypes of all optical networks.
The work is funded by the Defense Advanced Research Projects Agency (DARPA).
101. Piezosystems Jena
Contains piezosystem jena news and product information on stacked actuators,
compact translation systems for 1D, 2D and 3D motion, special systems and
power supplies as well as a FAQ pace about their products.
http://piezojena.com/index.html
102. Miura-Shimoyama Laboratory, Department of Mechano-Informatics at
University of Tokyo http://www.leopard.t.u-tokyo.ac.jp/
103. Institute of Microtechnology, Mainz
IMM is a non-profit research and development institute, founded and
owned by the state of Rhineland-Palatinate, a federal state of Germany.
It is located in Mainz, which is the capital of Rhineland-Palatinate and
one of the political, cultural and economic centers of the highly developed
Rhine-Main area. The ultimate goal of IMM is to transfer innovative ideas
quickly and efficiently into marketable products, helping its partners
from industry to achieve commercial success.
http://www.imm-mainz.de/microsync/
104. HPTB Home Page (Microelectronics and Photonics Test Bed)
The MPTB is a space experiment launched in 1997 into a high radiation
orbit to test performance, reliability, and survivability of new microelectronic
and photonic devices and subsystems operating in the space radiation environment.
The page is not totally functional.
General Information:
MPTB Introduction: Introduction by Jim C. Ritter
MPTB Overview: Overview of the project
MPTB directory: Email accounts and phone numbers
Onboard Experiments: Information on the experiment payload
SEARCH: Keyword Search of Website
http://ssdd.nrl.navy.mil/www/mptb/index.htmlx
MPTB Data Site
This data site is provided by the Radiation Effects Branch of the Naval
Research Laboratory. Individual experimental results are password protected
by the experiment provider. However, the password may be obtained from
the provider for collaborations. MPTB data is available for the following
selections:
Data for all experiment boards in Panel A.
Data for all experiment boards in Panel B.
Data for all experiment boards in Panel C.
CPT Data.
Analog values for each Panel.
Analyzed data and experiment descriptions.
105. The World Technology Evaluation Center (WTEC) [formerly known as
The Japanese Technology Evaluation Center (JTEC)] at Loyola
WTEC provide assessments of foreign research and development in selected
technologies under a cooperative agreement with the National Science Foundation
(NSF). Loyola's International Technology Research Institute (ITRI), R.D.
Shelton Director, is the umbrella organization for WTEC. Paul Herer, Senior
Advisor for Planning and Technology Evaluation at NSF's Engineering Directorate,
is NSF Program Director for WTEC. Other U.S. government agencies that provide
support for the program include the National Aeronautics and Space Administration,
the Department of Energy, the Department of Commerce, and the Department
of Defense.
WTEC includes
Optoelectronics in Japan and the United States
http://itri.loyola.edu/opto/toc.htm
Microelectromechanical Systems in Japan
http://itri.loyola.edu/mems/toc.htm
JTEC Panel Report on Microelectromechanical Systems in Japan
This 1994 report is an assessment of MEMS research in Japan. It also
contains site reports on many university and corporate research facilities.
http://itri.loyola.edu/mems/d_1.htm
106. FSRM, The Swiss Foundation for Research in Microtechnology
FSRM is an independent non-profit organization in the field of microtechnology.
It promotes the research results and the transfer of R&D outputs in
industry. It offers short courses for specialists in industry and research,
support for establishing partnership, administration and logistic assistance,
information about international projects, all microtechnology related information.
It operates in Switzerland and Europe.
107. Network of Excellence in Multifunctional Microsystems (NEXUS)
NEXUS is the European Network of Excellence in Multifunctional Microsystems,
bringing together European expertise and R&D resources in microsystem
technology (MST). Its organizational structure includes an Industrial Working
Group, a Coordination Board (CB), the General Assembly, and a permanent
network office. Specific tasks are carried out by task forces established
by the CB. Current activities comprise the strategical assessment of MST
development world-wide, the formation of industrial links to SMEs, research
coordination, training and education, pubic relations, and a communication
infrastructure.
http://albion.ncl.ac.uk/esp-syn/text/7217.html
108. Electronics Laboratory (LEG) of the Swiss Federal Institute of
Technology Lausanne (EPFL)
The Electronics Lab. is part of the Electrical Engineering Department
of the Swiss Federal Institute of Technology in Lausanne (Ecole Polytechnique
FŽdŽrale de Lausanne or EPFL). It is directed by Prof.
M. Declercq in collaboration with Prof. E. Vittoz and Prof. P. Fazan. The
research team includes about 40 collaborators among which 21 Ph.D. students.
109. NRL Spacecraft Development Section
Other pages at this site that are MEMS related are;
Advanced Fiber Optic Sensing at
http://booster.nrl.navy.mil/afospg/
110.Allegro MicroSystems, Inc.
Allegro MicroSystems, Inc. specializes in the design and manufacture
of advanced mixed-signal (analog + digital) integrated circuits including
Hall effect sensors.
111. Baumer Electric, Ltd.
The product range includes: inductive and Capacitive sensors, photoelectric
sensors, light barriers, incremental and absolute encoders, counters, resolvers,
electronic hand wheels, ultrasonic sensors, pressure sensors, My-Com precision
switches, mechanical programmable limit switches, tag identification systems
and components designed to connect to the bus system AS-i (AS-Interface).
http://www.baumerelectric.com/
112. The Zeneca/SmithKline Beecham Centre for Analytical Science, Department
of Chemistry
Imperial College of Science, Technology and Medicine
South Kensington, London SW7 2AY, U.K.
This section of the Department of Chemistry was established in 1995
to cover a wide range of analytical techniques, from well established methods
like liquid chromatography or capillary electrophoresis to novel concepts
like the Miniaturized Total Analysis System (µTAS), using microsystem
technologies to integrate sample treatment, separation and detection onto
a single chip.
113. SRI Consulting, Business Intelligence Center
TechMonitoring provides continuously updated evaluations on technology
breakthroughs, alliances and new ventures, R&D funding, timetables
on the markets and commercial developments, cross matrices of the major
players and their specialization, and key applications. Monitored technology
areas of particular interest include biosensors, fiber optic communications
and sensors, micromachining, optoelectronic systems and circuits, robotics,
smart materials and solid state microsensors, among others.
http://future.sri.com/tm/tm.index.html#Techs
114. TWI, World Centre for Materials Joining Technology
TWI's Microtechnology Center is a member of the Europractice Microsystem
Project, working with the UK Manufacturing Cluster (MC3). The MC3 cluster
specializes in providing a wade range of services geared to taking microsystems
products from concept to manufacture.
http://www.twi.co.uk/home.html
115. MAZeT Online
Center for design of integrated electronic systems and components. Established
in 1992, MAZeT develops electronic components and systems for industrial
automation and communications applications. There are specialized divisions
for application-specific integrated circuit (ASIC) design, boards and software.
http://www.mazet.de/index.html
Other links on MAZeT can be found on
http://www.mazet.de/mazet_e/prod_e/index_ef_opto.html
These links include:
Forum;
IBS-Club
PCI Special
Semiconductor;
Automation Online
Actel
Altera
AMD
AMS
ATMEL/ES2
Cypress
Fujitsu Electronic Devices in Europe
IMS
Lattice
Lucent Technologies(AT&T)
MOTOROLA
QuickLogic
Texas Instruments
Thesys Gesellschaft für Mikroelektronik mbH
Xilinx
ZMD Zentrum Mikroelektronik Dresden GmbH
Partner;
SEI/Jermyn
Phoenix Contact
SICAN Hannover
GEMAC
Sigmaelektronik
Electronic Tools
Regional links;
Thüringen - Das grüne Herz Deutschlands
Erfurt informiert
Erfurt, Landeshauptstadt des Freistaates Thüringen
Kaisersaal Erfurt
Jena informiert
Thüringen Online
Thüringen Online (Ministerium für Wirtschaft und Infrastruktur
116. Research Center "VIBROTECHNIKA" at the Kaunas University of Technology,
Lithuania
RC "Vibrotechnika" was founded in 1970 as a center for basic and applied
research of Precision Engineering funded mainly by SU Space and Military
agencies. It became a main center in the former Soviet Union in the fields
of Precision and Ultraprecision Engineering based on the smart materials
like piezoelectrics, magnetostrictives, etc. The RC "Vibrotechnika" specializes
in precision positioning systems and measuring instruments.
117. J?rg Albrecht's MST/MEMS page
http://www.infotech.tu-chemnitz.de/~albrecht/mst-home.html
J?rg Albrecht's List of MST/MEMS Sites
Disclaimer: This list is not well ordered yet, and not all links have
been checked for their correctness! Hence, you might possibly encounter
outdated/moved or even incorrect dead-end links (misspellings, targeted
web-server does not exist anymore, or the like.)
http://www.infotech.tu-chemnitz.de/~albrecht/mst-sites.html
118. Laboratory for the Integration of Sensors and Actuators (LISA)
LISA is a laboratory of the Engineering physics Department of École
Polytechnique of MontrŽal, which is an affiliated school of UniversitŽ
de MontrŽal in MontrŽal, QuŽbec, Canada.
http://lisa.polymtl.ca/english.html
119. Caliper Technologies Corporation
Caliper, "The Lab on a Chip Company", utilizes microfluidic technologies
to integrate complex laboratory procedures on a microchip. Caliper's LabChipsª
will revolutionize the way biochemical information is obtained and interpreted.
Applications of Caliper's microfluidic LabChipsª include ultra high
throughput screening for pharmaceutical drug discovery, genomics, biomedical
research, clinical diagnostics and many others.
Also from Caliper
Affymetrix is dedicated to developing state-of-the-art technology for
acquiring, analyzing and managing complex genetic information for use in
biomedical research, genomics and clinical diagnostics. Affymetrix' GeneChip
technology can be used for a broad spectrum of nucleic acid analysis applications
including sequence analysis, genotyping and gene expression monitoring.
GeneChip systems will help researchers work more efficiently in their quest
to analyze genetic information and meet today's complex scientific challenges.
Aurora Biosciences Company
Aurora designs and develops proprietary drug discovery systems, services
and technologies to accelerate and enhance the discovery of new medicines.
Aurora is developing an integrated technology platform comprised of a portfolio
of proprietary fluorescent assay technologies and an ultra-high throughput
screening system designed to allow assay miniaturization.
Incyte Pharmaceuticals combine bioinformatics expertise with high-throughput
DNA sequencing to create information-based tools for drug discovery and
development. Products include genomic databases, bioanalysis software,
biological reagents, and microarray services.
Nanogen is an Electronic Bioassay company specializing in the development
of DNA diagnostics, molecular biological analysis, and biomolecular synthesis
based on a revolutionary microelectronics technology.
Orchid BioComputer, Inc.
http://www.sarnoff.com/orchid.htm
PerSeptive Biosystems
Soane Biosciences
SBio was incorporated in May, 1995 to develop and commercialize STI's
pipeline of technologies as they relate to the precise manipulation of
liquids in networks of capillary size channels on planar substrates.
120. Sarnoff Corporation
Sarnoff, a subsidiary of SRI International, is well-known for its research
and advanced development activities in electronic imaging and the key supporting
technologies. These areas include imagers and cameras, image processing
and compression, video communications, displays, solid state devices, integrated
circuit technology, microwave technology, materials science and biotechnology
- both hardware and software.
121. Journal of Microelectromechanical Systems
A joint IEEE/ASME publication dedicated to research in MEMS.
http://www.ieee.org/pub_preview/mems_toc.html
122. MEMS Optical, Inc.
This site contains information on diffractive optics, MEM systems, lenslet
arrays, medical imaging, refractive microlens arrays, shaped surfaces,
about MOI, literature and a pictoral product summary.
http://www.memsoptical.com/contacts.htm
123. Liwei Lin's web site at the University of Michigan
He is involved in design and manufacturing of microsensors and microactuators;
development of micromachining processes by silicon surface/bulk micromachining;
micro moulding process; mechanical issues in microelectromechanical systems
(MEMS) including heat transfer, solid/fluid mechanics and dynamics.
http://www-personal.engin.umich.edu/~lwlin/
124. microTEC
RMPD, a micro stereo lithography method for rapid creation of 3-D micro
structures of any shape as prototypes or for series production. RMPD facilitates
the integration of other micro components during generative growth of components
in layers of at least 1µm. This method affords entirely new perspectives
for layout and connection techniques. Micro electronic, micro optic and
micro mechanical components can be connected very simply to build complex
micro systems, e.g. CCD chips and micro lenses. microTEC manufactures micro
structures and can partner you through all phases of product
development.
125. University of Hawaii at Manoa
UHMEMS, Dr. Eun Sok Kim's Microelectromechanical Systems Lab, located
at the University of Hawaii at Manoa.
http://spectra.eng.hawaii.edu/mems/
126. Microsystems Web Page by GEMAC
Sensors
Inclination sensor (page available only in German)
Application of thick film technique for sensors
Application of piezo actuators
Selection of technologies, design and prototype production
Tools for the Simulation of Orientation Dependent Etching
SIMODE Simulation of orientation dependent etching
QSIMODE Cross-section simulation of orientation dependent etching
Determination of user specific etch rates
Micromechanics
Silicon microstructures (page available only in German)
Special wafer service
Literature and related links
http://gemac.c.ntg.de/mst_eng.htm
127. DARPA DSO
The Defense Sciences Office (DSO) is the most diverse office within
DARPA not only in mission but in character. Unlike the "systems" offices
and the other "technology" offices, each of which has a defined area of
concentration and expertise, DSO is designed to be the technological conscience
of DARPA. DSO's mission is to identify and pursue the most promising technologies
within the basic science and engineering research community and develop
them into new DoD capabilities. DSO personnel draw on expertise from many
elements-industry, academia, government laboratories, small businesses,
and individuals. The scope of the work funded under DSO spans the research
and development spectrum from conception to production.
http://web-ext2.darpa.mil/DSO/
128. Honeywell
LIGA-Based Tunable Optical Filters for Multispectral IR Imagers and
Gas Analyzers
http://www.htc.honeywell.com/projects/mems/
129. SARCOS
Sarcos is an established research and development organization with
over 15 years of experience in designing and building innovative robotic
systems, medical devices, and micro-systems for practical applications.
Sarcos Companies are unique in that they conduct research and development
from both a biological and engineering perspective to produce systems unsurpassed
in terms of human emulation and dexterous manipulation. An emphasis has
been placed on designing specialized systems to fulfill a specific need.
As a result Sarcos has built a strong reputation as a reliable and customer-oriented
technology group.
130. Veeco
Veeco Instruments Inc. is a leading worldwide manufacturer of precision
Ion Beam Etching and Deposition Process Equipment, Process Metrology, Leak
Detection and X-Ray Fluorescence systems used in the fabrication of microelectronic
components. The Company's global customer base is comprised of leading
manufacturers of mass memory storage devices, semiconductors and flat panel
displays, as well as a broad range of industrial products, which Veeco
serves from 15 facilities in the U.S. Europe and Asia-Pacific.
http://www.veeco.com/corporate.profile.html
131. Swedish Royal Institute of Technology, Department of Signals, Sensors
and Systems, Instrumentation Laboratory
The Instrumentation Laboratory is a part of the Department of Signals,
Sensors and Systems and conducts education in the area of electrical measurements
and sensor technology. The research activities are focused on two main
areas, silicon sensors and fibre optic sensors.
http://www.s3.kth.se/instrlab/staff/wouterw.html
132. GRASP Lab, University of Pennsylvania
The General Robotics and Active Sensory Perception GRASP Laboratory
is an interdisciplinary laboratory located in the Department of Computer
and Information Science in the School of Engineering and Applied Science
at the University of Pennsylvania. The GRASP Laboratory is directed by
Dr. Ruzena Bajcsy and is dedicated to research and education in robotics
and computer vision.
http://www.cis.upenn.edu/~grasp/home.html
Suresh G. K. ANANTHASURESH
Assistant Professor of Mechanical Engineering & Applied Mechanics
The University of Pennsylvania
http://www.seas.upenn.edu/~gksuresh/#research
133. Twente MicroProducts
Twente MicroProducts performs custom design, prototyping and production
of microsystems and
microtechnological components. Twente MicroProducts has established
a special arrangement with Philips,
gaining full access to high volume production facilities. This unique
combination offers ISO 9001 qualified
high volume production (100.000 6" wafers / year) of fully packaged
systems combined with expertise in OEM design and prototyping
134. The Microsystems Technology Program (PMT) was established in 1992.
About 250
scientists and technicians in seven institutes and main departments
of the
Forschungszentrum Karlsruhe are engaged in the following research areas:
Microstructuring technologies
Materials and effects
Systems technologies
Chemical microanalysis systems
Physical microsensors and -actuators
Microoptics
Microprocess engineering
Manufacturing technologies for microsystems
and within the main activity Medical Technologies microsystems and micro
components are developed for medical applications
http://www-pmt.fzk.de/Frames/frhome_e.html
135. CMP, Circuits Multi-Projects
CMP is a broker in Integrated Circuits, MEMS and MCMs fabrication for
a number of technologies for prototyping and low volume production. ICs,
MEMS and MCMs are fabricated for Universities, Research Laboratories and
Industrial Companies.
http://tima-cmp.imag.fr/CMP/CMP.html
136. Microcosm Technologies, Inc.
A provider of CAD software and services for the MicroElectroMechanical
Systems (MEMS) industry. They offer a broad solution set for MEMS design,
system simulation, manufacturing analysis, and packaging. This site also
has links to many other sites of interest.
MEMCAD Home Page
MEMCAD is a project to develop CAD systems, techniques and algorithms
for Microelectromechanical Systems. Groups involved at MIT are; the Senturia
Group, the White Group and the Schmidt Group. Sandia is also involved.
http://www-mems.mit.edu/projects/MEMCAD.html
137. Materials Research Society
Materials Research Society is dedicated to goal-oriented basic and applied
research on materials of technological importance. MRS emphasizes an interdisciplinary
approach to materials science and engineering, inspiring cooperation among
scientists from industry, academia, and government
138. Industrial Microelectronics Center
IMC combines the need for expertise in technology and market demands,
to make research findings available quickly in competitive products. This
also has links to other MST sites.
139. IMFT Institut für Feinwerktechnik , Technische Universit?t Wien
(In German)
Das Institut für Feinwerktechnik der Technischen Universit?t Wien unter
der Leitung von Univ.-Prof. Dr. H. Detter sieht seinen besonderen Schwerpunkt
seit jeher in dem Transfer und der Applikation von feinwerktechnischem
Know-how für die?sterreichische Industrie. Seit 1991 wurde der Bereich
Mikro(system)technik aufgebaut, wo das IFWT in Österreich Alleinstellungsmerkmal
aufweist und mit zahlreichen namhaften internationalen Institutionen kooperiert.
140. SUSS
SUSS is a leading semiconductor equipment manufacturer, supplying process
and test equipment to the semiconductor industry, including
Spin Coaters for wafers and substrates
Mask Aligners for microlithography
Substrate Bonders for Microsystems Technology production (MEMS)
Flip Chip Bonders for advanced packaging
Probe Systems for failure analysis and testing
141. What Is...smart matter (a definition)
This page defines 'smart matter,' provides a brief overview, and lists
research organizations and companies that develop or make micro-electromechanical
products. It also contains some links to related sites.
http://whatis.com/smartmat.htm
MUMPs (multi-user MEMS processes)
MUMPs is a program that assists companies and academic researchers with
ideas for micro-electromechanical systems (MEMS) to manufacture prototypes.
Since the manufacture of silicon chips in which MEMS are imbedded is costly,
MUMPs provides special manufacturing "runs" that qualified enterprises
can be part of. MUMPs is administered by the MEMS Technology Application
Center (MCNC). A MEMS Technet and MUMPs Newsletter is available.
142. MEMS Strategic Research Programme, Nanyang Technological University,
Singapore
The Center of MEMS in NTU (Nanyang Technological University, Singapore)
aims to be a Center of expertise in Asia and to support MEMS-Technology
in Singapore. This site also has a good list of other sites.
http://www.ntu.edu.sg/home/mgkjurgen/index.html
143. am-Trung Nguyen's Yellow Pages
Microsystem Technology Yellow Page . Select the first letter of the
item of which you would like to look up information. This is an excellent
list of related web sites.
http://www.tu-chemnitz.de/~ntn/yellow.html
144. OSA Optics Net
Optics and photonics research, applications, and industry news
145. Miura-Shimoyama Lab
Department of Mechano-Informatics, The University of Tokyo
http://www.leopard.t.u-tokyo.ac.jp/
146. Institute for Defense Analysis MEMS Technology Transfer
Sponsored by DARPA
This site identifies transition opportunities for MEMS technology into
defense systems.
147. Coyote Systems
Coyote Systems provides a set of 2D and 3D computer aided Modeling and
analysis tools for the design of micro electro mechanical systems (MEMS).
These tools employ the technology based on the boundary element method.
148. InterScience, Inc.
Founded in 1980, InterScience performs technology-based contract research
and development. The staff includes specialists with advanced degrees in
a variety of physical sciences and engineering disciplines. They work together
as interdisciplinary teams to develop and commercialize wide ranging practical
applications of advanced technology. Current projects involve plasma physics,
electro-optics, microelectromechanical systems (MEMS), image processing,
design and implementation of digital and analog electronic systems, and
other areas of science and engineering.
http://www.intersci.com/intro.htm
Micro-Opto-Electro-Mechanical Systems (MOEMS)
http://www.intersci.com/p3moems.htm
149. International Conference on Modeling and Simulation of Microsystems,
Semiconductors, Sensors and Actuators
150. Tanner EDA
Tanner develops tools for IC, MCM, and MEMS design. Chips designed from
this library can be fabricated by a variety of vendors in double-metal
CMOS-bulk technologies ranging from 2µm down to 0.8µm. The
library supports MOSIS design rules and a variety of vendors including
AMI, ES2, Hewlett-Packard, Orbit Semiconductor, US2, and VLSI Technology.
The designs are compatible with MOSIS, a silicon brokerage service that
can return prototype chips in seven weeks for as little as $520.
151. SEMI
An international trade association serving the semiconductor and flat
panel display industries.
152. Aclara BioSciences, Inc.
Microfluidic devices for genetic analysis, drug screening and optimization,
and clinical diagnostics. These areas require analytical processes to be
implemented at industrial scale, with large numbers of samples being processed
in parallel. Most of these analytical processes can be miniaturized and
integrated by microfluidics, thereby providing order-of-magnitude or greater
cost reductions and efficiency improvements on several levels.
http://www.aclara.com/comp.htm
153. Office of Naval Research
ONR MEMS Component Database
The information at this web site is provided as a convenience for the
research community. The Office of Naval Research (ONR) does not guarantee
the accuracy of the data contained within. This database is for information
purposes only and does not imply endorsement by the U.S. Government or
any of its departments and agencies, including ONR.
http://www.onr.navy.mil/ctipmems/
Broad Agency Announcements and Other Funding Opportunities
http://www.onr.navy.mil/02/baa/default.htm
154. DoD Commercial Operations and Support Savings Initiative (COSSI)
The mission of the Commercial Operations and Support Savings Initiative
(COSSI) is to develop and test a method for reducing Department of Defense
(DoD) Operations and Support (O&S) Costs by routinely insert commercial
items into fielded systems.. Selected proposers will develop, manufacture,
and deliver prototype "kits" to the military for installation into a fielded
DoD system. Each kit will consist of a commercial item, or a combination
of commercial items, that has been adapted, qualification-tested, and readied
for insertion or use in a fielded military system.
http://www.acq.osd.mil/es/dut/
155. Fluid Dynamics Links
This service is an informal listing of current links to sites of interest
to students and researchers in fluid dynamics. It is permanently under
construction. It contains links to;
Links to Links
Journals
Magazines
Weather and Climate
Instructional Material
Data Sources and Projects
Professional Organizations
Federal Research Funding Agencies
Key Government Sites
Individual Sites
Jobs in Fluid Dynamics
http://www.princeton.edu:80/~gasdyn/fluids.html
156. Center for Integrated Space Microsystems, NASA Center of Excellence
The goals of CISM are to;
Develop and maintain a world class, leading edge capability in advanced
avionics systems and advanced microelectronics technologies for future
highly integrated, miniaturized, autonomous spacecraft for deep-space and
Earth orbiting missions.
Establish and maintain a world class, leading edge facility for the
design, development, rapid prototyping, and integration of highly capable
autonomous microsystems that include all spacecraft electronics and photonics.
Establish and maintain world class program to research revolutionary
computing architectures that will take us beyond the limits of semiconductor
technology scaling, e.g. quantum computing, holographic storage, optical
communications, etc.
157. Lucas NovaSensor
Lucas NovaSensor, is a business of Lucas Control Systems, which is part
of Lucas Varity's Electrical and Electronic Systems division, a supplier
of advanced electronics, wiring systems and electric systems.
158. Dartmouth College -- Thayer School of Engineering
The Dartmouth Solid State Microengineering Laboratory includes class
100 and 1000 cleanroom laboratories, located in room 223 of Cummings Hall
at the Dartmouth College Thayer School of Engineering in Hanover, NH, 03755-8000.
Currently funded research includes applications in microelectronics, micromachining,
and binary optics. Equipment is available for photolithography; e-beam
lithography; wet chemical processing; film deposition and processing; analysis;
and design, layout, and simulation.
http://hypatia.dartmouth.edu/levey/ssml/home.html
159. University of California, Irvine, Microtechnology & Manufacturing
Laboratory (UCI MML)
The MML is equipped to support research and development, prototyping,
and small-scale manufacturing in the areas of (1) silicon and compound
semiconductor microelectronic devices, (2) silicon micromachining, and
(3) microscale fabrication. The MML
http://www.eng.uci.edu/~top/micro.htm
Electro-optical detectors, Microelectromechnical Systems (MEMS) and
Laser processing
160. SENSEON
Motorola's SENSEON sensors family provides a portfolio of silicon micromachined
smoke IC, pressure, and acceleration sensors.
http://design-net.com/senseon/senseon.html
161. LISA
Information on the Laboratory for the Integration of MEMS Sensors and
Actuators Department of Engineering Physics at Ecole Polytechnique de Montreal
conducted by Professor John F CURRIE. LISA is involved in four principal
research domains which are not separated with walls. In fact, work done
in a field solves problems encountered in another research pursued. Those
research themes are high-speed microelectronics, gas sensors, physical
sensors and micro-electro-mechanical systems, materials science. Project
areas include;
High-speed microelectronics
InP-based III-V Devices
Gas sensors
Gas Sensors and Membranes
Physical sensors and micro-electro-mechanical systems
Magnetic Sensors
MEMS: Micro-electro-mechanical Systems
SAW
Materials science
GaAs
Porous Silicon
SiN
TiN
http://lisa.polymtl.ca/english.html
162. Department of Electrical and Computer Engineering , The University
of Texas at Austin.
Experimental Operation of the Quantum Well Injection Transit Time (QWITT)
Diode.
DC and microwave characteristics of different QWITT structures are discussed.
Quantum well oscillators have been shown to be capable of generating power
at high millimeter wave frequencies [1, 2], and there has been expectation
that these devices could serve as a useful local oscillator at frequencies
between 100-1000 GHz. However, there has been considerable debate over
the quantum well device structures that must be used to maximize the output
power obtained from these devices.
http://weewave.mer.utexas.edu/MED_files/MED_research/RTDs_QWITTs/QWITT_DC_RF/qwitt_dc_rf.html
There are also links and resources for MEMS related information at
http://weewave.mer.utexas.edu/MED_files/MED_research/refs/mems_refs.html
163. ERL MEMS Interconnect Design
They are investigating MEMS designs for applications in high bandwidth
optical routing, optical scanners and laser radar, and high speed digital
switching and RF electrical signal routing.
164. The Center for Microelectronic Sensors and MEMS (CMSM) at the University
of Cincinnati
This center is equipped with facilities to research the design, fabrication,
and characterization of Micro-Electro-Mechanical Systems (MEMS) structures
and devices on chips with integrated circuits. Three core faculty members
(and several inter departmental associates) are working together on MEMS
research, including 25 graduate students plus another 10 students in affiliated
departments and colleges. Recently, the CMSM has been awarded a DARPA project
of $2.6 M for the development of MEMS-based microfluidic systems and remote
sensors.
http://dolphin.eng.uc.edu/index.html
165. HEDCO Microengineering Laboratories University of Utah College
of Engineering.
The HEDCO Microengineering Laboratory is a central micro engineering
cleanroom facility for the University of Utah and participating industrial
partners. The facility includes over 5500 square feet. of class 100 - class
10,000 cleanroom space as well as state-of-the-art processing equipment
for conducting research in a wide variety of microengineering related areas.
http://www.bioen.utah.edu/hedco/
166. The MOSIS Service, Information Sciences Institute, University of
Southern California.
MOSIS is a low cost prototyping and small-volume production service
for VLSI circuit development. Since 1981, MOSIS has fabricated more than
32,000 integrated circuit designs for commercial firms, government agencies
and universities.
167. Technical University of Berlin, Microsensor & Actuator Technology
Center.
The Microsensor & Actuator Technology Berlin (MAT) is part of the
research unit "Microperipheric Technologies" of the Technical University
of Berlin and was founded in 1987. Prof. Dr.-Ing. E. Obermeier is the head
of the MAT. Today more than 30 research scientists are working on the field
of sensor and actuator development. Main topics are the development and
realization of sensors for measurement of pressure, force, acceleration,
temperature, humidity, gas flow and gas concentration. Modern computer
aided design methods (like FEA) are used to optimize the sensor characteristic.
The cleanroom facilities include standard CMOS processes and numerous special
processes, e.g. anisotropic etching, electrochemical etching and anodic
bonding. Computer controlled test systems are used to characterize the
devices.
http://www-mat.ee.tu-berlin.de/
168. The MISTIC TCAD Home Page.
MISTIC (Michigan Synthesis Tools for IC's) is a planar process compiler
for thin-film and micromachined devices. This tool automatically generates
fabrication process flows starting from a two-dimensional geometrical device
description. The synthesis method used is based on topological sorting
techniques which find all possible flows for the device. An optimal flow
is selected which maximizes the device yield.
169. University of Southampton Microelectronics Centre MEMS Group.
The Microelectronics Center at Southampton University has been in existence
for about 20 years. Sensors research has always been a key point of their
activity and in the last 15 years micromachined "MEMS" devices have formed
an important research area. They have made a variety of micromachined devices
in collaboration with other University researchers and Industry.
http://www.mems.ecs.soton.ac.uk/title.htm
170. University of Heilbronn, Department of Electronics and Mechatronics,
Study of Micro and Precision Engineering. Micro- and Precision Engineering
http://www.fh-heilbronn.de/MFT/welcomee.htm
171. "A Survey of Micro-Actuator Technologies for Future Space Missions"
by Roger A. Gilbertson and Ron D. Busch, Presented at the conference "Practical
Robotic Interstellar Flight: Are We Ready?", August 29 - September 1, 1994
New York University and The United Nations, New York City.
http://nanothinc.com/nanosci/microtech/mems/ten-actuators/gilbertson.html
172. TABATA Lab.
This laboratory is aiming at establishment of process and instrumentation
technologies in the region of micrometer and nanometer scales, together
with application to micrometer and nanometer scale machines. The research
fields:
Micromachining technology
Instrumentation and Evaluation technology
Application to MEMS (Micro ElectroMechanical Systems)
http://www.ritsumei.ac.jp/se/~tabata/index-j.html
173. The Catholic University of Louvain, Belgium
This site contains information about microsystem technology work in
general, and micro electro discharge machining in particular.
http://www.mech.kuleuven.ac.be/mech_en.html
174. Spraychip Systems Corp.
SprayChip Systems Corp. specializes in engineering and producing precision
micromachined spray devices. The main advantage of these spraychip products
is much better control of critical spray parameters than conventional spray
devices can offer.
These web pages are currently in development but a company description
and contact information is given.
175. Microtechnology Center, University of Minnesota
The Microtechnology Laboratory (MTL), is an interdisciplinary facility
that supports faculty and industrial research within the Institute of Technology
to support education, research and industrial collaboration in microelectronics
and other related research involving microfabrication. Some of the current
technologies being researched at MTL are surgical microinstruments and
bioanayltical microsystems
http://www.mtl.umn.edu/index.msql
U of M MEMS-Program
The University of Minnesota Center for Micro Electro Mechanical Systems
(MEMS) was formed in 1992 through NSF funding to provide multi-disciplinary
education and research infrastructure development in MEMS.
http://www.ee.umn.edu/groups/mems/
176. Draper Laboratory
Draper is as an independent, not-for-profit laboratory engaged in applied
research, engineering development, advanced technical education, and technology
transfer. They are involved in ultra miniature microphones, accelerometers,
guidance, navigation, and control, electronic design and sensor development.
http://www.draper.com/capabilities/mems_alt.htm
177. CFD Research Corporation
CFDRC provides advanced software tools for modeling, simulation, and
design of MEMS. Their software has been used for the analysis of a wide
variety of physical phenomena such as fluid flow, heat transfer, combustion,
and fluid-structure interaction. Industrial applications include MEMS,
electronics packaging, semiconductors, turbomachinery, and automotive engineering.
MCNC also provides information on CFDRC in their TechNet section at
http://mems.mcnc.org/technet/cfd.html
178. Alcatel
Alcatel Comptech produces thin film systems for selected deposition
and etch applications in the thin film head and microsensor markets. They
make deep Si etch equipment for MEMS fabrication.
http://www.alcatelthinfilmsystems.com
179. Microfabrication Applications Laboratory (MAL) at the University
of Illinois at Chicago
MAL is a research and development laboratory dedicated to the application
of integrated circuit and fiber optic technology to improve manufacturing
methods for microfluidic, electromechanical, mechanical, chemical, optical
and multi-functional devices, some of which have previously been built
by more traditional techniques.
180. IntelliSense Corporation
IntelliSense Corporation provide MEMS and micromachine based solutions.
They provide custom micro-silicon micro-optics solutions for a wide range
of applications. In addition, they develop and provide CAD tools for the
design and modeling of MEMS.
181. MEMS Laboratory at DalTech
182. Research Triangle Institute
RTI helps coordinate technology briefings and workshops that are designed
to initiate commercialization of promising technologies. These events provide
a forum for industry to discuss technical and licensing issues with technical
and legal staff. Briefings are your best opportunity to investigate every
aspect of a technology that could enhance your business. Some briefings
are held as stand-alone events, and some are held in conjunction with industry
trade shows.
http://www.rti.org/technology/tbrief/
This page also contains a link to the Glennan Initiative - NASA Lewis
Research Center / Case Western Reserve University
The Glennan Microsystems Initiative is a unique public-private partnership
that addresses the research, development, and application needs of NASA
and industry in the field of microfabricated sensors and actuators. The
Initiative will focus on physical/chemical sensors and actuators with a
particular emphasis on harsh environments. Examples of such environments
include high temperatures and pressures, large stresses/strains, large
vibrations, rotating parts and corrosive media. The Initiative will develop
prototype microsystems for manufacturing and technology intensive companies
and for NASA to meet mission requirements.
http://www.rti.org/technology/tbrief/dsp_abstract.cfm?AutoID=3
183. TIMA MiCroSystem Group Homepage
The MiCroSystem Group (MCS) within TIMA laboratory, in Grenoble - France,
is involved in the development of manufacturing techniques and CAD tools
by the wish to make microsystems accessible to non-specialized institutions.
In addition, the MCS group answers to the needs of the industry in the
design of microsystems for safety critical and harsh environment applications
targeting mainly medical, aerospace and high temperature domains. The MCS
group collaborates extensively with both industry, research laboratories
and universities, and emphasis on the ability to work on medium term industrial
projects.
http://tima-cmp.imag.fr/tima/mcs/mcs.html
184. Paratronix
Paratronix is a supplier of parylene conformal coating service and machinery.
Parylene coating is a specialized process used to apply a thin coating
of parylene polymer to the irregular surfaces of plastic or metal products.
This process uses the dimer form of parylene and then converts it to a
monomer by pyrolysis. The parylene is vacuum deposited on the part and
coated as a polymer. The coating thickness is controlled by pressure, temperature,
and the amount of dimer used. This coating is used both to strengthen syntactic
foam parts and, in some applications, slow down the water adsorption rate
on molded desiccant products.
http://www.paratronix.com/index.htm
185. "Future Applications of Micro/Nano-Technologies in Space Systems"
By A. Martínez de Aragón Technical Directorate, Systems and Programmatics
Department, System Studies Division, ESTEC, Noordwijk, The Netherlands
The reduction of costs for a given performance is a major goal of space
systems technologists. Extreme miniaturisation, by reducing the levels
of resources required, is a possible solution. Micro/nano-technologies
allow the production of multiple types of microdevices and their integration
into microsystems, resulting in application-specific integrated microinstruments.
In recognition of their importance, ESTEC and Industry held a Round Table
on Micro/Nano-technologies for Space. Based on the conclusions and recommendations
made at the meeting, activities are proposed to gradually introduce these
technologies in space-based systems.
http://esapub.esrin.esa.it/bulletin/bullet85/mart85.htm
186. Frost & Sullivan
Frost & Sullivan Market Engineering Newsletters provide a source
of strategic information and ideas. The newsletters are focused on the
strategic implications of market trends, technologies, and measurement
trends in the industry. Their worldwide consulting teams work on a real
time basis to provide strategic insights, ideas, and recommendations to
their subscribing clients. Searching their site for "mems" gives many market
surveys that are available on line.
http://www.frost.com/newsletter/
187. Distributed Microsystems Laboratory, University of Kentucky
Distributed Microsystems at the University of Kentucky are about:
Arrays of sensors containing many, many component sensors
Many sensing nodes containing such arrays of sensors
The biologically inspired design and fusion of sensing nodes
Signal processing split hierarchally between sensing plane and base
Simultaneous tracking and interpretation of stimuli using these nodes
188. Standard Microsystems Corporation
MEMS Production at SMSC's Wafer Foundry
A 2 micron CMOS production line forms the base process for the high-volume
production of microelectromechanical systems. Sensors, actuators, and other
structures built on silicon can take the step from university-developed
prototypes to commercialized production devices. In just the past five
years SMSC has produced over 20 million MEMS - type devices. They work
with customers to develop processes specific to their devices.
http://www.smsc.com/foundry/mems.html
189. University of Louisville MicroFab Home Page
The Microfabrication Laboratory is utilized for both research and instructional
purposes. It provides an environment for teaching both the fundamental
and current fabrication techniques used to manufacture integrated circuits
(ICs), discrete microelectronic devices, MEMS devices such as sensors and
actuators, and various electro-optic devices.
http://mitghmr.spd.louisville.edu/
190. The MicroOptical Corporation, Optical MEMS Research
The MicroOptical Corporation is presently engaged in contracts with
the Department of Defense for the development of optical micro-electromechanical
systems (MEMS). Optical MEMS technology can be used to reduce optical systems
to integrated circuit scale. MicroOptical's interest is in the development
of a highly miniature scanning display system for concealment with in eyeglasses.
http://www.microopticalcorp.com/mems.htm
191. MEMS Exchange
The MEMS Exchange coordinates a network of fabrication and design centers
enabling users to draft a process sequence which crosses the boundaries
separating the individual facilities, and is a service made available to
the United States community (including commercial, academic, and government
organizations) with support from the Defense Advanced Research Projects
Agency (DARPA).
192. Advanced Custom Sensors, Inc. (ACSI)
ACSI offers foundry services in MEMS packaging and product commercialization.
193. Coyote Systems
Coyote Systems provides a complete set of 2D and 3D Computer Aided Modeling
and Analysis tools for the design of MEMS. These tools employ technology
based on the boundary element method.
194. Analog Electronic
Analog Microelectronics offers custom specific solutions for systems
in the area of pressure and distance measurement. Basic technologies are
MEMS, ASICs, and hybrids. Analog Microelectronics also distributes standard
products. These standard product area includes pressure transducers (calibrated,
compensated, media compatible) and a wide range of sensor signal conditioning
standard ICs.
Institute for MEMS and VLSI Technologies, George Washington University
http://www.seas.gwu.edu/seas/institutes/mems/index2.html
196. Nielsen Engineering & Research (NEAR)
They provide aerodynamics analysis and design expertise through consulting
services and software licenses. NEAR's specialties include launch vehicle
aerodynamics, missile aerodynamics, and store separation. NEAR's R&D
division specializes in fluid dynamics, CFD, turbulence modeling, MEMS
design, and information technologies related to aerospace applications.
197. MEMS Optical Inc
MEMS Optical Inc provides fabrication, design, and product development
of diffractive optics, refractive microlens arrays, and micro-electro-mechanical
systems (MEMS), including SLM (Spatial Light Modulators), deformable mirrors,
shutters, micro-antennas, relays, and accelerometers. Also, medical imaging
and diagnosis software.
http://www.optoelectronics-world.com/vsd/vsdco/memsopt.html
198. Complex Systems/Bioelectronics (Uchikawa, Furuhashi Laboratory)
Bio-Electronics Laboratory, Dept. of Information Electronics
Nagoya University, Nagoya 464-01, JAPAN
http://www.bioele.nuee.nagoya-u.ac.jp/index-e.html
199. Experimental Aerodynamics Research Group at the University of Florida
They are conducting an investigation of the use of Micro Electro Mechanical
Systems (MEMS) to control the low Reynolds number flows about Micro Air
Vehicles (MAVs) MAVs are defined as air vehicles with characteristic lengths
less than 6 inches. The Reynolds numbers for these flows are less than
100,000. Anticipated benefits from this research are improvements in MAV
aerodynamic performance as well as the development of mechanisms for vehicle
flight control. See their pointer to mav_mems at the following address.
http://www.aero.ufl.edu/~bfc/index.html
200. Microphotonics Lab Home Page
Dept. of Electrical and Computer Engineering
University of California, Davis
The UC Davis Microphotonics Lab is involved in optics and microfabrication
research. They specialize in the following areas:
MicroElectroMechanical Systems (MEMS), with emphasis on applications
in displays, fiber-optic communication systems, and optical measurement
instrumentation
Opto-electronic materials and their applications
Electrooptics, integrated optics and optical fabrication technology
Optical communication systems
Optical applications in biology and biomedical engineering
Ultrashort pulse nonlinear optics
Femtosecond Optical Pulse Shaping
Nonlinear Fiber Optics
Ultrafast Nonlinear Optics of Materials
Applications of Femtosecond Technology to Advanced Communications Networks
http://www.ece.ucdavis.edu/~cornett/research/
201. University of Illinois at Urbana-Champaign
Microelectronics Laboratory
Research Areas:
Optoelectronic Integrated Circuits
GaAs & InP-based FETs
Long Wavelength Photodetectors
Gallium Nitride
Quantum Effect Devices
Silicon Germanium
Advanced Processing
http://www.cen.uiuc.edu/~a-ping/ccsm.html
202. Sheffield Hallam University
Micro-Electro-Mechanical Systems Unit
Sheffield Hallam University Micro-electromechanical Systems (MEMS) Unit,
based in the School of Engineering and was established in June 1998 following
the arrival of Prof. R.B. Yates. The group has a Class 1000 clean room
dedicated to the fabrication of sensors and actuators. A dedicated RF sputterer
is used to produce magnetoelastic materials and sol gel technology to produce
high quality films of PZT. Both are key components for next generation
actuation. The School also has extensive facilities for the growth and
charaterisation of Langmuir Boldget films.
http://www.shu.ac.uk/schools/eng/research/eit/microsys/mems/index.htm
203. MEMS sites
Research Centers in Spain
The Institute of Applied Physics (IFA) is a Research Center in the field
of Physical Technology dependent of the Spanish Council for Scientific
Research (CSIC).
http://www.ifa.csic.es/isens.htm
204. Faraday Foresight
This site includes details on Faraday Foresight's current projects and
particularly its work with the SMIDGEN Consortium. SMIDGEN is an international
consortium that is accelerating the commercial exploitation of micro components
and micro systems in the UK. It brings together companies and research
organisations to raise technological awareness and market opportunities.
A bulletin-board and news service for members of the SMIDGEN Consortium
and other interested parties will also be provided.
The New Site is expected to be live in November.
http://www.faradayforesight.co.uk/
205. Institute for Micro System Technology, Freiburg University, Germany
(in German)
This is a very new Institute and part of Freiburg University. It will
have 14 Professors specializing in MEMS technology. Right now there are
about 5 Professors with their research groups building up the department.
http://www.ruf.uni-freiburg.de/univ/3w/fakults/angewandt/mst/
206. NSLS DXRL HomePage
Ultra Deep X-ray Lithography Beamline (x27b) at NSLS (National Synchrotron
Light Source, Brookhaven National Lab.
http://www.nsls.bnl.gov/BeamRD/Chris/x27home.html
207. The Fraunhofer Institute for Reliability and Microintegration FhG-IZM
in Berlin, Germany develops advanced packaging technologies for microelectronic
and microsystems applications.
208. Mikroelektronic Center, The Technical University of Denmark (DTU)
209. Silicon Designs, Inc.
Silicon Designs, Incorporated (SDI) designs and manufactures micro-machined
capacitive accelerometers, sensors, and microprocessor based systems for
commercial, industrial, and military acceleration, vibration, and shock
measurement.
http://www.silicondesigns.com/
210. Technische Universitat Ilmenau, Institut fur Mikrosystemtechnik
The object of the Mikroelwktronik Centret is to establish a Danish education
and research center of excellence within microtechnologies.
http://www.maschinenbau.tu-ilmenau.de/mb/mb.htm
211. University of Alberta Micromachining Laboratory
This laboratory has concentrated its research on the investigation of
commercially produced CMOS Micromachined Devices and sensor systems, and
the exploration of possible applications for specific devices. This involves
the analysis of detailed characterization measurements of material properties
and the performance and reliability of these devices and systems.
http://www.ee.ualberta.ca/mm/mm.html
212. CNRI
The Corporation for National Research Initiatives (CNRI) undertakes,
fosters, and promotes research in the public interest. The activities center
around strategic development of network-based information technologies.
CNRI is a not-for-profit organization. CNRI is also establishing a distributed
processing environment, called the "MEMS Exchange" (see 212), which is
composed of multiple, geographically dispersed MEMS fabrication facilities
located around the country.
213. EDTN
The Electronic Design, Technology and News Network
214. Analog Technologies, Inc.
Analog is the developer of the Saber analog and mixed-signal simulator.
Saber can be used in IC- through system-level simulation of analog, mixed-analog/digital,
and mixed-technology devices. The simulator includes MAST, the EDA industry's
de facto standard mixed-technology hardware description language. Designers
access Saber through the highly interactive SaberDesigner suite of graphical
tools. Their goal is to provide design engineers with the simulation tools.
In addition to continually upgrading Saber, they have teamed the simulator
with leading simulation products in the digital, mechanical and systems
arenas.
http://www.analogy.com/about/what.htm
AutoMM for Saber is a tool available from Analogy's partner, Microcosm
Technologies, that generates models for the Saber simulator from finite
element method (FEM) and boundary element method (BEM) simulations. This
technology automatically incorporates the accuracy of the MEMCAD 3D simulator
into MAST models, supports model-based design methodologies, and facilitates
effective communication between MEMS device designers and ASIC/IC designers.
With AutoMM for Saber and the Saber simulator, the system-level effects
of physical design changes in a MEMS device can be determined.
http://www.analogy.com/products/prod.htm#AutoMM
215. The Microsystems Resource Center
A comprehensive, searchable microsystems database. These pages have
been compiled as part of the EMSTO project which is sponsored by NEXUS
(The European Network of Excellence on Multi-Functional Microsystems)
Instructions for requesting a password can be found at
216. Micromet Instruments
Founded in 1982 by an MIT research group, Micromet Instruments is a
supplier of dielectric measurement instrumentation to the polymer processing
industries. The primary application of Micromet's instrumentation is the
in-process cure monitoring of thermosetting resins and composites. Other
applications include monitoring the drying, curing, and diffusion properties
of paints and coatings, and the analysis of oils and lubricants. Micromet
instrumentation utilizes sensors which may be located in actual processing
environments enabling measurements to be made in presses, autoclaves, ovens,
and other processes. Micromet's various product lines are used for laboratory
analysis, process development, QA/QC testing, and real-time process control.
http://www.micromet.com/index.htm
217. Cepheid Incorporated
The integration of advanced microinstrumentation and micromachining
technologies with complex diagnostic systems forms the base on which Cepheid
was founded in early 1996. Cepheid's goals are, first, to dramatically
reduce the size and increase the speed of key diagnostic instrument components
and subsystems by combining the benefits of micromachining technology with
recent advances in instrument technology; then, to design and produce fully
integrated bioanalytical test systems, with broad market applications ranging
from human infectious disease and cancer diagnostics, food quality testing,
and environmental testing, to research and development activities in molecular
biology.
218. Plasma-Therm
Plasma-Therm is engaged in the design, manufacture, support and sales
of thin film etching and plasma deposition systems. Plasma-Therm sells
this equipment directly to manufacturers of:
Photomasks (semiconductor)
Thin film heads (disk drive)
Optoelectronics/telecommunications devices (compound semiconductor)
Microelectromechanical (MEMS) devices
The industrial research & development community
219. Karl Suss
Suss is a manufacturer and supplier of precision microelectronics equipment
for the manufacturing and R&D environments. These include mask aligners,
bonders, flip chip bonders, spin coaters and probe systems for the MEMS,
advanced packaging and semiconductor markets.
220. ENOPTIK Mikrotechnik GmbH
ENOPTIK selps commercialization in microsystem technologies by developing
and producing X-ray exposure systems for the LIGA technique and hot embossing
machines. They do not only deliver complete production systems but act
as partners for microsystem technology applications, component fabrication,
training and project management of projects in microsystem technology.
http://www.jo-mikrotechnik.com/
Integrated Sensing Systems (ISSYS)
ISSYS develops and produces pressure and flow sensors and sensing systems.
Their products provide high accuracy, small sizes, and corrosion resistance.
222. Center for Applied Technology (CAM)
CAM is a joint activity of the University of Washington and the Washington
Technology Center. It provides education for, and supports technology based
research, promoting microtechnology and the microtechnology industry in
Washington state.
http://www.engr.washington.edu/~cam/
223. Instrumentation Laboratory at the Royal Institute of technology,
Stockholm, Sweden.
The Instrumentation Laboratory is a part of the Department of Signals,
Sensors and Systems and conducts education in the area of electrical measurements
and sensor technology. The reasearch activities are focused on two main
areas, silicon sensors and fibre optic sensors. The major research field
at the Instrumentation Laboratory is Microelectromechanical Systems (MEMS)
with a special focus on applied sensor technology in silicon based on microelectronics
fabrication techniques and micromachining of silicon. A significant number
of new devices have been fabricated with promising performance.
http://www.s3.kth.se/instrlab/research/
224. Advanced MicroMachines Incorporated, AMMi
AMMi designs, develops, and produces microsystems for high-value-added,
high-performance sensor and actuator markets. Its products are based on
microelectromechanical systems (MEMS) technology.
http://www.memslink.com/index.html
225. Microvision, Inc.
Microvision is a developer and supplier of electro-optics technologies
that enable the development and manufacture of high performance visual
displays, image scanners and related products. Virtual Retinal Displayª
(VRDª) technology is the key innovation that Microvision has targeted
to dominate the personal display category.
226. The Tel-Aviv University MEMS Group
The MEMS program at Tel-Aviv University is based on basic and applied
research. The basic research is dedicated for new sensing mechanisms for
MEMS, and includes two general directions:
Suspended Optical Waveguide Displacement Sensors (SOWDS).
Direct Integration (DI) of solid-state stress sensors with single crystal
MEMS.
The applied research is dedicated to the following directions:
Application in fluid dynamics: for example arrays of flow sensors.
Applications in acoustics: for example arrays for acoustical sensors.
Applications in medicine: for example Bio-chip, and micro-sensors and
micro-actuators implants.
http://www.eng.tau.ac.il/~haronian/mems.html
227. Caliper Technologies Corp.
Caliper Technologies designs and manufacturers LabChipsª and Labchipª
systems that enable high-throughput screening for drug discovery, medical
treatment, and biological and genetic research.
http://www.calipertech.com/Welcome.html
228. Analog Devices, Inc.
Analog Devices is a semiconductor company that develops, manufactures
and markets high-performance integrated circuits (ICs) used in signal-processing
applications. The Company's largest single product group is general-purpose
Standard Linear ICs (SLICs), which include data converters and amplifiers.
ADI has also become a major Digital Signal Processing (DSP) IC supplier,
providing both general-purpose DSPs and highly integrated application-specific
devices that combine analog and digital signal-processing capability in
a single IC. They also have a 6" wafer fab dedicated to the development
of Analog Device's integrated microelectromechanical systems ( iMEMS registered
trademark ) as well as the development and Analog's accelerometer business.
http://www.analog.com/index.html
229. CoreTek, Inc.
CoreTek, Inc. (MA) is a developer of microelectromechanical (MEMs) devices
for applications in wavelength division multiplexed communication systems.
230. Optonor AS
The company Optonor AS is located in Trondheim, Norway. Optonor AS,
started in April 1997, cooperates closely with the Group of Applied Optics
at the Norwegian University of Science and Technology, and with the Applied
Optics Group at SINTEF Applied Physics. All together, the Trondheim group
has about 30 years of experience in the field of laser based interferometry
techniques, and has earlier delivered close to 40 TV-holography systems
for research and development applications in Europe, USA and Asia. Optonor's
products include a system to perform deformation and vibration analysis
on MEMS and small structures.
231. Resonetics
Founded in 1988, Resonetics specializes in micromachining technology
for high volume contract manufacturing, production laser micromachining
systems and quick prototyping workstations.
*********************************
Home Pages of Individuals (Listed alphabetically)
Albrecht, J?rg
J?rg Albrecht's MST/MEMS page
http://www.infotech.tu-chemnitz.de/~albrecht/mst-home.html
J?rg Albrecht's List of MST/MEMS Sites
Disclaimer: This list is not well ordered yet, and not all links have
been checked for their correctness! Hence, you might possibly encounter
outdated/moved or even incorrect dead-end links (misspellings, targeted
web-server does not exist anymore, or the like.)
http://www.infotech.tu-chemnitz.de/~albrecht/mst-sites.html
Aluru , Narayan R.
Assistant Professor, General Engineering Department
Affiliate, Beckman Institute
http://www-ceg.ceg.uiuc.edu/~aluru
Ananthasuresh , Suresh G. K.
Assistant Professor of Mechanical Engineering & Applied Mechanics
The University of Pennsylvania
http://www.seas.upenn.edu/~gksuresh/#research
B?hringer , Karl
This page contains information, papers, and animations about manipulation
strategies with microfabricated actuator arrays. The electrostatic actuators
are fabricated in a single-crystal silicon etching and metallization (SCREAM)
process. They were built in the National Nanofabrication Facility at Cornell
University.
http://simon.cs.cornell.edu/Info/People/karl/MicroActuators/
Horowitz, Robert
Professor
Department of Mechanical Engineering
5138 Etcheverry Hall
University of California, Berkeley, CA 94720-1740
http://euler.Berkeley.EDU/~horowitz/
Hubbard , Ted
Assistant Professor, P. Eng.
Graduate Coordinator
DalTech MEMS Engineering Design Group
http://micron.me.tuns.ca/~hubbardt/
Kolesar , Edward S.
Moncrief Professor of Engineering
Department of Engineering, Box 298640
Fort Worth, TX 76129
E.Kolesar@tcu.edu
PH: (817) 257-7126
FAX: (817) 257-7136
http://www.engr.tcu.edu/home/faculty/ed.htm
Lin , Liwei
Lin Group Home Page
Professor Lin does MEMS (Micro-Electro-Mechanical Systems) related research,
here at the University of Michigan at Ann Arbor in the Mechanical Engineering
and Applied Mechanics (MEAM) Department.
http://linlabdell1.engin.umich.edu/
Madou , Marc
Dr. Marc Madou's Web Site
292 Watts Hall, 2041 College Rd.
Phone: (614) 292-9212
E-mail: madou.1@osu.edu
Fax: (614) 292-9377
Mailing address is:
477 Watts Hall, 2041 College Road
Columbus, Ohio 43210
http://www-s2k.arc.nasa.gov/mems/home.html
Muller , Richard S.
Director, Berkeley Sensor & Actuator Center (BSAC)
Department of Electrical Engineering and Computer Sciences
University of California at Berkeley
http://www-bsac.eecs.berkeley.edu/~muller/
Najafi, Khalil
Associate Professor
Center For Integrated Sensors and Circuits
Deptartment of Electrical Engineering and Computer Science
University of Michigan
1301 Beal Avenue
Ann Arbor, Michigan, 48109-2122
Tel: (734) 763-6650, Fax: (734) 763-9324
http://www.eecs.umich.edu/najafi/
Nguyen , Clark T.-C.
2406 EECS Bldg., Department of Electrical Engineering & Computer
Science
1301 Beal Ave, Ann Arbor, Michigan 48109-2122
Tel: (313) 764-1220, Fax: (313) 763-9324
E-mail: ctnguyen@eecs.umich.edu
http://www.eecs.umich.edu/~ctnguyen/
Ozsoz , M. E. Sengun
Professor, Department of Analytical Chemistry, Faculty of Pharmacy.
Ege University
35100 Bornova - Izmir, Turkiye
ozsozs@eczacilik.ege.edu.tr
(232) 388 2241 Tel
(232) 388 52 58 FAX
http://pharmacy.ege.edu.tr/bolum/analitik/ozsozs.html
Pisano , Albert 'Al' P.
Program Manager
Electronics Technology Office (ETO)
Defense Advanced Research Projects Agency (DARPA)
The primary goal of the DARPA MEMS Program is to develop the technology
to merge sensing, actuating, and computing in order to realize new systems
that bring enhanced levels of perception, control, and performance to weapons
systems and battlefield environments.
http://web-ext2.darpa.mil/ETO/People/PMs/pisano.html
Solgaard , Olav
Assistant Professor
University of California, Davis
Microphotonics Laboratory
http://www.cipic.ucdavis.edu/~olav/
Tabata , Osamu
Osamu Tabata's Home Page
He is an associate editor of Journal of Micro Electro Mechanical Systems
and an editorial board member of Sensors and Actuators. Also he is a program
committee member of many International Conferences. He is a member of the
Institute of Electrical Engineers of Japan, the Society of Mechanical Engineers
and the Institute of Electrical and Electronics Engineers. He is currently
engaged in the research and development of solid-state sensors, integrated
silicon sensors, MEMS, silicon micromachining and thin film mechanical
property evaluation.
http://www.ritsumei.ac.jp/se/~tabata/tabata.html
http://www.ritsumei.ac.jp/se/~tabata/index-j.html
Trimmer , William S. N.
President of Belle Mead Research, specializing in MEMS.
Editor of the IEEE book "Micromechanics and MEMS"
http://home.earthlink.net/~trimmerw/mems/trimmer.html
Williams , Kirt R.
He is studying micromachined vacuum devices based on thermionic emission
(i.e., using a hot cathode) and the technology to fabricate them. These
devices have application as sensors and in amplifying and logic circuits
(i.e., as vacuum tubes), and are expected to be able to withstand higher
temperatures and more intense radiation than conventional semiconductor
devices. They can also be used as intense, very localized broadband radiation
sources in spectroscopic sensors.
http://www-bsac.eecs.berkeley.edu/users/williams/
Winick , David
David Winick's home page
His ongoing projects include
Design and Application of Microelectromechanical Interconnect
Electronics Research Laboratory Homepage
Hyperscalar Microprocessor Design
Object Oriented File System
http://www4.ncsu.edu/eos/users/d/dawinic/pub/my_home.html
*********************************
Space and Spacecraft Related Sites
Basics of Space Flight
This module is the first in a sequence of training modules that pertain
to space flight operations activities. There is no prerequisite. The goal
of this training module is to provide an aid for identifying and understanding
the general concepts associated with space flight in general and deep space
missions in particular. It offers a broad scope of limited depth, presented
in 17 chapters. Specific learning objectives are listed at the beginning
of each chapter in terms of what you are expected to be able to do upon
finishing the chapter.
http://www.jpl.nasa.gov/basics/bsf-toc.htm
European Space Agency (ESA)
The European Space Agency is at the core of Europe's civil space programme.
Six European countries (Belgium, France, Germany, Italy, the Netherlands
and the United Kingdom) associated with Australia, joined together in 1962
in ELDO, the European Launcher Development Organisation, to develop and
build a launcher system. In 1962, the same countries plus Denmark, Spain,
Sweden and Switzerland formed ESRO, the European Space Research Organisation,
to undertake satellite programmes. Since then the founding members have
been joined by Austria, Norway and later by Finland. Cooperation agreements
have been signed to allow Canada to participate in certain ESA programmes
and sit on the ESA Council.
ESA's activities fall into two categories : mandatory and optional programmes.
Programmes carried out under the general budget and the science programme
budget are mandatory; they include the Agency's basic activities (studies
on future projects, technology research, shared technical investment, information
systems and training programmes). All the Member States contribute to these
programmes on a scale based on their national income. The other programmes,
known as "optional", are of interest to only some of the Member States,
who are free to decide on their level of involvement. Optional programmes
are in areas such as Earth observation, telecommunications, space transportation
(Ariane) and manned spaceflight.
ESA Technology Pages
The European Space Technologies Catalogue (EST) offers an overview of
products in both public and commercial programmes. It is a quick reference
guide of what is available in Europe. For manufacturers, system integrators
and space agencies.
Preparing For the Future is a quarterly newsletter from ESTEC, ESA's
Technology Centre. It highlights recent technological achievements performed
through ESA contracts. For engineers and space-interested public.
Transferable European Space Technologies (TEST). Space Technologies
available for many non-space businesses: medicine, sports, transportation
and many more.
http://esapub.esrin.esa.it/est/
AeroAstro
AeroAstro develops highly efficient space systems which significantly
lower the cost of space operations, bring space capability to a much wider
constituency, and realize new space missions which become feasible by virtue
of their low cost.
http://www.newspace.com/industry/aeroastro/home.html
Orbital Sciences Corporation
Since Orbital's founding in 1982, we have focused on one overriding
objective -- making space more affordable, accessible and useful to millions
of people on Earth. We have progressed toward that goal, first with the
development of revolutionary small space systems - launch vehicles, satellites,
space sensors and electronics, and ground stations - and then by expanding
into satellite access products, and, finally, into satellite-based communications
and information services. This unrivaled blend of capabilities incorporates
innovative product designs, advanced technologies and lean manufacturing
operations that reduce the cost of using space.
http://www.orbital.com/OSC/index.html
Orbiting Technology Testbed Initiative (OTTI) Integrated Trade Study
The general objective of this integrated NASA trade study is to determine
the need and feasibility of developing an in-flight testbed in support
of future NASA, DoD, and commercial satellite programs. The concept is
expected to determine whether such a mission (or series of missions), when
launched into a harsh radiation environment above low earth orbit (LEO)
will provide a means of enabling the advent of improved performance and
reduced cost spacecraft.
http://see.msfc.nasa.gov/otti/orbiting.htm
The Aerospace Corporation
The Aerospace Corporation draws on a breadth and depth of technical
expertise to provide general systems engineering and integration for all
phases of space systems development. These phases included initial concept
test design and design validation, early-orbit check-out and operation
and all the intermediary phases. Because of its involvement with the full
range of national security space programs, as well as many NASA and other
civil and commercial space systems, The Aerospace Corporation is in a position
to consolidate a large body of lessons learned and to contribute essential
integration of engineering tasks among all programs.
SOAP; Satellite Orbital Analysis Program
SOAP is an Aerospace Corporation developed interactive 3D orbit visualization
and analysis program for Windows 95/NT, Power Macintosh, and Sun Solaris
computers. SOAP is capable of simultaneously propagating thousands of satellites,
ground stations, aircraft, ships, and planets. In addition to real-time
visualization, SOAP has extensive orbit analysis and output capabilities.
SOAP - Major Features
"Real-time" general-purpose satellite visualization.
Supports NORAD SGP4, ASTROLIB, Low Thrust, and SPICELIB (JPL) propagators.
"Live" animated XY plotting of over 80 types of information (orbit parameters,
true/false visibility
between objects, angles between objects, rise-set times, and much more).
Extensive capability for sensor modeling, pointing, and swath generation.
http://www.aero.org/software/soap/
SUNSAT, Stellenbosch University Satellite
Sunsat is a micro-satellite built by post-graduate engineering students
in the Electronic Systems Laboratory, in the Department of Electrical and
Electronic Engineering at the University of Stellenbosch.It is due for
launch in 1998 on a Delta II Launch Vehicle. Payloads include NASA experiments,
Radio Amateur communications, a high resolution imager, precision attitude
control, and school experiments. At present the launch time is expected
to be 8 January 1999 at 10h58,30 GMT.
http://sunsat.ee.sun.ac.za/index_n3.htm
Joe's Rocket Simulations
This site contains'
Delta-V Calculator
Simple Rocket Simulator
Simulation Code in Java
Links to other rocket simulators
http://www-acs.ucsd.edu/~jstrout/rocketsim/
MLB Company
MLB produces and sells unmanned airplanes and helicopters that are also
called micro air vehicles (MAVs), unmanned air vehicles (UAVs), spy planes,
and remotely piloted vehicles (RPVs). We build aircraft for research and
development, R&D, in aeronautics, communications and robotics. Our
services include airborne photographs and videos also known as helicopter
video, aerial photography and airborne video. Our engineering involves
autonomous helicopters, autonomous aircraft, radio controlled aircraft
and helicopters, and aerial robotics. Our aeronautical designs, R&D
and aerodynamics use multidisciplinary design optimization (MDO). Steve
Morris (Stephen J. Morris) is President of MLB, also known as MLB Co and
MLB Company.
NASDAS
National Space Development of Japan
This homepage is a compilation of overall information about the organization
of the National Space Agency of Japan(NASDA), its activities, technology,
and publications. Menu items listed in the homepage include NASDA's structure,
launch information, press releases and technical information, covering
a wide variety of NASDA's current activities..
http://www.nasda.go.jp/index_e.html
It also contains links to many more space related sites worldwide at
http://www.nasda.go.jp/WorldSite/WorldSite_e.html
CNES
The French space agency activities in earth and environmental sciences
http://www-projet.cst.cnes.fr:8060/introGEO.html
ARGOS Space Technology
ARGOS is the largest and most capable Air Force research and development
(R&D) satellite ever to fly. This heavy-weight satellite, of almost
three tons, responds to the periodic need to fly Department of Defense
(DoD) payloads which cannot be flown on the space shuttle or small launch
vehicles due to complexity, size and mission duration constraints.
http://www.te.plk.af.mil/arpics/apage2.htm
Spectrum Astro
Founded in 1988 for the design and manufacture of low-cost, high performance
satellites, Spectrum Astro is today the industry leader in developing space
technologies for scientific, defense and commercial applications.
SpaceQuest, Ltd.
SpaceQuest is a small business specializing in the design, development,
test and operation of low-earth orbit satellites, wireless communications
equipment, and data relay systems. SpaceQuest constructed the first mobile
satellite communications terminal to be carried to the North Pole by an
Arctic expedition team. The terminal was used to transmit two-way messages
and digital photographs to SpaceQuest's satellite ground station in Fairfax,
Virginia.
http://www.spacequest.com/home.htm
AIAA
The nonprofit American Institute of Aeronautics and Astronautics is
the principal society and voice serving the aerospace profession. Its primary
purpose is to advance the arts, sciences, and technology of aeronautics
and astronautics and to foster and promote the professionalism of those
engaged in these pursuits.
Air Force Research Laboratories
Grapefruits To Orbit
http://www.wdv.com/Notebook/Grapefruit/index.html
Canadian Space News
Canadian Space News, published since October 1995, is a monthly, e-mail
based, news feed covering news of general interest on Canadian space-related
activities.
Canadian Space News
Under construction
http://www.space.ca/space.html
Small Satellite and Related Pages
These pages form an index to useful web information that discusses satellite
constellations. You won't get a complete picture of what any scheme is
capable of, or in-depth technical details, but you will get an idea of
who the competitors in this new area are, and where the market is going.
http://www.ee.surrey.ac.uk/Personal/L.Wood/constellations/
Small Satellites Home Page
The purpose of these page is to provide up to date information, resources,
references and links for space researchers and enthusiasts via the medium
of the internet, and in particular the World Wide Web.
http://www.ee.surrey.ac.uk/CSER/UOSAT/SSHP/
Microcosm, Inc.
Microcosm, established in 1984, specializes in reducing space mission
cost. Their experience covers commercial, military, and scientific missions
from small, low-cost programs to multi-billion dollar, multi-satellite
constellations and a family of launch vehicles.
Center for Satellite Engineering Research, University of Surrey, Guildford,
Surrey GU2 5XH, United Kingdom
The following site contains a list of educational establishments known
to be involved in small spacecraft projects. This can be either in experiments,
parts of satellites, or entire satellites. Where known, specific spacecraft
project names appear in brackets, including a year when launched (or expected
to be launched).
http://www.ee.surrey.ac.uk/EE/CSER/UOSAT/SSHP/educational.html
Weber State U. Center for Aerospace Technology
Ref: http://www.gsfc.nasa.gov/gsfc/small_sat/small_sat.html
Johns Hopkins U. Applied Physics Lab. Space Department
The Space Department, as part of the Applied Physics Laboratory, advances
the University's public service mission through research, education, and
the application of knowledge to human affairs. The Department, as a university
resource for space systems, defines and implements solutions to problems
in both the civilian and national security arenas through the development
and application of space science, engineering, and technology.
MIT Space Engineering Research Center
Ref: http://www.gsfc.nasa.gov/gsfc/small_sat/small_sat.html
University of Maryland Space Systems Laboratory
The Space Systems Laboratory (SSL) is dedicated to making human beings
more productive while working in space. They believe that both humans and
robots, working together, are necessary to accomplish this goal. They are
currently developing robotic systems capable of assisting astronauts in
EVA (spacewalk) tasks, thus making EVA excursions shorter and safer, and
in some cases allowing astronauts to perform tasks that would otherwise
be impossible. They also study the ways the human body works in space,
quantify human abilities in orbit, and design tools and systems to help
astronauts work in space.
Satellite Tracking WEB Page
http://www.portents.com/marek/satellite/
SSDL
Stanford University's Space Systems Development Laboratory
http://maverick.stanford.edu/~ssdl/
SSDL
Other sites of interest to space system designers around the web, including
publications, conferences, databases and other university programs around
the world.
http://maverick.stanford.edu/~ssdl/others/index.html
Orbiting Picosatellite Automated Launcher, OPAL
OPAL is Stanford University's second Satellite QUIck Research Testbed
(SQUIRT) satellite. As part of the Space Systems Development Laboratory
(SSDL) the SQUIRT project exposes graduate level students to all aspects
of satellite design, construction, testing, and operations.
http://ssdl.stanford.edu/opal/home.html
Center for NanoSpace Technologies
A Division of the Institute for Advanced Interdisciplinary Research
Hephaestus Systems, Inc. manufactures and operates state-of-the-art
micro and nano-satellites for academic and corporate projects. Based on
the SQUIRT-Class microsatellite specification developed by Stanford's SSDL
(Satellite Systems Development Laboratory), the satellites designed, built,
and operated by HSI continue to push the upper bounds of technological
innovation, reliability, and mission success.
http://aa.stanford.edu/~ssdl/kiwi/hephaestus/
Satellite Links
Nano, micro and small university satellites, satellites link pages,
satellites and deep, space missions and companies, general Space
http://enws229.eas.asu.edu/shea/space.html
Microsatellites
ASTRID and ASTRID 2
SpaceVest
SpaceVest has become a world leader since its founding in 1991 for venture
capital investments in privately-held Space Industry companies - companies
which supply, support, or depend on space-related activities encompassing
a broad array of applications. These applications include wireless telecommunications,
positioning systems, satellite remote sensing, geographical information
systems, advanced security systems, software tools, and many other growth
areas. Investments are diversified across the four distinct sectors of
the Space Industry: Telecommunications, Infrastructure, Emerging Applications,
and Support Services.
Scientific and Technical Information
Note: While these are publicly available Web sites, they are designed
for users with advanced technical knowledge of NASA's programs and related
fields.
http://www.nasa.gov/techinfo.html
NASA Advanced Human Support Technology Program
The Advanced Human Support Technology Program supports NASA and Life
Sciences Division goals and objectives by supporting the development of
technology enabling space missions. The program has three elements:
Space Human Factors Engineering
Advanced Life Support and
Advanced Environmental Monitoring & Control
http://www.hq.nasa.gov/office/olmsa/lifesci/advhuman.htm
Munin Nanosatellite
Very small - Mass: approximately 5 kg.
Very fast - 1.5 years from idea to orbit.
Low Cost - fraction of traditional scientific satellite cost.
Scientific value - Payload: science instruments for auroral
research.
Student project - Swedish Institute of Space Physics / Luleå
University of Technology joint project.
"The Space Environment: An Overview " by C. K. Purvis, NASA Lewis Research
Center.
The interactions between space systems and their orbital environments
are discussed in overview. Attention is focused on those environment factors
appropriate to earth orbital vehicles. Ways in which space systems interact
with their environment and effects on system performance and lifetime are
described.
The information in this document represents "basic" knowledge concerning
space environment effects and their interactions with spacecraft. It is
meant as introductory material to the field and attempts to capture the
present state of knowledge. As such it is an evolving document.
http://satori2.lerc.nasa.gov/DOC/seeov/seeov.html
EWB: The Environment WorkBench
EWB is a desktop (available for UNIX and PC/MS-Windows), integrated
analysis tool for the study of a spacecraft interactions with its environment.
Over 100 environment and analysis models are integrated into the menu based
tool.
http://satori2.lerc.nasa.gov/DOC/EWB/ewbhome.html
NASA Goddard Space Flight Center , Small Satellite Technology Pages
http://www.gsfc.nasa.gov/gsfc/small_sat/small_sat.html
National Aeronautics and Space Administration
Spacecraft Systems Division
Customer Needs Page Electric Currents from Space
http://ranier.hq.nasa.gov/SCRS_Page/SSDneeds.html
Electric Currents from Space
http://www-spof.gsfc.nasa.gov/Education/wcurrent.html
The Radio Amateur Satellite Corporation
Keplerian Elements Tutorial. This tutorial is based on the documentation
provided with InstantTrack, written by Franklin Antonio, N6NKF.
http://www.amsat.org/amsat/keps/kepmodel.html
NASA, Small Spacecraft Technology Initiative
http://ranier.oact.hq.nasa.gov/SSTI_Page/SSTIHome.html
Little Robots in Space
American Scientist, March-April, Science Observer
http://www.amsci.org/amsci/issues/Sciobs98/sciobs98-03robots.html
Teledesic
Teledesic is building a global, broadband "Internet-in-the-Sky." Using
a constellation of low-Earth-orbit satellites, Teledesic and its partners
will create a network to provide affordable, worldwide, "fiber-like" access
to telecommunications services such as broadband Internet access, video
conferencing, high-quality voice and other digital data needs. On Day One
of service (2003), Teledesic will enable broadband telecommunications access
for businesses, schools and individuals everywhere on the planet.
http://www.teledesic.com/index.htm
Beam Robotics
*********************************
Other Sites of Interest
Elsevier Science
Springer-Verlag
Online catalog
Browse through all abstracts of all issues of the journal since 1996.
http://link.springer.de/link/service/journals/00542/index.htm
Free sample copies
http://www.springer.de/customers/sample.html
A Guide to math resources
Offers resource jump list to various math resources, including the Latex,
Tex, and Maple packages. Also contains jumps to math related gopher sites,
newsgroups, math institues, and a math software index.
http://www.ama.caltech.edu/resources.html
A listing of Physics Resources on the World Wide Web
http://aip.org/aip/physres.html
White House Office of Science & Technology Policy
The Office of Science and Technology Policy (OSTP) was created in 1976
to provide the President of the United States with timely policy advice
and to coordinate the science and technology investment.
http://www.whitehouse.gov/WH/EOP/OSTP/html/OSTP_Home.html
Canadian Technology Gateway
http://strategis.ic.gc.ca/sc_innov/engdoc/homepage.html
Gopher periodic table of the elements
gopher://ucsbuxa.ucsb.edu:3001/11/.Sciences/.Chemistry/.periodic.table
Accelerator Physics at SLAC
Describes accelerator physics at the Stanford Linear Accelerator Center.
Includes links to most accelerator physics and resources on the web, including
almost all accelerator labs in the world, lab-specific and general news
and job-listing sites, physics societies and organizations, texts, and
more.
http://beam.slac.stanford.edu/
Kluwer Academic Publishers Home page.
This is an electronic gateway to Kluwer, and it 's free, it's current,
and it's all available on your computer. Each Kluwer journal has its own
home page, which includes past, present, and future article listings. Here
you can also review the aims and scope for any journal, along with submission
and subscription information.
Hacker Proof 98 was designed and developed to protect you on the Internet
from being hacked by other individuals and to protect your computer data.
It was designed to give you an absolute sense of security and privacy when
you're on-line.
http://www.hackerproof98.com/index.htm
CFX, Computational Fluid Engineering
CFX is a fluid engineering software tool which you can use to simulate
many types of industrial flow and heat transfer processes.
FEDWORLD
Fedworld is maintained by NIST and provides a channel of access to several
hundred U.S. Government computer systems.
http://www.fedworld.gov/http://www.fedworld.gov/
PEERS
A free service from Institute of Physics Publishing. It provides a moderated
global e-mail directory
of people working in science; a place where you can search for peers,
colleagues or any useful contacts in
your chosen scientific field.
http://www.iop.org/cgi-bin/PEERS/main
National Science Foundation
The National Science Foundation is an independent U.S. government agency
responsible for promoting science and engineering through programs that
invest over $3.3 billion per year in almost 20,000 research and education
projects in science and engineering.
Display Technology Systems (DTS)
DTS is a design and manufacturing company providing ultrahigh vacuum
(UHV) process tools to people in the flat panel display industry. Having
produced some of the world's finest UHV equipment at Perkin-Elmer, Varian,
EPI and Superior Vacuum Technology, the DTS team provides proven expertise
in making tools to people developing Field Emission Device (FED) flat panel
displays.
Silicon Light Machines (Formarly Eschelle, Inc.)
Silicon Light Machines was formed to revolutionize high resolution displays
through the application of Grating Light Valveª, or GLVª technology.
We will commercialize a broad range of display modules and products based
on the patented GLV technology.
http://www.siliconlight.com/frames/about/frame_about.htm
SciCentral
A science and engineering metadirectory maintained by professional scientists
whose mission is to identify and centralize access to the most valuable
scientific resources online. SciCentral currently constitutes a gateway
to over 50,000 sites pertaining to over 120 specialties in science and
engineering.
Ecole Polytechnique Federale de Lausanne, Swiss Federal Institute of
Technology
Miniature Robots and Subsystems Group
http://diwww.epfl.ch/w3lami/mirobots/
Robot learning, biovision and robotics
http://diwww.epfl.ch/lami/biovision/biovision.html
Collective Robotics Group
http://diwww.epfl.ch/lami/collective/collective.html
Links to other robotics sites
http://diwww.epfl.ch/lami/collective/Sommaire_bibliotheque.html
Transtech
Transtech Parallel Systems designs and manufactures embedded multi-processing
products for OEM, end-user and scientific research applications. Transtech
produces signal processing and computing systems based on Analog Devices
SHARC (Super Harvard ARChitecture) DSPs, PowerPC processors, Texas Instruments
TMS320C4x DSPs, SGS Thomson transputers and the Intel i860.
http://www.transtech.com/cover.htm
http://www.transtech.com/company1.htm
Microelectronics and Computer Technology Corporation
MCC is an industrial research and development consortium that provides
consortial R&D services. MCC maps precompetitive technology in advanced
electronics and information technology to the business requirements of
its member companies. MCC's research and development strategy encompasses
three key activities: technology development, technology sourcing, and
technology integration.
Search the site below for satbot.
Spatial Self-Organization in Large Populations of Mobile Robots by Cem
Ýnsal and John S. Bay
http://armyant.ee.vt.edu/bayWWW/spatial.html
"Self-Organization in Large Populations of Mobile Robots", by Cem Ýnsal
Thesis submitted to the Faculty of the Virginia Polytechnic Institute
and State University in partial fulfillment of the requirements for the
degree of Master of Science
http://armyant.ee.vt.edu/unsalWWW/cemsthesis.html#cont
MicroMath
MicroMath develops and distributes software for scientists and engineers.
Our Windows/DOS based products establish a new category of software exclusively
for solving equation systems and fitting experimental data .
MathSoft, Inc.
MathSoft is a provider of math, science and engineering software for
business, research, academic and government markets.
or, to go directly to the Mathcad page,
North Carolina State University Scanning Probe Homepage
U.S. Federal Government Agencies Directory
A List of Federal Agencies on the Internet
http://www.lib.lsu.edu/gov/fedgov.html
National Center for Environmental Research and Quality Assurance
Office of Research and Development
U. S. Environmental Protection Agency
Institute of Robotics and System Dynamics
Design of mechatronic systems is the main goal of the institute. Examples
are new lightweight robots and advanced vehicle systems with active components.
Such projects integrate the core skills in dynamic system modelling and
simulation, design of robust control algorithms and multibody formalisms,
development of highly integrated robot sensors and actuators and remote
control of semi-autonomous systems.
National Engineering Education Delivery System
Here is a site listing engineering tutorials.
*********************************
Disclaimer
This page is maintained to promote communication within the MEMS community
and to provide information to any interested parties. The criteria for
a site being listed are that it contains information deemed by the author
as useful to the MEMS community and that he is aware of its existence.
No recommendation or endorsement of any organization, product or person
maintaining the sites is either stated or implied.
Copyright
Other web sites are welcomed to set links to this site. However, it
may not in any way be copied in part or in its entirety without the express
written permission of the author.
Return to MEMS at trimmer.net (TM)